JPH045555A - Light emission spectrum detector - Google Patents
Light emission spectrum detectorInfo
- Publication number
- JPH045555A JPH045555A JP10713390A JP10713390A JPH045555A JP H045555 A JPH045555 A JP H045555A JP 10713390 A JP10713390 A JP 10713390A JP 10713390 A JP10713390 A JP 10713390A JP H045555 A JPH045555 A JP H045555A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- sample
- microwave
- light
- induced plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、マイクロ波誘導プラズマを利用して試料中の
元素を分析する発光分光分析計に検出器として装着され
る発光分光検出器に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an emission spectrometer detector that is installed as a detector in an emission spectrometer that analyzes elements in a sample using microwave-induced plasma.
〈従来の技術〉
従来から知られている発光分光検出器は、実験的に試作
されて実験室などで使用されているものはかりである。<Prior Art> A conventionally known luminescence spectrometer detector is a scale that has been experimentally produced and used in laboratories.
即ち、マイクロ波誘導プラズマを利用して試料中の元素
を分析する発光分光分析計用の発光分光検出器として市
販されているは見当たらない。That is, there is no commercially available emission spectrometer detector for use in an emission spectrometer that analyzes elements in a sample using microwave-induced plasma.
〈発明が解決しようとする問題点〉
本発明は、かかる状況に鑑みてなされたものであり、そ
の目的は、高感度検出が可能なうえ保守性に優れた発光
分光検出器を提供することにある。<Problems to be Solved by the Invention> The present invention has been made in view of the above situation, and its purpose is to provide an emission spectroscopic detector that is capable of highly sensitive detection and has excellent maintainability. be.
く問題点を解決するための手段〉
上述のような問題点を解決する本発明の特徴は、発光分
光検出器において、外管および内管でなる二重管構造の
放電管と、マイクロ波を空洞共鳴させて前記外管内にマ
イクロ波誘導プラズマを発生させるキャビティと、前記
マイクロ波誘導プラズマから発せられた光を前記外管の
軸方向にとり出して集光する光学系と、該光学系で集光
された光を分光して信号処理する信号処理部とを具偏し
、前記試料中の被測定元素を検出するようにしたことに
ある。Means for Solving the Problems> A feature of the present invention that solves the above-mentioned problems is that, in an emission spectroscopic detector, a discharge tube with a double tube structure consisting of an outer tube and an inner tube, and a microwave a cavity that causes cavity resonance to generate microwave-induced plasma within the outer tube; an optical system that extracts and focuses light emitted from the microwave-induced plasma in the axial direction of the outer tube; The present invention is characterized in that the signal processing section that spectrally spectrally emits the emitted light and performs signal processing is specifically biased to detect the element to be measured in the sample.
〈実施例〉
以下、本発明について図を用いて詳細に説明する。第１
図は本発明実施例の構成説明図であり、図中、１ａは例
えば石英管でなる外管、１ｂはたとえば石英管やステン
レス内管でなる内管、１は外管１ａと内管１とでなる二
重管構造の放電管、２ａ〜２ｃは接手、３ａ、３ｂはナ
ツト、４は試料導入口、５はマイクロ波発生器１０から
供給された例えば２゜４５ＧＨ，−のマイクロ波を空洞
共鳴させて外管１内にマイクロ波誘導プラズマ６を誘起
させる例えば円筒型のキャビティ、７は光学窓、８は集
光系であって凹面鏡８１と反射鏡８２を有している。ま
た、９は信号処理部、１１はスライダー １２は基台、
１３は支点、１４は調整ネジである。一方、第２図は調
整ネジ１４を説明するための断面図であり、図中、第１
図と同一記号は同一意味をもたせて使用しここでの重複
説明は省略する。<Example> Hereinafter, the present invention will be explained in detail using the drawings. 1st
The figure is an explanatory diagram of the configuration of an embodiment of the present invention, and in the figure, 1a is an outer tube made of, for example, a quartz tube, 1b is an inner tube made of, for example, a quartz tube or a stainless steel inner tube, and 1 is an outer tube 1a and an inner tube 1. 2a to 2c are joints, 3a and 3b are nuts, 4 is a sample introduction port, and 5 is a cavity for receiving microwaves of, for example, 2°45GH, supplied from a microwave generator 10. For example, a cylindrical cavity is used to resonate and induce microwave-induced plasma 6 in the outer tube 1, 7 is an optical window, and 8 is a condensing system, which includes a concave mirror 81 and a reflecting mirror 82. Also, 9 is a signal processing unit, 11 is a slider, 12 is a base,
13 is a fulcrum, and 14 is an adjustment screw. On the other hand, FIG. 2 is a sectional view for explaining the adjustment screw 14, and in the figure, the first
The same symbols as those in the figures are used with the same meaning, and redundant explanation will be omitted here.
