JPH045635U - - Google Patents
Info
- Publication number
- JPH045635U JPH045635U JP4588590U JP4588590U JPH045635U JP H045635 U JPH045635 U JP H045635U JP 4588590 U JP4588590 U JP 4588590U JP 4588590 U JP4588590 U JP 4588590U JP H045635 U JPH045635 U JP H045635U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- rail
- cradle
- spin dryer
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図は本考案によるクレイドル起し機構を備
えたスピンドライヤを示す縦断面図、第２図はそ
の平面図、第３図は従来のクレイドル起し機構を
備えたスピンドライヤの平面図、そして第４図は
第３図のスピンドライヤの縦断面図である。
図中、１……ロータ、２……グローブ、３……
クレイドル、４……側板、５……軸、１０……レ
ール、１１……シヤフト、１２……ローラ、１４
……起し側板、１５……起し棒。
FIG. 1 is a longitudinal sectional view showing a spin dryer equipped with a cradle raising mechanism according to the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a plan view of a spin dryer equipped with a conventional cradle raising mechanism. FIG. 4 is a longitudinal sectional view of the spin dryer of FIG. 3. In the figure, 1...rotor, 2...glove, 3...
Cradle, 4...Side plate, 5...Shaft, 10...Rail, 11...Shaft, 12...Roller, 14
... Raising side board, 15... Raising rod.
Claims (1)
け入れてスピンドライヤのロータに設置するため
前記ロータに備えられる側板の間に前記側板に備
えられた軸により枢動可能に設置されるクレイド
ルの起し機構において、 一方の前記軸を前記側板の外側に延長すると共
に、その延長部に設けられたレールと、前記レー
ルに当接して前記レールを前記軸を支点に回動す
るため前記ロータを包囲するグローブの底板の孔
および前記ロータのベースプレートの孔を通るよ
うに上下に可動のシヤフトおよびその上端に備え
られたローラと、各前記軸に備えられた起し側板
の間に在つてクレイドルの外側部に当接し且つ前
記レールと共に回動するようになつている起し棒
を含むことを特徴とするスピンドライヤのクレイ
ドル起し機構。[Claims for Utility Model Registration] In order to receive a carrier containing a predetermined number of semiconductor wafers and install it on the rotor of a spin dryer, the spin dryer is installed between side plates provided on the rotor so as to be pivotable by a shaft provided on the side plates. In a cradle raising mechanism, one of the shafts is extended to the outside of the side plate, and a rail provided on the extended portion is brought into contact with the rail to rotate the rail about the shaft as a fulcrum. A vertically movable shaft passing through a hole in a bottom plate of a globe surrounding the rotor and a hole in a base plate of the rotor, and a roller provided at the upper end thereof, and a raised side plate provided on each of the shafts. A cradle raising mechanism for a spin dryer, comprising a raising rod that abuts an outer side of the cradle and rotates together with the rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4588590U JPH045635U (en) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4588590U JPH045635U (en) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH045635U true JPH045635U (en) | 1992-01-20 |
Family
ID=31560462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4588590U Pending JPH045635U (en) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH045635U (en) |
-
1990
- 1990-04-27 JP JP4588590U patent/JPH045635U/ja active Pending
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