JPH0456330U - - Google Patents
Info
- Publication number
- JPH0456330U JPH0456330U JP9998390U JP9998390U JPH0456330U JP H0456330 U JPH0456330 U JP H0456330U JP 9998390 U JP9998390 U JP 9998390U JP 9998390 U JP9998390 U JP 9998390U JP H0456330 U JPH0456330 U JP H0456330U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- section
- ion implantation
- rotates
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 230000007723 transport mechanism Effects 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims 4
- 230000032258 transport Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図Ａ，Ｂは本考案の実施例１の側面図及び
斜視図、第２図は実施例１のアライナー部の詳細
図、第３図は本考案の実施例２のアライナー部の
詳細図、第４図Ａ，Ｂは従来の搬送機構の側面図
及び斜視図である。
１……ローダー部、２…ロードロツク部、３…
…イオン注入部、４……ロードロツク部、５……
アンローダー部、６……ウエーハ収納キヤリア、
７……ウエーハ収納キヤリア、８……アライナー
部、９……ウエーハ、１０……ウエーハガイド、
１１……光センサー、１２……ウエーハチヤツク
、１３……エアーリンダー、１４……エアー吸入
口（上昇）、１５……エアー吸入口（下降）、１
６……バキユーム吸引口、１７……歯車、１８…
…歯車、１９……光センサー、２０……ローダー
ベルト、２１……ウエーハストツパー、２２……
ウエーハガイド、２３……エアー吸入口。
Figures 1A and B are a side view and a perspective view of the first embodiment of the present invention, Figure 2 is a detailed view of the aligner part of the first embodiment, and Figure 3 is a detailed view of the aligner part of the second embodiment of the present invention. , FIGS. 4A and 4B are a side view and a perspective view of a conventional transport mechanism. 1...Loader part, 2...Load lock part, 3...
...Ion implantation part, 4...Load lock part, 5...
Unloader section, 6...Wafer storage carrier,
7... Wafer storage carrier, 8... Aligner section, 9... Wafer, 10... Wafer guide,
11... Optical sensor, 12... Wafer chuck, 13... Air cylinder, 14... Air inlet (ascent), 15... Air inlet (descend), 1
6... Vacuum suction port, 17... Gear, 18...
... Gear, 19 ... Optical sensor, 20 ... Loader belt, 21 ... Wafer stopper, 22 ...
Wafer guide, 23...Air suction port.
Claims (1)
ー部へウエーハを搬送するイオン注入装置のウエ
ーハ搬送機構において、ローダー部とイオン注入
部との間で搬送ウエーハを停止させる機構と、停
止したウエーハを回転させオリエンテーシヨンフ
ラツトの位置合わせを行なう位置合わせ機構と、
位置合わせ後のオリエンテーシヨンフラツトを基
準にしウエーハを所定角度回転させる回転機構と
を有し、オリエンテーシヨンフラツトを指定位置
に合わせた状態でウエーハをイオン注入部に搬送
することを特徴とするイオン注入装置のウエーハ
搬送機構。 In the wafer transport mechanism of an ion implanter that transports a wafer from the loader section to the unloader section via the ion implantation section, there is a mechanism that stops the transported wafer between the loader section and the ion implantation section, and a mechanism that rotates the stopped wafer and transfers it to the orient. a positioning mechanism for positioning the station flat;
The wafer is characterized by having a rotation mechanism that rotates the wafer by a predetermined angle based on the orientation flat after alignment, and transporting the wafer to the ion implantation section with the orientation flat aligned at a specified position. The wafer transport mechanism of the ion implanter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998390U JPH0456330U (en) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998390U JPH0456330U (en) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456330U true JPH0456330U (en) | 1992-05-14 |
Family
ID=31842293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998390U Pending JPH0456330U (en) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456330U (en) |
-
1990
- 1990-09-25 JP JP9998390U patent/JPH0456330U/ja active Pending
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