JPH0455827B2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention involves inserting a workpiece fitted and held by a carrier between an upper surface plate and a lower surface plate, rotating the workpiece relative to each other, and rotating the workpiece relative to the upper surface plate and the lower surface plate. A polishing device that performs polishing while rotating and revolving a carrier with a sun gear. More specifically, a polishing device that allows the internal gear and sun gear to be raised and lowered independently so that the meshing position with the carrier can be freely adjusted. Regarding.

[Technical background of the invention and its problems] This type of polishing device has one of the opposing surfaces of an upper surface plate and a lower surface plate that rotate in opposite directions;
Alternatively, by attaching abrasive cloth to both surfaces, holding a workpiece such as a wafer on a carrier between these surface plates, and meshing this carrier with an internal gear and a sun gear to rotate and revolve. , the surface plate to which the polishing cloth is attached and the workpiece are relatively rotated or moved to polish the surface of the workpiece, and usually has a configuration as shown in FIG.

That is, as shown in Fig. 1, 1 is the upper surface plate;
2 is a lower surface plate, and polishing cloths 3 and 4 are adhered to the surfaces facing each other, and the lower surface plate 2 has a bearing holder 5, a hollow shaft 6, and bearings 7 and 7.
The upper surface plate 1 is rotatably supported by a base 9 via a bearing metal 8 and is rotated by a gear 10 attached to a hollow shaft 6 from a drive mechanism (not shown). It is suspended from a piston rod 13 of a main cylinder 12 fixed to a main cylinder 11 via a coupling 16 so as to be movable up and down.

A bearing 1 is provided within the hollow shaft 6.
7, 17, a shaft 20 is rotatably inserted through a hollow shaft 18 and bearings 19, 19, which will be described later, and this shaft 20 has a gear 21 attached to its lower end.
Rotation in the opposite direction to the hollow shaft 6 can be applied from a drive source (not shown) through the hollow shaft 6. A spline shaft 20a is attached to the upper end of the hollow shaft 6, and this spline shaft 20a is connected to the upper surface plate 1. The spline hole 16a of the coupling ring 16 that suspends the
It is adapted to be removably engaged with.

Further, between the upper and lower surface plates 1 and 2, as shown in detail in FIGS. 2 and 3, there are a plurality of carriers 22 that fit and hold the workpiece A into the holding hole 22a to regulate its position. This carrier 22 is interposed
A gear portion 22b is formed on the outer periphery of the hollow shaft 18, and the sun gear 23 and the internal gear 25 are rotatably attached to the bearing metal 8 via bearings 24, 24. The sun gear 23 and the internal gear 25 are rotated by gears 26 and 27 from a drive source (not shown), thereby causing the carrier 22 to automatically revolve.

That is, in the polishing apparatus described above, the upper surface plate 1 is moved upward to the open state, while the plurality of workpieces A are placed on the lower surface plate 2 through the holding holes 2 of the carrier 22.
2a and then lower the plate 1 to a predetermined and lowered position by operating the main cylinder 12, thereby applying a clamping force to the workpiece A, that is, a machining pressure set to a predetermined value. is applied to press the workpiece A between the upper and lower polishing cloths 3 and 4, and the gears 10, 21,
Both the upper and lower surface plates 1, 2, the sun gear 23, and the internal gear 25 are rotated through the polishing plates 26 and 27, respectively, to polish the workpiece A.

However, in such a polishing device, due to wear of the internal gear 25 or the sun gear 23 due to long-term use, the meshing position with the carrier 22 may be changed, or in order to make it easier to take out the workpiece A after processing. , the sun gear 23 and the internal gear 25 can be raised and lowered, but the conventional raising and lowering mechanism relies on the output of a screw jack 28 fixed on the base 9, as shown in detail in FIG. The lifting arm 29 connected to the shaft 28a is connected to the internal gear 25.
At the same time, the hollow shaft 18 having the sun gear 23 at the upper end is attached to the connecting member 3 to the lifting arm 29.
0 and 31, and both gears 23 and 25 are raised and lowered at the same time by driving the screw jack 28, which not only complicates the mechanism itself and increases costs, but also Since the gear 23 and the internal gear 25 cannot be raised and lowered independently, the degree of wear of the two gears by the carrier is different.
There were drawbacks such as the inability to independently adjust the engagement position with the carrier.

