JPH0457894B2 - - Google Patents
Info
- Publication number
- JPH0457894B2 JPH0457894B2 JP58119679A JP11967983A JPH0457894B2 JP H0457894 B2 JPH0457894 B2 JP H0457894B2 JP 58119679 A JP58119679 A JP 58119679A JP 11967983 A JP11967983 A JP 11967983A JP H0457894 B2 JPH0457894 B2 JP H0457894B2
- Authority
- JP
- Japan
- Prior art keywords
- pads
- fluid
- guide
- sensitivity
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 44
- 230000002706 hydrostatic effect Effects 0.000 claims description 17
- 238000002347 injection Methods 0.000 claims description 7
- 239000007924 injection Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 description 30
- 230000003247 decreasing effect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、静圧流体軸受の調整方法、特には直
動もしくは平面で回転するタイプの静圧流体軸受
で、流体噴射パツドへの流体の供給圧力を変化さ
せることにより、ガイド面との間〓を変化させる
ことが可能な静圧流体軸受に対する調整方法に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for adjusting a hydrostatic fluid bearing, particularly a hydrostatic fluid bearing of the type that rotates in a linear motion or on a plane, in which the flow of fluid to a fluid injection pad is adjusted. The present invention relates to an adjustment method for a hydrostatic fluid bearing that can change the distance between the bearing and the guide surface by changing the supply pressure.
ガイドに案内されて移動する移動体をガイドに
対して浮上支持するために、ガイド面に複数個の
流体噴射パツド（以下パツドと記載）から流体を
噴射してパツドとガイド面の間に間隔を形成する
静圧流体軸受は周知である。また、このような静
圧流体軸受において、それぞれのパツドに供給さ
れる流体の供給圧を制御して、それぞれのパツド
への流体の供給圧の差を変化させることにより、
パツドとガイド面の間の間隔を調整することも既
に提案されている。
In order to levitate and support a moving object that moves while being guided by a guide, fluid is jetted onto the guide surface from a plurality of fluid jetting pads (hereinafter referred to as "pads") to create a space between the pads and the guide surface. Hydrostatic hydrostatic bearings are well known. In addition, in such a hydrostatic fluid bearing, by controlling the supply pressure of fluid supplied to each pad and changing the difference in fluid supply pressure to each pad,
It has also already been proposed to adjust the spacing between the pad and the guide surface.
ところで、このような静圧流体軸受では、ガイ
ド面の平坦度やパツドの寸法精度を極めて厳しく
管理しなければ、高精度な移動案内が困難である
という問題がある。しかしながら、各構成部品の
精度やパツドの特性のパラツキ等の誤差要因を管
理すると云つても限度があるし、また生産性を著
しく低下させることにもなるので、従来では、各
パツドの軸受性能にばらつきが生じたまま使用す
る場合が多く、要求される移動案内精度が達成で
きない場合があつた。
However, such a hydrostatic bearing has a problem in that it is difficult to provide highly accurate movement guidance unless the flatness of the guide surface and the dimensional accuracy of the pads are extremely strictly controlled. However, there are limits to controlling error factors such as the accuracy of each component and variations in pad characteristics, and it also significantly reduces productivity. In many cases, the device was used with some variation, and the required movement guidance accuracy could not be achieved in some cases.
本発明はこのような事情に鑑みなされたもの
で、その目的は、静圧流体軸受の各構成部品に誤
差要因が残存していても、各パツドの供給圧の変
化に対する感度を極めて簡単に調整することがで
き、所望の移動案内精度を得ることを可能にする
静圧流体軸受の調整方法を提供することにある。 The present invention was developed in view of these circumstances, and its purpose is to extremely easily adjust the sensitivity of each pad to changes in supply pressure, even if error factors remain in each component of a hydrostatic fluid bearing. It is an object of the present invention to provide a method for adjusting a hydrostatic fluid bearing that enables the desired movement guide accuracy to be obtained.
