JPH0455746U - - Google Patents
Info
- Publication number
- JPH0455746U JPH0455746U JP9953090U JP9953090U JPH0455746U JP H0455746 U JPH0455746 U JP H0455746U JP 9953090 U JP9953090 U JP 9953090U JP 9953090 U JP9953090 U JP 9953090U JP H0455746 U JPH0455746 U JP H0455746U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- steam
- ion source
- plasma generation
- generation vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
を示す断面図である。第２図は、第１図中のシヤ
ツター等を拡大して示す斜視図である。第３図は
、従来のイオン源の一例を示す断面図である。
２……プラズマ生成容器、６……ガス導入口、
１２……イオンビーム、１４……オーブン、２０
……試料、２２……蒸気、３４……蒸気の通路、
３６……シヤツター。
FIG. 1 is a sectional view showing an ion source according to an embodiment of this invention. FIG. 2 is an enlarged perspective view showing the shutter etc. in FIG. 1. FIG. 3 is a cross-sectional view showing an example of a conventional ion source. 2... Plasma generation container, 6... Gas inlet,
12...Ion beam, 14...Oven, 20
...Sample, 22...Steam, 34...Steam path,
36... Shutter.
Claims (1)
イオン種としてガスおよび前記オーブンからの蒸
気のいずれかを導入してプラズマを作るプラズマ
生成容器とを備えるイオン源において、前記オー
ブンとプラズマ生成容器との間の蒸気の通路を断
続するシヤツターを設けたことを特徴とするイオ
ン源。 an oven that heats the sample to generate steam;
An ion source comprising a plasma generation vessel that generates plasma by introducing either gas or steam from the oven as ion species, and a shutter that interrupts the passage of steam between the oven and the plasma generation vessel. An ion source characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9953090U JPH0455746U (en) | 1990-09-20 | 1990-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9953090U JPH0455746U (en) | 1990-09-20 | 1990-09-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0455746U true JPH0455746U (en) | 1992-05-13 |
Family
ID=31841525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9953090U Pending JPH0455746U (en) | 1990-09-20 | 1990-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455746U (en) |
-
1990
- 1990-09-20 JP JP9953090U patent/JPH0455746U/ja active Pending