JPH0453063U - - Google Patents
Info
- Publication number
- JPH0453063U JPH0453063U JP9299990U JP9299990U JPH0453063U JP H0453063 U JPH0453063 U JP H0453063U JP 9299990 U JP9299990 U JP 9299990U JP 9299990 U JP9299990 U JP 9299990U JP H0453063 U JPH0453063 U JP H0453063U
- Authority
- JP
- Japan
- Prior art keywords
- arc segments
- insulating piece
- ring
- gap
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案に係る絶縁装置を具備したウエ
ーハ処理装置の概念断面図、第２図は第１図のＡ
−Ａ矢視図、第３図は周壁絶縁物の接合部の部分
平面図、第４図は絶縁装置接合部の部分斜視図、
第５図は一般的ウエーハ処理装置の概念図である
。
６はリング状電極、８は絶縁装置、１２は周壁
絶縁物、１５は円弧分体、１６は絶縁駒を示す。
FIG. 1 is a conceptual cross-sectional view of a wafer processing apparatus equipped with an insulating device according to the present invention, and FIG. 2 is an A of FIG.
-A arrow view, FIG. 3 is a partial plan view of the joint of the peripheral wall insulator, and FIG. 4 is a partial perspective view of the insulating device joint,
FIG. 5 is a conceptual diagram of a general wafer processing apparatus. Reference numeral 6 indicates a ring-shaped electrode, 8 an insulating device, 12 a peripheral wall insulator, 15 an arc segment, and 16 an insulating piece.
Claims (1)
を複数の円弧分体に分割し、隣接する円弧分体の
端部間に空隙を形成し、該空隙に少なくとも半径
線方向に対して屈曲した面を有する絶縁駒を嵌入
し、隣接する円弧分体を連結したことを特徴とす
るリング状高周波電極の絶縁装置。 The peripheral wall insulator surrounding the outer circumferential side of the ring-shaped high-frequency electrode is divided into a plurality of circular arc segments, a gap is formed between the ends of adjacent circular arc segments, and a surface bent at least in the radial direction is formed in the gap. 1. An insulating device for a ring-shaped high-frequency electrode, characterized in that an insulating piece having an insulating piece is fitted in the insulating piece, and adjacent arc segments are connected to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9299990U JPH0453063U (en) | 1990-09-04 | 1990-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9299990U JPH0453063U (en) | 1990-09-04 | 1990-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453063U true JPH0453063U (en) | 1992-05-06 |
Family
ID=31829878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9299990U Pending JPH0453063U (en) | 1990-09-04 | 1990-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453063U (en) |
-
1990
- 1990-09-04 JP JP9299990U patent/JPH0453063U/ja active Pending