上述の目的を達成するための本発明は、静圧流
体軸受においては、パツドへの流体の供給圧力を
変化させてパツドと支持面との間〓を変化させる
際、供給圧力を５Kg／cm2から500ｇ／cm2だけ変化
させる場合と、４Kg／cm2から500ｇ／cm2だけ変化
させる場合では、上述の間〓の変化量が相違する
こと、即ち、静圧流体軸受では、基準となる供給
圧力（例えば、上述の５Kg／cm2または４Kg／cm2）
の相違によつて、供給圧の変化に対するパツドと
ガイド面の間隔の変化の割合（感度）が相違する
こと、並びに複数のパツドの一つに供給される流
体の供給圧のみを制御する場合には、該感度は不
安定となると云うことに着目している。
To achieve the above-mentioned object, the present invention provides that, in a hydrostatic fluid bearing, when changing the supply pressure of fluid to the pad to change the distance between the pad and the support surface, the supply pressure is set to 5 kg/cm 2 . When changing by 500g/cm 2 from 4Kg/cm 2 and by 500g/cm 2 from 4Kg/cm 2 , the above-mentioned amount of change is different. Pressure (e.g. 5Kg/cm 2 or 4Kg/cm 2 as mentioned above)
Due to the difference in the rate of change (sensitivity) in the distance between the pad and the guide surface with respect to changes in supply pressure, and when controlling only the supply pressure of fluid supplied to one of multiple pads, pay attention to the fact that the sensitivity becomes unstable.
従つて、上述の目的を達成する本発明は、ガイ
ドに案内されて移動する移動体をガイドに対して
浮上支持するためにガイドのガイド面に複数個の
流体噴射パツドから流体を噴射して流体噴射パツ
ドとガイド面の間に間隔を形成すると共に、流体
噴射パツドのそれぞれに供給される流体の供給圧
の和を維持した状態で、流体噴射パツドのそれぞ
れへの流体の供給圧の差を変化させることにより
流体噴射パツドとガイド面の間の間隔を変化させ
る静圧流体軸受において、流体噴射パツドのそれ
ぞれへの流体の供給圧の和を変化させることによ
り、流体噴射パツドのそれぞれへの流体の供給圧
の差の変化に対する流体噴射パツドとガイド面の
間の間隔の変化の割合を調整することを特徴とし
ている。 Therefore, the present invention achieves the above-mentioned object by jetting fluid from a plurality of fluid jetting pads onto the guide surface of the guide in order to levitate and support a movable body moving while being guided by the guide. While forming a gap between the ejection pad and the guide surface, the difference in the fluid supply pressure to each of the fluid ejection pads is changed while maintaining the sum of the fluid supply pressures supplied to each of the fluid ejection pads. In a hydrostatic fluid bearing, the distance between the fluid injection pads and the guide surface is changed by changing the distance between the fluid injection pads and the guide surface. It is characterized by adjusting the rate of change in the distance between the fluid ejection pad and the guide surface with respect to the change in the supply pressure difference.
第１図は線型移動する軸受を移動軸方向から見
た様子を示し、第２図は斜方向から見た様子を示
している。
FIG. 1 shows a linearly moving bearing viewed from the direction of the moving axis, and FIG. 2 shows the bearing viewed from an oblique direction.
図中、１は長く延びたガイドで、各側面がガイ
ド面を構成する。２は摺動枠で、その内枠にはガ
イド面へ向けて空気を噴射するパツド３Ａ〜３Ｄ
が設けられている。各パツド３Ａ〜３Ｄにはそれ
ぞれ図示されない可撓性のダクトが結合され、各
ダクトは不図示の圧力制御弁を介してエアーコン
プレツサーに接続されている。これらのパツドの
内、３Ａと３Ｂは摺動枠２の垂直方向の位置を維
持し、３Ｃと３Ｄは水平方向の位置を維持するも
ので、摺動枠２へガイド１の軸方向に外力を加え
ると、摺動枠２は空気圧に軸承されて摩擦なく移
動する。 In the figure, 1 is an elongated guide, each side of which constitutes a guide surface. 2 is a sliding frame, and the inner frame has pads 3A to 3D that spray air toward the guide surface.
is provided. A flexible duct (not shown) is connected to each pad 3A to 3D, and each duct is connected to an air compressor via a pressure control valve (not shown). Of these pads, 3A and 3B maintain the vertical position of the sliding frame 2, and 3C and 3D maintain the horizontal position, and apply external force to the sliding frame 2 in the axial direction of the guide 1. In addition, the sliding frame 2 is supported by air pressure and moves without friction.
