JPH0454443A - Defect inspection device - Google Patents

Abstract

PURPOSE:To enlarge and display a desired position of a defect part and to handle even a continuous defect by providing a deciding means which divides an image signal of the surface of a material to be inspected into plural blocks and finds the block containing the detected defect. CONSTITUTION:The reflected light of laser light is detected by a photodetector 68 and amplified, and its waveform is shaped, so that a defect deciding means 76 detects whether or not there is a defect. The block deciding means 78 finds the block which contains the coordinates (address) of a defect signal pulse. Then a cutting control means 88 transfers data from a bulk memory 82 to a frame memory 86 so that the block of the defect signal comes to a specific position on a monitor 92; and a D/A converter 90 performs conversion into an analog image signal (c), which is displayed on a monitor 92. Consequently, an image of the block which contains the defect is enlarged and displayed at a specific position on the monitor, and whether or not there is a defect, its size and kind, etc., and even a long defect are confirmed.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention scans the surface of a steel plate, paper, plastic film, or IC wafer and displays an image containing defects on a monitor, making the defects visible. This invention relates to a defect inspection device.

(Prior technology) The surface of a steel plate, paper, etc. is optically scanned, and defects such as scratches that appear on the surface are displayed on a monitor TV. By visually observing the defects on the monitor, the existence, size, and type of defects can be determined. Conventionally, there are surface inspection devices that are capable of determining.

For example, Japanese Patent Publication No. 63-43685 discloses a surface inspection device that reads an image of the surface of a material to be inspected by optical scanning and displays the image so that the entire width of the material to be inspected appears within the width of the display screen of a monitor. There is. If there is a defect on the surface, the image is temporarily stopped so that the defect is located in the center of the monitor in the direction in which the inspection material is fed, so that it can be visually observed.

FIG. 13 is a block diagram of this conventional apparatus, and FIG. 14 is a diagram showing the display area of the inspected material displayed on the monitor.

In FIG. 13, reference numeral 10 denotes an image detection means, which outputs an analog image signal a by optically scanning the surface of the material to be inspected. This image detection means 10 is
For example, a flying spot method can be used in which light is scanned over the inspection target material using a rotating mirror and the reflected light of this light is collected by a light receiver. In addition, the surface of the material to be inspected is irradiated with a rod-shaped light source arranged in the width direction, and the reflected light is taken into a light receiver via a rotating mirror (a flying image method can be used).

This analog image signal a is converted into a digital image signal by an A/D converter 12 and stored in a frame memory 14 for each scanning line. In this frame memory 14, the earliest contents are sequentially rewritten with the latest data,
The number of scanning lines equal to or greater than the number of scanning lines of the monitor 24, which will be described later, is always stored.

Further, the analog image signal a is inputted to the defect determining means 16, where the presence or absence of a defect is determined. That is, since the output level of the analog image signal a changes suddenly when there are scratches or the like on the surface of the inspected material, defects such as scratches can be determined by processing this signal with a signal processing circuit including a differentiation circuit.

When a defect is detected in this way, the address discrimination means 1
8 determines the position (address) of this defect in the feeding direction based on the feeding amount of the inspected material. When the address of this defect in the forwarding direction is determined, the write control means 2o controls the frame memory 14 when this defect reaches the storage position in the frame memory 14 corresponding to the center of the screen of the monitor 24 in the image forwarding direction.
prohibits the reading of digital signals. After the contents of this frame memory 14 are converted back to analog signals by a D/A converter 22, they are displayed on a monitor television 24 such as a CRT. As a result, a defective portion appears on the monitor 24 at the center of the image forwarding direction. The inspector visually inspects this image and determines whether or not the portion that the inspection device has determined to be defective is actually a defect, and if so, the size and type of the defect. Then, if necessary, the address of this defect is recorded on another recording means such as a printer (not shown), based on the inspector's instructions or automatically, and the image thereof is recorded on a video device.

(Problems with the conventional device) As described above, the conventional device displays the entire width of the inspected material on the monitor TV. too,
Particularly when the width of the inspected material is wide, the defective portion will appear very small. For this reason, it has been difficult to visually determine the size, type, etc. of the defect.

