JPH0263533U - - Google Patents
Info
- Publication number
- JPH0263533U JPH0263533U JP14355588U JP14355588U JPH0263533U JP H0263533 U JPH0263533 U JP H0263533U JP 14355588 U JP14355588 U JP 14355588U JP 14355588 U JP14355588 U JP 14355588U JP H0263533 U JPH0263533 U JP H0263533U
- Authority
- JP
- Japan
- Prior art keywords
- gas blowing
- processing chamber
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の第１の実施例の縦断面図、第
２図は本考案の第２の実施例の縦断面積、第３図
は従来の気相成長装置の縦断面図である。
１…ガス流量コントロールボツクス、２…ガス
吹き出し板、３…ウエハー、４…処理室の壁、５
…多孔質の板、６…排気装置、７…処理室、８…
ウエハー保持台、９…多孔室の板。
FIG. 1 is a vertical cross-sectional view of a first embodiment of the present invention, FIG. 2 is a vertical cross-sectional area of a second embodiment of the present invention, and FIG. 3 is a vertical cross-sectional view of a conventional vapor phase growth apparatus. 1...Gas flow control box, 2...Gas blowing plate, 3...Wafer, 4...Wall of processing chamber, 5
... Porous plate, 6... Exhaust device, 7... Processing chamber, 8...
Wafer holding stand, 9...Plate of porous chamber.
Claims (1)
吹き出し孔を多数有する部材を内壁面に備え、さ
らにウエハー保持台を内包している処理室を少く
とも具備することを特徴とする気相成長装置。 What is claimed is: 1. A vapor phase growth apparatus comprising: a member having a raw material gas blowing section and a large number of inert gas blowing holes on an inner wall surface; and at least a processing chamber containing a wafer holding table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14355588U JPH0263533U (en) | 1988-11-01 | 1988-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14355588U JPH0263533U (en) | 1988-11-01 | 1988-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0263533U true JPH0263533U (en) | 1990-05-11 |
Family
ID=31410481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14355588U Pending JPH0263533U (en) | 1988-11-01 | 1988-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263533U (en) |
-
1988
- 1988-11-01 JP JP14355588U patent/JPH0263533U/ja active Pending