ここで、水平方向のパツト３Ｃと３Ｄを例に取
ると、摺動枠２の水平方向の位置は、ガイド１の
側面に対してパツド３Ｃと３Ｄがとる左右の〓間
によつて決まり、これは３Ｃ，３Ｄに与える空気
の圧力に依存する。仮に、左側のパツド３Ｃの給
気圧を一定とし、右側のパツド３Ｄの給気圧を増
加させれば、左側のパツド３Ｃとガイド１の〓間
は減少し、右側のパツド３Ｄとガイド１の〓間は
増加する。 Here, taking the horizontal pads 3C and 3D as an example, the horizontal position of the sliding frame 2 is determined by the distance between the left and right pads 3C and 3D relative to the side surface of the guide 1. depends on the air pressure applied to 3C and 3D. If the supply pressure of the left pad 3C is constant and the supply pressure of the right pad 3D is increased, the distance between the left pad 3C and guide 1 will decrease, and the distance between the right pad 3D and guide 1 will decrease. increases.
そして、この様な操作が可能であるから、例え
ば製造誤差等によつてガイド１が湾曲していたと
しても、摺動枠２の進行と共にパツド３Ｃ，３Ｄ
への給気圧を操作すれば、摺動枠２を直線的に移
動させることが可能であり、あるいは必要に応じ
て直線状のガイドに対し摺動枠２を若干偏向させ
ることも可能である。 Since such an operation is possible, even if the guide 1 is curved due to manufacturing errors, the pads 3C and 3D will move as the sliding frame 2 advances.
The sliding frame 2 can be moved linearly by manipulating the supply pressure to the sliding frame 2, or it is also possible to slightly deflect the sliding frame 2 with respect to the linear guide as necessary.
しかしながら、給気圧を操作する場合、片側の
パツドの給気圧だけを変化させる場合と、両側の
パツドの給気圧の和を一定に維持し、圧力を差動
的に変化させる場合、例えば、２つのパツド間で
１気圧変化させる時に、一方の給気圧を0.5気圧
高め、他方の給気圧を0.5気圧下げる場合では、
摺動枠２の挙動が相違することがわかつてきた。
第３図はその様子を描いており、片側だけ給気圧
を変化させる場合(S)は、給気圧の変化量に対する
摺動枠２の変位量が、給気圧の増加に伴つて増加
する傾向を持つ。これに対して作動で給気圧を変
化させる場合(T)は、給気圧の変化量に対して変化
量がほぼ一定となるから、摺動枠２の位置制御の
ために極めて都合が良い。 However, when manipulating the supply pressure, there are two cases: changing only the supply pressure of one side of the pad, and maintaining the sum of the supply pressure of both pads constant and changing the pressure differentially. When changing 1 atm between the pads, when increasing the air pressure on one side by 0.5 atm and lowering the air pressure on the other side by 0.5 atm,
It has become clear that the behavior of the sliding frame 2 is different.
Figure 3 depicts this situation. When changing the supply pressure on only one side (S), the amount of displacement of the sliding frame 2 relative to the amount of change in the supply pressure tends to increase as the supply pressure increases. have On the other hand, when the supply pressure is changed by operation (T), the amount of change is approximately constant with respect to the amount of change in the supply pressure, which is extremely convenient for controlling the position of the sliding frame 2.