Furthermore, in this conventional device, when a defect is detected, it is necessary for the write control means 20 to prohibit reading of a new digital image signal into the frame memory 14. For this reason, when a plurality of defects appear close to each other in succession, the second defect from the beginning will be overlooked. Therefore, in order to avoid this, a plurality of main 526.
26A, . . . may be used to operate in parallel. In this case, for example, the defect D of the inspected material 28 in FIG.
The main part 26 is used to display the area A1 where the defect D1 is at the center in the feeding direction on the monitor 24, and when the next defect D2 appears subsequently, the area A2 is displayed on the monitor 24 using the other main part 26A. Become.

However, when a plurality of main parts 26, 26A, .

Also, as is clear from FIG. 13, the defects and D2 are both included in areas A1 and A2. Therefore, using the main parts 26 and 26A, areas A and 26A are used, respectively.
, A2 is displayed, both monitors are defective, ,D
, is displayed, and the same screen is displayed twice although the defect display position is different.
The problem was that it would continue for several times.

Furthermore, in this conventional device, since the defect image is read by the image detection means 10 and displayed on the monitor as it is, it is difficult to determine whether the image is a defect or just a striped pattern of lubricating oil or surface protection material. There was also the problem that it was difficult to clearly distinguish the size, etc.

Furthermore, defects have characteristics depending on the type of material to be inspected, such as those that appear in the form of dots and those that appear in the form of lines. However, with this conventional device, for example, if a defect is long in the feed direction, the leading end of the defect appears at the center of the screen in the feed direction, so there is a problem in that the tail of the long defect is likely to come off the screen.

(Object of the Invention) The present invention has been made in view of the above circumstances, and it is possible to visually confirm defects by sufficiently enlarging and displaying the defective part at a desired position, such as near the center of the monitor screen. The first objective is to provide a defect inspection device that is easy to use.

A second object of the present invention is to provide a defect inspection device that can deal with consecutive defects without missing them, and can effectively utilize a small memory capacity without increasing the size of the device.

A third object of the present invention is to provide a defect inspection device that can change the magnification to make it easier to visually observe defects and accurately identify the type of defect.

Furthermore, a fourth object is to provide a defect inspection device that allows defects to appear in the center of the screen depending on the shape of the defect, or to prevent long defects from going out of the screen so that they can be easily recognized. do.

(Structure of the Invention) According to the present invention, a first object is to provide a defect inspection apparatus that detects defects in a material to be inspected and displays them on a monitor from an image signal obtained by scanning the surface of the material to be inspected. a bulk memory for sequentially reading and storing a predetermined number of continuous scanning lines of the inspection material; a defect determining means for determining defects in the inspection material from the image signal; and a surface of the inspection material stored in the bulk memory. block discrimination means for dividing the block into a plurality of blocks and determining a block containing the detected defect; a write control means for temporarily stopping writing in the bulk memory when scanning lines of a predetermined number of blocks including the block containing the defect are read; A defect inspection apparatus comprising: a cutout control means for cutting out a predetermined number of blocks including blocks containing defects from data in the bulk memory and transferring them to a frame memory; and a monitor means for displaying the contents of the frame memory; This is achieved by

The second purpose is to have multiple bulk memories, one for reading and
This can be achieved by activating one while the other is stopped for reading. If multiple frame memories are used here, the degree of freedom in monitor display will increase.

The third object is achieved by further comprising a magnification changing means for receiving the contents of the frame memory and changing the magnification, and a display memory.

The fourth purpose is to make the block containing the defect appear in the center of the monitor screen, or to shift the first block containing the defect to the corner on the start point side of the monitor's main and sub-scanning, so that the block containing the defect appears in the center of the monitor screen. This is achieved by making it appear together with the block. If a plurality of defects appear close to each other, the sizes of the defects may be compared to place the block containing the largest defect at a desired position, such as the center of the monitor.

(Embodiment 1) FIG. 1 is a block diagram of a first embodiment of the present invention, FIG. 2 is a conceptual diagram showing a correspondence relationship between image areas, and FIG. 3 is an output waveform diagram of an image signal, etc.