このような構成からなる本発明の実施例において、導入
口４からプラズマガス（例えばＡｒやＨｅ）と−緒に導
入された試料（ｇＡＪえばｌｌｌｆＩ体パーティクル）
は、内管１ｂを通って供給され、マイクロ波誘導プラズ
マ６内で解離されて発光する。この発光スペクトルは、
外管１ａから軸方向に取出され光学窓７を介して光学系
８内に導かれて集光され、その後、スリット８３を通り
信号処理部９で分光されてのち信号処理され試料中の元
素が測定表示される。このため、内管１ｂの外壁の汚れ
などに影響されず試料中の被測定元素を正確に測定でき
る。In the embodiment of the present invention having such a configuration, a sample (for example, IllfI particles) introduced from the inlet 4 together with a plasma gas (for example, Ar or He)
is supplied through the inner tube 1b, and is dissociated within the microwave-induced plasma 6 to emit light. This emission spectrum is
The light is taken out in the axial direction from the outer tube 1a, guided into the optical system 8 through the optical window 7, and condensed, then passed through the slit 83, separated into spectra in the signal processing section 9, and then subjected to signal processing to identify the elements in the sample. The measurement will be displayed. Therefore, the element to be measured in the sample can be accurately measured without being affected by dirt on the outer wall of the inner tube 1b.
一方、測定終了後や保守作業時などには、次のようにし
て内管１ｂの交換が行われる。即ち、スライダー１１を
第１図の矢印方向にスライドさせて例えば６０ｍｍ引出
すことによって放電管１をキャピテイ５から引出し、そ
の後、３点１３を中心にして反時計方向に９０゛回転さ
せる。このようにすることによって、内管１ｂが第１図
の上方向から覗けるようになる。また、外管１ａを交換
した後、第２図の調整ネジ１４ａ〜１４Ｃ（第１図の調
整ネジ１４に相当する）を調整することにより、外管１
ａの中心に内管１ｂの中心を合わせることができる。On the other hand, after the measurement is completed or during maintenance work, the inner tube 1b is replaced as follows. That is, the discharge tube 1 is pulled out from the cavity 5 by sliding the slider 11 in the direction of the arrow in FIG. 1, for example, by 60 mm, and then rotated 90 degrees counterclockwise about the three points 13. By doing so, the inner tube 1b can be seen from above in FIG. In addition, after replacing the outer tube 1a, by adjusting the adjustment screws 14a to 14C (corresponding to the adjustment screw 14 in FIG. 1) shown in FIG.
The center of the inner tube 1b can be aligned with the center of the inner tube 1b.
尚、本発明は上述の実論例に限定されることなく種々の
変形が可能であり、例えば導入口４に前処理装置を付加
し、液体、気体、及び固体のいずれの試料をも測定可能
となるようにしてもよい。Note that the present invention is not limited to the above-mentioned practical example, and can be modified in various ways. For example, by adding a pretreatment device to the inlet 4, it is possible to measure any liquid, gas, or solid sample. You may make it so that
また、集光系からの光を光ファイバーを用いて複数の信
号処理部に導き試料中に含まれている複数の元素を同時
に測定するようにしても良い。この場合、集光系で上述
のように効率良く光を取出せるため、光フアイバー内部
での感度低下が充分に補え高感度測定が可能となる。更
に、導入口４にキャピラリーを接続し極部（極限られた
部分）の試料ガスだけをサンプリングして分析するよう
にしても良い。Alternatively, the light from the condensing system may be guided to a plurality of signal processing sections using optical fibers to simultaneously measure a plurality of elements contained in the sample. In this case, since the condensing system can efficiently extract light as described above, the decrease in sensitivity inside the optical fiber can be sufficiently compensated for and high-sensitivity measurement can be performed. Furthermore, a capillary may be connected to the inlet 4 to sample and analyze only the sample gas at an extreme portion (an extremely limited portion).
〈発明の効果〉
以上詳しく説明したように、本発明は、発光分光検出器
において、外管および内管でなる二重管構造の放電管と
、マイクロ波を空洞共鳴させて前記外管内にマイクロ波
誘導プラズマを発生させるキャビティと、前記マイクロ
波誘導プラズマから発せられた光を前記外管の軸方向に
とり出して集光する光学系と、該光学系で集光された光
を分光してのち信号処理する信号処理部とを設け、前記
試料中の元素を検出するように構成した。<Effects of the Invention> As explained in detail above, the present invention provides an emission spectroscopic detector in which a discharge tube having a double-tube structure consisting of an outer tube and an inner tube resonates with a cavity of a microwave to generate a microwave inside the outer tube. a cavity for generating wave-induced plasma; an optical system for extracting and condensing light emitted from the microwave-induced plasma in the axial direction of the outer tube; A signal processing unit for signal processing was provided to detect elements in the sample.
このため、次の■〜■のような効果が得られ、その結果
、高感度検出が可能なうえ保守性に優れた発光分光検出
器が実現する。Therefore, the following effects (1) to (4) are obtained, and as a result, an emission spectroscopic detector that is capable of highly sensitive detection and has excellent maintainability is realized.