また、作動で給気圧を変化させる場合、基準と
なる圧力が異なれば感度は相違する。例えば、給
気圧の和が７Kg／cm2の時に１Kg／cm2の差を作る場
合と、給気圧の和が６Kg／cm2の時に１Kg／cm2の差
を作る場合では感度が異なる。第４図はその様子
を描いているが、左右のパツド３Ｃ，３Ｄへの給
気圧の和を増加させれば感度を減少させることが
でき、また左右をパツド３Ｃ，３Ｄへの給気圧の
和を減少させれば感度を増加させることが可能で
あることを示す。 Furthermore, when the supply pressure is changed by operation, the sensitivity will be different if the reference pressure is different. For example, the sensitivity is different when creating a difference of 1 kg/cm 2 when the sum of the air supply pressures is 7 kg/cm 2 and when creating a difference of 1 kg/cm 2 when the sum of the air pressures is 6 kg/cm 2 . Figure 4 depicts this situation, but the sensitivity can be decreased by increasing the sum of the air supply pressures to the left and right pads 3C and 3D. This shows that it is possible to increase sensitivity by decreasing .
従つて、第１図に示す軸受で、摺動枠２をガイ
ド１に沿つて進行させ、一定量Ｌだけ移動した時
に摺動枠２をＤだけ水平方向に移動させる必要が
あつたとして、感度が低すぎる場合には感度を高
めないと補償しきれないから給気圧の和を低めに
設定し、感度が高すぎる場合には過剰補正させる
ことから給気圧の和を高めに設定する。 Therefore, with the bearing shown in FIG. 1, if the sliding frame 2 is moved along the guide 1 and it is necessary to move the sliding frame 2 by D in the horizontal direction when it has moved by a certain amount L, then the sensitivity If it is too low, it cannot be compensated for unless the sensitivity is increased, so the sum of the supply pressures is set to a low value, and if the sensitivity is too high, the sum of the supply pressures is set to a high value to prevent excessive compensation.
第５図は軸受の組立誤差を上述の調整方法によ
つて補償した例を説明するためのもので、摺動枠
２が進行方向に向つて若干広がつて組立てられて
いるものとする。３C′，３C″，３D′，３D″はそ
れぞれパツドである。この場合、図中、上方の前
側パツド３C′，３D′とガイド１との間隔は、後側
パツド３C″，３D″とガイド１との間隔との異な
つているから、給気圧が同じだとすると、間〓が
広い所の感度は低く、狭い所は敏感に反応する。
従つて、前後のパツドとも同じ給気圧を基準とし
て摺動枠２の進行に従つて圧力を操作すると、前
後のパツドの感度の相違により、単位進行量に応
じた変位量（分解量）が異なるからちぐはぐな動
きとなる。 FIG. 5 is for explaining an example in which the assembly error of the bearing is compensated for by the above-mentioned adjustment method, and it is assumed that the sliding frame 2 is assembled so as to be slightly expanded in the direction of movement. 3C', 3C'', 3D', 3D'' are pads, respectively. In this case, in the figure, the distance between the upper front pads 3C', 3D' and the guide 1 is different from the distance between the rear pads 3C'', 3D'' and the guide 1, so assuming that the supply pressure is the same, Sensitivity is low in areas with wide spaces, and sensitive in areas with narrow spaces.
Therefore, if the pressure is manipulated as the sliding frame 2 advances based on the same supply pressure for the front and rear pads, the amount of displacement (amount of decomposition) will differ depending on the unit amount of advancement due to the difference in sensitivity between the front and rear pads. It becomes a erratic movement.
この場合には、第５図の後側のパツド３C″，
３D″に与える圧力の和を固定して、前側のパツ
ド３C′，３D′に与える圧力の和を減少させて感度
を高めるか、あるいは前側のパツドに与える圧力
の和を減少させ、後側のパツドに与える圧力の和
を増加させるか、若しくは前側のパツドに与える
圧力の和を固定し、後側のパツドに与える圧力の
和を増加させることにより、前後のパツド間の分
解能をそろえれば、摺動枠２の移動を高精度なも
のに調整することができる。なお、この例は水平
にパツドが配されているが、垂直の配置でも同様
である。 In this case, the pads 3C'' on the rear side in Figure 5,
Either fix the sum of pressures applied to pads 3D'' and decrease the sum of pressures applied to front pads 3C' and 3D' to increase sensitivity, or decrease the sum of pressures applied to front pads and increase sensitivity. If the resolution between the front and rear pads is made equal by increasing the sum of pressure applied to the pads, or by fixing the sum of pressures applied to the front pads and increasing the sum of pressures applied to the rear pads, The movement of the sliding frame 2 can be adjusted with high precision.Although the pads are arranged horizontally in this example, the same applies to a vertical arrangement.