In FIG. 1, reference numeral 50 indicates a material to be inspected, such as a steel plate, paper, or plastic film, and this material to be inspected 50 is sent from a supply roll 52 to a take-up roll 54. This take-up roll 54 is driven by a take-up motor 56. While the inspected material 50 is being fed, an image on the surface thereof is read by an image detecting means 58 using a flying spot method.

The image detecting means 58 scans the laser beam emitted from the laser light source 60 in the width direction of the inspected material 50 using a rotating mirror (polygonal mirror) 64 rotated by a motor 62 (main scanning). The light reflected by the surface of the inspection material 50 is transmitted to a pair of light receivers 68 by a light receiving rod 66.
(68a, 68b) and receives the light. That is, the light receiving rod 66 is connected to the main scanning line 70 of the laser beam.
When the reflected light is received, it is totally reflected on the inner surface of the light-receiving rondro 6 and guided to both ends thereof.
Photoreceiver 6 such as a photomultiplier (photomultiplier tube)
8, the amount of received light is detected. The image signals output from each photoreceiver 68 are amplified by a preamplifier and a main amplifier, and waveform-shaped, resulting in analog image signals al and a shown in FIG.
2. Howl. In this figure, in each signal a, , a, a signal corresponding to a different consecutive main scanning line 70 appears at regular intervals in the time axis direction. In this figure, d, , d,
2, dz+, and d2□ correspond to defects on the surface of the inspected material 50. In this way, each signal a), a2 is transmitted to the receiver 68.
As the scanning position of the laser beam on the main scanning line 70 moves away from a and 68b, the level decreases, and conversely, as it approaches the scanning position, the level changes so that it increases. Therefore, in this embodiment, both signals a1 and a2 are added by an adder circuit 72, and the influence of the change in scanning position on the main scanning line 70 is removed, and the analog image signal a is obtained. Thereafter, the signal is differentiated in the signal processing circuit 74 to produce an analog image signal a3. This signal a3 includes pulses d3+ and d3□ which change to positive or negative if there is a defect.

Denoted at 76 is a defect determining means, which detects the presence or absence of a defect by comparing the signal a3 with a comparison voltage υ (FIG. 3) at a predetermined level. That is, pulses d, l indicating defects
7. When d32 becomes smaller than the comparison voltage υ, a defect signal d that becomes a pulse is output.

Reference numeral 78 denotes a block determining means, which determines the scanning position of the laser beam at the time when the pulse of the defect signal d is output, that is, the coordinates (address) of the beginning of the defect that appears due to scanning, and determines the block containing this coordinate. demand. In other words, the surface of the material to be inspected 50 is divided into blocks, which are many areas of the same shape lined up in the width direction, as shown in FIG. The block signal b i shown in FIG. Here, the coordinates of the laser beam in the main scanning direction are determined by the rotation angle of the rotating mirror 64, or by providing a starting point detector such as a photosensor in the main scanning direction, and detecting this point based on the elapsed time after the laser beam passes. The coordinates in the sub-scanning direction, which are the positions of the inspection target material 50 in the feeding direction, are detected based on the amount of rotation of the take-up roll 54.

On the other hand, the analog image signal a is converted into a digital image signal by the A/D converter 80 and input to the bulk memory 82. This bulk memory 82 stores the product (Nxn) of the number of pixels of the main scanning line and the number of scanning lines included in one block (Nxn), or an integral multiple thereof (2 in the embodiment shown in FIG. 2).
It has a storage capacity of 2 times) and stores digital image signals for every scan in synchronization with the inspection width gate signal. That is, it has a ring buffer structure in which when the storage area of the bulk memory 82 becomes full, the oldest data is sequentially overwritten. Here, the inspection width gate signal indicates the inspection width within one main scan in synchronization with the rotation of the rotating mirror 64.

As a result, what is stored in the bulk memory 82 are the image signals included in the scanning lines for two blocks lined up in the feeding direction of the inspected material 5o in FIG. It is a surface image of the inspected material 50 shown.

