JPH0456763U - - Google Patents
Info
- Publication number
- JPH0456763U JPH0456763U JP9848790U JP9848790U JPH0456763U JP H0456763 U JPH0456763 U JP H0456763U JP 9848790 U JP9848790 U JP 9848790U JP 9848790 U JP9848790 U JP 9848790U JP H0456763 U JPH0456763 U JP H0456763U
- Authority
- JP
- Japan
- Prior art keywords
- plating
- cyan bath
- draft device
- inert gas
- purging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000011261 inert gas Substances 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Description
第１図は、本考案の半導体メツキ装置の概略断
面図であり、第２図は、従来のメツキ装置の断面
図、第３図は、メツキ装置での作業説明図である
。
１……メツキ装置、２……メツキ槽、３……水
洗槽、４……装置排気、５……カバー、６……配
管、７……排気フアン、８……不活性ガス、９…
…コントロール弁、１０……メツキ治具。
FIG. 1 is a schematic cross-sectional view of a semiconductor plating device of the present invention, FIG. 2 is a cross-sectional view of a conventional plating device, and FIG. 3 is an explanatory diagram of operations in the plating device. 1... Plating device, 2... Plating tank, 3... Washing tank, 4... Device exhaust, 5... Cover, 6... Piping, 7... Exhaust fan, 8... Inert gas, 9...
...control valve, 10...metsuki jig.
Claims (1)
、シアン浴槽のみを局部排気できるドラフト装置
を用い、該ドラフト装置に、開閉に際して不活性
ガスでパージできる手段を設けたことを特徴とす
る半導体メツキ装置。 A semiconductor plating device characterized in that, when plating semiconductors using a cyan bath, a draft device that can locally exhaust only the cyan bath is used, and the draft device is provided with a means for purging with an inert gas when opening and closing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848790U JPH0456763U (en) | 1990-09-21 | 1990-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9848790U JPH0456763U (en) | 1990-09-21 | 1990-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456763U true JPH0456763U (en) | 1992-05-15 |
Family
ID=31839711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9848790U Pending JPH0456763U (en) | 1990-09-21 | 1990-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456763U (en) |
-
1990
- 1990-09-21 JP JP9848790U patent/JPH0456763U/ja active Pending
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