また、上述の軸受の摺動枠やガイドあるいはパ
ツドの寸法誤差の他に、各パツドの剛性や浮上力
等の特性のバラツキにより設計で定めた感度に収
まらず、例えば前側のパツドの組と後側のパツド
の組の感度に差が生じた場合にも、ガイドを挟ん
で対向するパツドの給気圧の和を増加させて感度
を減少させる、または給気圧の和を減少させるこ
とにより感度を増加させる等の処理により、摺動
枠の移動速度に身合つた値に前後のパツドの組の
感度を設定することができる。 In addition to the above-mentioned dimensional errors in the sliding frame, guides, or pads of the bearing, the sensitivity may not be within the designed sensitivity due to variations in characteristics such as the rigidity and levitation force of each pad. Even if there is a difference in sensitivity between the side pad sets, the sensitivity can be decreased by increasing the sum of the supply pressures of the pads facing each other across the guide, or the sensitivity can be increased by decreasing the sum of the supply pressures. The sensitivity of the front and rear pad sets can be set to a value that suits the moving speed of the sliding frame.
第６図は４組の対向するパツドを具える軸受を
描いており、この図において、パツド１３Ａ，２
３Ａの組とパツド１３A′，２３A′の組は摺動枠
２の移動に伴つて給気圧が操作されるもので、パ
ツド１４Ａ，２４Ａの組と１４A′，２４A′の組
は一定の圧力が供給されるものとする。ここで、
パツドの特性によつて予定の感度がでない場合
は、パツド１３Ａ，２３Ａの組及びパツド１３
A′，２３A′の組に夫々与える供給圧の和を増減
することにより感度を調整し、あるいはパツド１
４Ａ，２４Ａの組及びパツド１４A′，２４A′の
組に夫々与える圧力の和を増減することにより感
度を調整する。 FIG. 6 depicts a bearing with four pairs of opposing pads, in which pads 13A, 2
For the set 3A and the set of pads 13A', 23A', the supply pressure is controlled as the sliding frame 2 moves, and for the set of pads 14A, 24A and the set of pads 14A', 24A', the pressure is constant. shall be supplied. here,
If the expected sensitivity is not achieved due to the characteristics of the pads, use the set of pads 13A and 23A and the pads 13.
Sensitivity can be adjusted by increasing or decreasing the sum of the supply pressures applied to each pair of A' and 23A', or
The sensitivity is adjusted by increasing or decreasing the sum of the pressures applied to the set of pads 4A, 24A and the set of pads 14A', 24A'.
第７図は平面内で回転するタイプの軸受を示し
ており、１は平坦な上面を有するガイド、５は回
転板、６Ａ，６Ｂ等は軸対称に配されたパツド
で、回転板５は垂直な仮想軸を中心に回転するも
のとする。この実施例で、回転板５を微小量傾斜
させる様な制御を行う場合、パツド６Ａとパツド
６Ｂに与える給気圧に差を生じさせることになる
が、所望の感度でない時にはパツド６Ａとパツド
６Ｂへの給気圧の和を増減させて感度を調整す
る。 Fig. 7 shows a type of bearing that rotates in a plane, where 1 is a guide with a flat upper surface, 5 is a rotating plate, 6A, 6B, etc. are pads arranged axially symmetrically, and the rotating plate 5 is vertical. Assume that it rotates around a virtual axis. In this embodiment, when performing control such as tilting the rotary plate 5 by a minute amount, a difference will be caused in the supply pressure applied to the pads 6A and 6B, but if the desired sensitivity is not achieved, the pressure applied to the pads 6A and 6B will be different. Adjust the sensitivity by increasing or decreasing the sum of the supply pressures.