Writing of data into this bulk memory 82 is controlled by a write control means 84. In other words, this means 84 generates a block signal S1 . , the rewriting is performed until the scanning of the area included in this block BIJ is completed, and when this position is reached, the writing is temporarily stopped.

86 is a frame memory. This frame memory 86
Writing of data to is controlled by a cutout control means 88. That is, this means 88 selects this block Bl based on the block signal bl.

The image data included in block B is transferred from the bulk memory 82 to the frame memory 86 so that the block B is placed at a predetermined position on the monitor 92, for example, on the left side of the screen of the monitor 92.

Further, data in the frame memory is recorded on a recording means 91 such as a magneto-optical disk, a floppy disk, a hard disk, or a memory tape as necessary.

The data in the frame memory 86 is converted into an analog image signal C by a D/A converter 90 and displayed on a monitor 92 such as a CRT. Further, the image is recorded on an image recording means 94 such as a videotape or a video printer as necessary.

Also, if necessary, defect discrimination information and block information are displayed on the monitor at the same time as the defect image.

The inspector monitors this monitor 92. Block B1 containing defects. The operator looks at the enlarged still image and determines whether the portion determined to be defective is a true defect, for example, whether it is a striped pattern of oil or protective material that is unevenly adhered to the surface. When the inspector determines that it is a real defect, he presses the recording command switch button 96. When a recording command is output by this switch button 96, the print control means 98 reads the block signal blJ and causes the printer 100 to output this block signal bl. The write control means 84 then starts writing data into the bulk memory 82 again, and causes the monitor 92 to display the next defect.

According to the embodiment described in FIGS. 1 to 3,
The block Bi containing the defect is placed at a predetermined position on the monitor 92,
For example, since it is enlarged and displayed on the left side, it becomes easier to visually confirm the presence or absence, type, size, etc. of defects.

In this embodiment, the defect determining means 76 may use an A/D-converted digital image signal S instead of the analog image signal a3 to determine defects (see hypothetical #j in FIG. 1). .

(Embodiment 2) FIG. 4 is a block diagram of the second embodiment, and FIG. 5 is a conceptual diagram showing the correspondence of image areas.

This embodiment differs from the first embodiment in that a bulk memory 182 and a frame memory 186 each include a plurality of memories 182a, b, . . . and 186a, b, .
. . , and that it includes an image processing means 102 and a display memory 104.

As shown in FIG. 5, the bulk memories 182a, b, . . . detect the respective defects D2, D2, . Areas ABCE, A'B'C'E', . . . containing D, . . . are stored.

In addition, the frame memories 186a, b, . . . have various defects,
, D, , D3... are blocks Bl, 82Bg...
・Remember. When the write control means 184 outputs off b2, b3, the bulk memories 182a, b, . . .
- and stored in the frame memories 186a, b, . Furthermore, the cutout control means 188 sequentially selects frame memories 186a, b, . This magnification changing means 102 changes the magnification of the image and displays it in the display memory 10.
4 and display it on the monitor 92. Further, as shown in FIG. 5, the images of the plurality of frame memories 186a, b, . . . can be divided onto the screen of the monitor 92 for multi-screen display.

According to this second embodiment, a plurality of bulk memories 182
Since defects a, b, . . . are provided, consecutive defects can be displayed on the monitor 92 without being overlooked.

Furthermore, since a plurality of frame memories 186a, b, . . . are provided, each successive defect can be displayed on the monitor 92 over a sufficient period of time.

Furthermore, by providing a magnification changing means 102 and a display memory 104, it becomes possible to change the magnification so as to obtain an image in which defects can be more easily found.

(Third Embodiment) FIG. 6 is a block diagram showing a third embodiment, and FIG. 7 is a conceptual diagram showing correspondence of display areas. In this embodiment, a plurality of adjacent blocks are simultaneously displayed on the monitor 92, and there are a plurality of defects.

When blocks B1 and Bz containing defects appear, the defect levels are compared and block B containing defect D2 with a large level is selected.
2 is moved so that the image is placed in the center of the monitor 92.

