JPH0453504U - - Google Patents
Info
- Publication number
- JPH0453504U JPH0453504U JP8694190U JP8694190U JPH0453504U JP H0453504 U JPH0453504 U JP H0453504U JP 8694190 U JP8694190 U JP 8694190U JP 8694190 U JP8694190 U JP 8694190U JP H0453504 U JPH0453504 U JP H0453504U
- Authority
- JP
- Japan
- Prior art keywords
- movable
- measuring device
- length measuring
- reflective element
- interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 241000282326 Felis catus Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第１図は、本考案にかかる一実施例を示す断面
図、第２図は、同実施例において可動子を離脱さ
せた場合の使用形態図、第３図は、従来例である
接触式干渉測長器の断面図、第４図は、従来例で
ある非接触式干渉測長器の断面図である。
１……干渉測長器、２……測長器本体、４……
可動子、６……レーザ（光源）、１０……可動側
ハーフミラー（キヤツツアイ、移動反射素子）、
１２……凸レンズ（キヤツツアイ、移動反射素子
）。
Fig. 1 is a sectional view showing an embodiment of the present invention, Fig. 2 is a usage pattern diagram when the mover is removed in the same embodiment, and Fig. 3 is a conventional contact type interference FIG. 4 is a sectional view of a conventional non-contact type interferometric length measuring device. 1... Interferometric length measuring device, 2... Length measuring device body, 4...
Movable element, 6... Laser (light source), 10... Movable side half mirror (catseye, movable reflective element),
12...Convex lens (cat's eye, moving reflective element).
Claims (1)
と、前記干渉計を構成する移動反射素子を備えた
可動子とからなり、該可動子を移動させることで
被測定対象の長さを計測する干渉測長器において
、前記可動子は前記測長器本体に着脱自在に取り
付けられたことを特徴とする干渉測長器の構造。 (2) 前記可動子の前記移動反射素子は、該移動
反射素子に入射する光の入射角と無関係にその光
を逆進させる性質を有する移動反射素子としたこ
とを特徴とする請求項１記載の干渉測長器の構造
。[Claims for Utility Model Registration] (1) Consisting of a length measuring device body equipped with a light source constituting an interferometer, and a movable element equipped with a movable reflection element constituting the interferometer, the movable element is moved. A structure of an interferometric length measuring device for measuring the length of an object to be measured, wherein the movable element is detachably attached to the length measuring device main body. (2) The movable reflective element of the movable element is a movable reflective element having a property of causing light to travel backwards regardless of the angle of incidence of the light incident on the movable reflective element. Structure of interferometric length measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8694190U JPH0453504U (en) | 1990-08-20 | 1990-08-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8694190U JPH0453504U (en) | 1990-08-20 | 1990-08-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0453504U true JPH0453504U (en) | 1992-05-07 |
Family
ID=31818889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8694190U Pending JPH0453504U (en) | 1990-08-20 | 1990-08-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453504U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015072225A (en) * | 2013-10-03 | 2015-04-16 | 株式会社大林組 | Bedrock mounting structure of displacement sensor |
-
1990
- 1990-08-20 JP JP8694190U patent/JPH0453504U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015072225A (en) * | 2013-10-03 | 2015-04-16 | 株式会社大林組 | Bedrock mounting structure of displacement sensor |