[Object of the Invention] The present invention was made under the above-mentioned circumstances, and its object is to provide a polishing device that can raise and lower the sun gear independently of the internal gear with a simple structure. Our goal is to provide the following.

[Summary of the Invention] In order to achieve the above object, the present invention disposes a carrier that fits and holds a workpiece between upper and lower surface plates that are rotationally driven in a relative direction to each other, and combines this carrier with an internal gear. In the polishing device, in which the internal gear is meshed with a sun gear to rotate and revolve, and the internal gear can be raised and lowered by an elevating mechanism, the sun gear is slidably provided in the axial direction of a driving hollow shaft. , and an operating member screwed into the threaded portion provided on the sun gear is rotatably fitted to the hollow shaft while restricting movement in the axial direction;
The present invention is characterized in that the sun gear is raised and lowered independently of the internal gear by the rotational operation of the operating member.

[Embodiment of the Invention] The present invention will be described below with reference to an embodiment shown in FIG. In the illustrated embodiment of the present invention, the same reference numerals are used for parts having the same configuration as those of the conventional example described above, and the explanation thereof will be omitted.

That is, as shown in FIG. 5, the present invention is configured such that the internal gear 25 is raised and lowered via a lifting arm 29 connected to an output shaft 28a of a screw jack 28 installed on a base 9. A sun gear 23 attached to the upper end of the hollow shaft 18 for driving is provided to be slidable only in the axial direction via a sliding key 32 on the hollow shaft 18, and a presser plate 33 and a retaining ring are attached to the upper end of the hollow shaft 18. A feed nut 35 serving as an operating member having an internal thread cut therein that restricts movement in the axial direction is rotatably fitted through the feed nut 34, and the feed nut 35 is connected to the sun gear 2.
3, the sun gear 23 is screwed into the threaded portion 23a formed in the feed nut 35, so that the sun gear 23 is
is raised and lowered independently of the internal gear 25.

In the embodiment of the present invention described above, a sliding key was used as a means for sliding the sun gear in the axial direction on the hollow shaft, but the invention is not limited to this, and spline engagement may be used instead of the sliding key. Means may also be used.

In addition, it goes without saying that the present invention can be modified in various ways without departing from the gist of the present invention.

[Effects of the Invention] As explained above, the present invention provides a simple elevating mechanism in the sun gear section to raise and lower the sun gear independently of the internal gear.
This has excellent practical effects, such as being able to independently adjust the meshing position of the carrier that meshes with both gears.

[Brief explanation of the drawing]

Figure 1 is a schematic cross-sectional view of the polishing device;
The figure is a plan view of the main parts, FIG. 3 is a longitudinal cross-sectional view, FIG. 4 is a schematic enlarged cross-sectional view of the main parts showing a conventional internal gear and sun gear lifting mechanism, and FIG. FIG. 2 is a schematic cross-sectional view of essential parts showing an example of a lifting mechanism for an internal gear and a sun gear of a polishing device. 18...Hollow shaft, 22...Carrier, 23...
Sun gear, 23a...screwed portion, 25...internal gear, 28...screw jack, 32...
...sliding key, 33...pressing plate, 34...retaining ring,
35...Feed nut (operating member).

Claims (1)

[Claims] 1 A carrier that fits and holds a workpiece is arranged between upper and lower surface plates that are driven to rotate in a relative direction to each other, and this carrier is meshed with an internal gear and a sun gear to rotate and revolve. In a polishing device in which a gear can be raised and lowered by a lifting mechanism, the sun gear is provided to be slidable in the axial direction of a hollow drive shaft, and the hollow shaft is screwed into a threaded portion provided on the sun gear. Polishing characterized by having a structure in which members are rotatably fitted while restricting axial movement, and the sun gear can be raised and lowered independently of the internal gear by rotational operation of the operating member. Device.