That is, when a plurality of defects ,D, appear in the display area of the monitor 92, the block discrimination means 178 stores the block B including the first defect D1 that appears and the level M1 in the defect memory 178a, The comparator 178b compares the level M2 of the next defect D2. Comparison result M
If I<Mt, block B2 containing the later defect D2
The contents of the defective memory 178a are rewritten at level M2. By repeating this operation, the block B2 containing the highest level defect D2 can be moved to a desired position within the monitor 92, for example to the center, and displayed.

(Example 4) FIG. 8 is a diagram showing an example of monitor display in the fourth embodiment.

This embodiment includes four blocks adjacent to the monitor 92;
■, ■, ■ can be displayed, and the block containing defect D1 ■
When this defect D1 is detected, the quadrant within block I in which this defect D1 is located is determined. Other blocks (2), (2), and (2) adjacent to this quadrant are displayed simultaneously. In this example, since it is located in the fourth quadrant, the third quadrant of block 2,
The first quadrant of block m and the second quadrant of block 2 appear adjacent to each other at the center of the monitor.

According to this embodiment, there is a defect D near the center of four blocks.
1 will be located, and neighboring blocks will also be displayed at the same time, making it easier to check the distribution of minute defects around this defect.

(Embodiment 5) Section 9 is a block diagram showing the fifth embodiment, and FIG. 1o is a diagram showing an example of the monitor display thereof.

In this embodiment, a still image containing a defect and a moving image that continuously changes regardless of the presence or absence of a defect are displayed on the monitor 92. In other words, video frame memory 2
00 is provided, the signal of the read image is continuously captured here, and this image is continuously displayed within a certain range on the monitor 92. And in other ranges, still image frame monitor 1
The contents of 86 are sequentially displayed as still images.

By simultaneously displaying the surface condition of a wide area of the inspected material in this way, it is possible to grasp the surface condition of a wide range around the defect and to confirm and judge the defect image more accurately.

In each of the above embodiments, it is assumed that the defect is point-like or small, but in reality, the shape of the defect may be long. Particularly in products such as steel plates and films, defects D3 and D4, which are elongated in the feeding direction of the inspected material 50 or in a direction perpendicular thereto, as shown in FIG. 11, tend to appear.

FIG. 11 is a diagram showing the relationship between the display area and the shape of the defect in such a case, FIG. 12A shows a state in which the defect has jumped out from the monitor, and FIG. 12B shows a state in which the defect is contained in the monitor.

In each of the embodiments described above, the block containing the defect first detected on the scanning line is displayed, for example, in the center of the monitor 92, regardless of the shape of the defect. For this reason, the first
When the inspected material 50 is sent upward and main scanned from left to right as shown in Fig. 1, the point P at the upper left corner of the defect is treated as a defect and the block containing the point P is detected as shown in Fig. 12A. B
, is displayed near the center of the monitor 92. At this time, when the shape is long in the main scanning direction like defect D3, the defect D
The right end of 3 will come off the monitor 92. Similarly, if the defect D4 is long in the feeding direction of the inspected material 50, the lower part of the defect D4 will come off the monitor 92.

In such a case, the block BP containing the detected defect P
By displaying the defects D3 and D4 in the upper left corner of the monitor 92, that is, in the corner of the image display area of the monitor on the main/sub-scanning start point side, almost the entire defects D3 and D4 are displayed on the monitor 92 as shown in FIG. 12B. becomes possible.

In the above embodiments, the size of the block is generally 1 division of the image display area of the monitor (m pixels x n pixels).
36 divisions, that is, (m=m/6) pixels x (n-n/
6) Pixels are preferred, and more preferably 1 to 16 divisions, that is, (m=m/4) pixels x (nn/4) pixels. This can be easily concluded when the objective is to ensure that most of the defect sizes fit into one block and to simplify control of block extraction, etc. as much as possible.

On the other hand, a special but very effective way to set the block size is when the material to be inspected is finally slit to make a product, or when the material to be inspected is cut to a fixed length and width. In this case, the block width is slit width/
It is preferable to set the length of the block to be 17 m or m times the cutting width (m is an integer), and to make the length of the block 1/n times the cutting length (n is an integer). This facilitates the management of good/defective final products.