■放電管の中心部にマイクロ波誘導プラズマを発生させ
ることができるため、試料を効率良く解離して強い発光
強度を得ることができるうえ、外管の損傷を軽減し長寿
命化か図れる。■Since it is possible to generate microwave-induced plasma in the center of the discharge tube, it is possible to efficiently dissociate the sample and obtain strong luminescence intensity, as well as reduce damage to the outer tube and extend its life.
■外管は通常石英管で構成されていて消耗品であるため
、本発明の場合のように構造が簡単であると、調整や交
換が容易で保守性に優れているという利点がある。(2) The outer tube is usually made of a quartz tube and is a consumable item, so if the structure is simple as in the case of the present invention, it has the advantage of being easy to adjust and replace, and having excellent maintainability.
■光ファイバーを使用し光学系からの光取出し部分で摺
動させることにより、マイクロ波誘導プラズマの拡がり
の中で場所を変えて発光スペクトルを捕らえることも可
能である。■By using an optical fiber and sliding it at the part where the light is extracted from the optical system, it is also possible to capture the emission spectrum from different locations within the spread of microwave-induced plasma.
■前処理装置を付加することにより、液体、固体。■Liquid and solid by adding pre-treatment equipment.
及び気体のいずれの試料をも測定できるようになる。It becomes possible to measure both gas and gas samples.
第１図は本発明実施例の構成説明図、第２図は調整ネジ
を説明するための断面図である。
１・・・放電管、１ａ・・・外管、２ｂ・・・内管、５
・・・キャビティ、７・・・光学窓、８・・・集光系、
８１・・・凹面鏡、８２・・・反射鏡、８３・・・スリ
ット９・・・信号処理部、１１・・・スライダー １２
・・・基台、１３・・・支点、１４・・・調整ネジFIG. 1 is an explanatory diagram of the configuration of an embodiment of the present invention, and FIG. 2 is a sectional view for explaining an adjustment screw. 1...Discharge tube, 1a...Outer tube, 2b...Inner tube, 5
... Cavity, 7... Optical window, 8... Condensing system,
81... Concave mirror, 82... Reflecting mirror, 83... Slit 9... Signal processing section, 11... Slider 12
... Base, 13 ... Fulcrum, 14 ... Adjustment screw
Claims (1)
する発光分光分析計に検出器として装着される発光分光
検出器において、外管および内管でなる二重管構造の放
電管と、マイクロ波を空洞共鳴させて前記外管内にマイ
クロ波誘導プラズマを発生させるキャビティと、前記マ
イクロ波誘導プラズマから発せられた光を前記外管の軸
方向にとり出して集光する光学系と、該光学系で集光さ
れた光を分光して信号処理する信号処理部とを具備し、
前記試料中の被測定元素を検出する発光分光検出器。In an emission spectrometer detector installed as a detector in an emission spectrometer that analyzes elements in a sample using microwave-induced plasma, a discharge tube with a double tube structure consisting of an outer tube and an inner tube, and a microwave a cavity that generates microwave-induced plasma in the outer tube by causing cavity resonance; an optical system that extracts and focuses light emitted from the microwave-induced plasma in the axial direction of the outer tube; and a signal processing unit that spectrally spectrally and processes the condensed light,
An emission spectroscopic detector that detects the element to be measured in the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10713390A JP2855777B2 (en) | 1990-04-23 | 1990-04-23 | Emission spectroscopy detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10713390A JP2855777B2 (en) | 1990-04-23 | 1990-04-23 | Emission spectroscopy detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH045555A true JPH045555A (en) | 1992-01-09 |
| JP2855777B2 JP2855777B2 (en) | 1999-02-10 |
Family
ID=14451340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10713390A Expired - Lifetime JP2855777B2 (en) | 1990-04-23 | 1990-04-23 | Emission spectroscopy detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2855777B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007032161A1 (en) | 2005-09-15 | 2007-03-22 | Idemitsu Kosan Co., Ltd. | Asymmetric fluorene derivative and organic electroluminescent element containing the same |
| WO2007099983A1 (en) | 2006-02-28 | 2007-09-07 | Idemitsu Kosan Co., Ltd. | Organic electroluminescent device using fluoranthene derivative and indenoperylene derivative |
| WO2007138906A1 (en) | 2006-05-25 | 2007-12-06 | Idemitsu Kosan Co., Ltd. | Organic electroluminescent device and full color light-emitting device |
-
1990
- 1990-04-23 JP JP10713390A patent/JP2855777B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007032161A1 (en) | 2005-09-15 | 2007-03-22 | Idemitsu Kosan Co., Ltd. | Asymmetric fluorene derivative and organic electroluminescent element containing the same |
| WO2007099983A1 (en) | 2006-02-28 | 2007-09-07 | Idemitsu Kosan Co., Ltd. | Organic electroluminescent device using fluoranthene derivative and indenoperylene derivative |
| WO2007138906A1 (en) | 2006-05-25 | 2007-12-06 | Idemitsu Kosan Co., Ltd. | Organic electroluminescent device and full color light-emitting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2855777B2 (en) | 1999-02-10 |
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