JPH0456332U - - Google Patents
Info
- Publication number
- JPH0456332U JPH0456332U JP9998490U JP9998490U JPH0456332U JP H0456332 U JPH0456332 U JP H0456332U JP 9998490 U JP9998490 U JP 9998490U JP 9998490 U JP9998490 U JP 9998490U JP H0456332 U JPH0456332 U JP H0456332U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- electrode provided
- insulator
- wafer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は本考案の一実施例の断面図、第２図は
従来例の断面図である。
１……上部電極、２……絶縁物、３……ウエー
ハ、４……下部電極、５……処理室。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional example. 1... Upper electrode, 2... Insulator, 3... Wafer, 4... Lower electrode, 5... Processing chamber.
Claims (1)
と、前記処理室の外部に絶縁物を介して設けられ
た上部電極とを含むことを特徴とする平行平板型
プラズマエツチング装置。 A parallel plate plasma etching apparatus comprising: a lower electrode provided within a processing chamber on which a wafer is placed; and an upper electrode provided outside the processing chamber via an insulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998490U JPH0456332U (en) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998490U JPH0456332U (en) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456332U true JPH0456332U (en) | 1992-05-14 |
Family
ID=31842294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998490U Pending JPH0456332U (en) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456332U (en) |
-
1990
- 1990-09-25 JP JP9998490U patent/JPH0456332U/ja active Pending