Although each of the above embodiments has been described as detecting defects appearing on the surface of the material to be inspected 50, the present invention also includes detecting defects inside by scanning the surface. For example, internal defects in a steel plate may be detected using a magneto-optical effect. This detects the leakage magnetic field from defects when the inspected material is magnetized with an alternating magnetic field as a change in the polarization of reflected light.

Furthermore, in the above embodiments, it is explained that the main scan in the width direction of the surface of the material to be inspected is performed by laser scanning, but for example, the image is taken using a flying image type CCD one-dimensional line sensor camera, CC, D two-dimensional camera, etc. However, it is also possible to obtain an image signal by electrical scanning, and these methods are also included.

(Effect of the invention) As described above, the invention of claim (1) enlarges and displays the image of the block containing the defect at a predetermined position on the monitor, so it is possible to display the image of the block containing the defect at a predetermined position on the monitor. etc. can be easily confirmed visually.

In this case, this effect can be obtained even if one bulk memory and one frame memory are provided (claim (2)).
), multiple bulk memories are provided, and while one of the bulk memories stops reading data due to detection of a defect, other bulk memories continue reading data, thereby dealing with continuous defects. Can (Claim (Claim)
3)). Furthermore, if a plurality of frame memories are provided (claim (4)), blocks containing different defects can be stored in each frame memory, and the display can be switched at sufficient time intervals on the monitor, making it possible to detect defects. observation becomes easier. In this way, by simply increasing the number of memories, it becomes possible to detect successive defects without overlooking them, and there is no need to install multiple main parts in parallel like in the conventional equipment mentioned above, which simplifies the equipment. , and the memory capacity can be used effectively.

On the other hand, if the contents of the frame memory are changed in magnification and stored in the display memory (Claim (5)),
It becomes possible to create an image in which defects can be found more easily.

Furthermore, if only one block including a defect is displayed on the monitor as a block extracted from the bulk memory to the frame memory (claim (6)), the defect can be sufficiently enlarged. A total of 9.25 blocks surrounding the defective block are simultaneously displayed (Claim [7)], or the defective quadrant within the block is placed near the center of the monitor. By displaying other blocks adjacent to this at the same time (claim (8)), the positions of defects are concentrated near the center of the monitor, and the surroundings can also be observed at the same time.

It is desirable to display point-like defects near the center of the monitor (Claim (7)), but for long defects, the block containing the first detected defect should be displayed at the corner of the monitor on the side of the starting point of main and sub-scanning. (Claim (9))
, it becomes possible to display the entire long defect on a monitor,
Defects become easier to see.

According to the present invention, when blocks containing defects are discrete, only these blocks can be collected and displayed on the monitor (Claim (10)).

In addition to displaying a block containing a defect on a monitor, the present invention also records the position of this block on a printer (claim (11)), and displays image data such as the contents of a frame memory or a monitor display screen. may be stored (Claim (15)). Recording here is done manually based on the inspector's instructions (claim (
12) ), it is possible to do it automatically (claim (1)
3) ).

Furthermore, if the block containing the largest defect among the plurality of defects is placed at a predetermined position on the monitor (Claim (14))
) By displaying multiple defects simultaneously on one monitor screen, it is possible to reduce the required number of bulk memories, frame memories, etc., and to easily monitor defects while comparing a large number of defects.

