JPH0453063U - - Google Patents

Info

Publication number
JPH0453063U
JPH0453063U JP9299990U JP9299990U JPH0453063U JP H0453063 U JPH0453063 U JP H0453063U JP 9299990 U JP9299990 U JP 9299990U JP 9299990 U JP9299990 U JP 9299990U JP H0453063 U JPH0453063 U JP H0453063U
Authority
JP
Japan
Prior art keywords
arc segments
insulating piece
ring
gap
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9299990U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9299990U priority Critical patent/JPH0453063U/ja
Publication of JPH0453063U publication Critical patent/JPH0453063U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る絶縁装置を具備したウエ
ーハ処理装置の概念断面図、第２図は第１図のＡ
−Ａ矢視図、第３図は周壁絶縁物の接合部の部分
平面図、第４図は絶縁装置接合部の部分斜視図、
第５図は一般的ウエーハ処理装置の概念図である
。 ６はリング状電極、８は絶縁装置、１２は周壁
絶縁物、１５は円弧分体、１６は絶縁駒を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. リング状高周波電極の外周側を囲む周壁絶縁物
    を複数の円弧分体に分割し、隣接する円弧分体の
    端部間に空隙を形成し、該空隙に少なくとも半径
    線方向に対して屈曲した面を有する絶縁駒を嵌入
    し、隣接する円弧分体を連結したことを特徴とす
    るリング状高周波電極の絶縁装置。
JP9299990U 1990-09-04 1990-09-04 Pending JPH0453063U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9299990U JPH0453063U (ja) 1990-09-04 1990-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9299990U JPH0453063U (ja) 1990-09-04 1990-09-04

Publications (1)

Publication Number Publication Date
JPH0453063U true JPH0453063U (ja) 1992-05-06

Family

ID=31829878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9299990U Pending JPH0453063U (ja) 1990-09-04 1990-09-04

Country Status (1)

Country Link
JP (1) JPH0453063U (ja)

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