Furthermore, if the surface image is continuously displayed on the monitor as a moving image together with the still image containing the defect (Claim (16)), more accurate judgment can be made by comparing the surface condition around the defect. can be done.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a first embodiment of the present invention, FIG. 2 is a conceptual diagram showing the correspondence between image areas, and FIG. 3 is an output waveform diagram of image signals, etc. FIG. 4 is a block diagram of the second embodiment, and FIG. 5 is a conceptual diagram showing the correspondence between image areas. FIG. 6 is a block diagram showing the third embodiment, and FIG. 7 is a conceptual diagram showing the correspondence of display areas. FIG. 8 is a diagram showing an example of monitor display in the fourth embodiment. FIG. 9 is a block diagram showing the fifth embodiment, and FIG. 10 is a diagram showing an example of its monitor display. Fig. 11 is a diagram showing the relationship between the display area and the shape of the defect in such a case, Fig. 12A shows a state in which the defect protrudes from the monitor, and Fig. 12B shows a state in which the defect enters the monitor. . FIG. 13 is a block diagram of a conventional apparatus, and FIG. 14 is a diagram showing a display area of a material to be inspected displayed on a monitor. 50... Material to be inspected, 58... Image detection means, 70... Main scanning line, 76... Defect discrimination means, 78.178... Block discrimination means, 82.182.
. . . Bulk memory, 84 . . . Writing control means, 86. 186 . . . Cutting out control means, 92 . , 200...Movie frame memory.

Claims (16)

[Claims] (1) In a defect inspection device that detects defects in the material to be inspected from image signals obtained by scanning the surface of the material to be inspected and displays them on a monitor, a predetermined number of continuous scanning lines of the material to be inspected are sequentially read. a bulk memory for storing the defects in the inspected material; a defect determining means for discriminating defects in the inspected material from the image signal; and blocks containing the detected defects for dividing the surface of the inspected material stored in the bulk memory into a plurality of blocks. block discrimination means for determining the block including the defect, write control means for temporarily stopping writing to the bulk memory when scanning lines of a predetermined number of blocks including the defective block are read, an extraction control means for extracting a number of blocks and transferring them to a frame memory;
A defect inspection device comprising: a monitor means for displaying the contents of the frame memory. (2) 1 bulk memory and 1 frame memory each
2. The defect inspection device according to claim 1, wherein each defect inspection device is provided separately. (3) The defect inspection apparatus according to claim (1), wherein a plurality of bulk memories are provided, and the write control means causes one of the bulk memories to continue writing to the other while writing is stopped. (4) The defect inspection apparatus according to claim (1), wherein a plurality of frame memories are provided, and images to be sequentially displayed on a monitor are sequentially stored in different frame memories. (5) Claim (1), comprising: a magnification changing means for receiving the contents of the frame memory and changing the display magnification; and a display memory for storing data whose magnification has been changed, and displaying the contents of the display memory on a monitor. Defect inspection equipment. (6) The defect inspection apparatus according to claim 1, wherein the cutout control means cuts out only blocks containing defects and transfers them to the frame memory. (7) The defect inspection apparatus according to claim 1, wherein the cutting control means cuts out the block containing the defect and the blocks surrounding it, and displays the block containing the defect near the center of the monitor. (8) The block discriminating means discriminates the quadrant in which the defect is located in the block containing the defect, and the extraction control means extracts three other blocks adjacent to the quadrant containing the defect and transfers them to the frame memory. (1) Defect inspection device. (9) The defect according to (1), wherein the cutout control means shifts the block containing the first defect in the bulk memory to a corner on the scanning start side of the image display area of the monitor and transfers the plurality of blocks to the frame memory. Inspection equipment. (10) The defect inspection apparatus according to claim 1, wherein the extraction control means transfers a plurality of blocks containing defects to different frame memories, and the monitor means simultaneously displays the plurality of blocks containing these defects. (11) The defect inspection apparatus according to claim (1), further comprising a recording means for recording the position of a block containing a defect. (12) The defect inspection apparatus according to claim (10), wherein the recording means records the position of the block based on an instruction from the inspector. (13) The defect inspection apparatus according to claim (10), wherein the recording means automatically records and outputs blocks containing defects. (14) The block discriminating means compares the levels of a plurality of defects included in the data stored in the bulk memory, and prioritizes blocks containing defects of a large level to be cut out and displayed on a monitor. Defect inspection equipment. (15) The defect inspection apparatus according to claim (1), further comprising recording means for recording at least one of the recorded contents of the frame memory and the monitor display screen. (16) In claim (1), the monitor is provided with a moving image frame memory that continuously rewrites data based on the detected image signal, and the monitor displays an image including a defect cut out from the bulk memory as a still image, and A defect detection device characterized by displaying the contents of a frame memory for use side by side as a moving image.