例えば、両パツド６Ａ，６Ｂの給気圧の和が10
Kg／cm2で、両者間に１Kg／cm2の差を生じさせる場
合には、一方を4.5Kg／cm2、他方を5.5Kg／cm2と云
う様に、基準の５Kg／cm2を中心に0.5Kg／cm2ずつ
加減する。ここで、感度が低過ぎた場合には、パ
ツド６Ａ，６Ｂの給気圧の和を９Kg／cm2として、
各パツドの中心となる基準気圧を4.5Kg／cm2に変
更し、0.5Kg／cm2ずつ加減して５Kg／cm2と４Kg／
cm2にすれば、所望の感度で回転板５を傾斜させる
ことができる。 For example, the sum of the supply pressures of both pads 6A and 6B is 10
In Kg/cm 2 , if there is a difference of 1Kg/cm 2 between the two, one is 4.5Kg/cm 2 and the other is 5.5Kg/cm 2 , and the standard 5Kg/cm 2 is the center. Add or subtract by 0.5Kg/ cm2 . Here, if the sensitivity is too low, set the sum of the supply pressures of pads 6A and 6B to 9 kg/cm 2 ,
Change the standard air pressure at the center of each pad to 4.5Kg/cm 2 and increase or decrease it by 0.5Kg/cm 2 to 5Kg/cm 2 and 4Kg/cm 2 .
cm 2 allows the rotary plate 5 to be tilted with a desired sensitivity.
以上説明した様に、本発明によれば、静圧流体
軸受において、ガイドや摺動体、パツドの寸法精
度が良好でなくガイド面とパツドの〓間に誤差が
生じたり、あるいはパツドの剛性や浮上力にバラ
ツキが生じたりしたために、必要とする精度が得
られない場合でも、該軸受を簡単に所望の状態に
調整し得る。従つて、本発明によれば、静圧流体
軸受によつて案内されて移動する移動体の移動精
度及び位置決め精度を高精度なものにできる。
As explained above, according to the present invention, in a hydrostatic fluid bearing, the dimensional accuracy of the guide, sliding body, and pad is not good, and errors occur between the guide surface and the pad, or the rigidity of the pad and the floating Even if the required accuracy cannot be obtained due to variations in force, the bearing can be easily adjusted to the desired state. Therefore, according to the present invention, the movement accuracy and positioning accuracy of the movable body that moves while being guided by the hydrostatic fluid bearing can be made highly accurate.
また、本発明によれば、各パツドの給気圧の変
化に対するパツドとガイド面間の間隔の変化の割
合（感度）を、パツドへの給気圧の分解能を変更
することなく、任意に且つ容易に調整できるの
で、所望の精度及び所望の間隔の変化量を有する
軸受を容易に得ることができる。 Furthermore, according to the present invention, the rate of change (sensitivity) in the distance between the pad and the guide surface with respect to the change in the air supply pressure of each pad can be arbitrarily and easily adjusted without changing the resolution of the air supply pressure to the pad. Since it is adjustable, it is easy to obtain a bearing with a desired accuracy and a desired amount of change in spacing.
更に、複数組のパツドを有している静圧流体軸
受の場合には、各パツドの感度の相違によつて、
ヨーイング、ピツチングあるいはローリングの様
な不都合な動きが生じる恐れがあるが、本発明に
よれば、これらの不都合も解消可能である。 Furthermore, in the case of hydrostatic fluid bearings that have multiple sets of pads, due to the difference in sensitivity of each pad,
Although disadvantageous movements such as yawing, pitching, or rolling may occur, these disadvantages can also be eliminated according to the present invention.
第１図は本発明に係る静圧流体軸受の一実施例
を示す正面図、第２図は本実施例の斜視図、第３
図は給気圧の変化量に対する間〓の変化量を示す
線図、第４図は給気圧の和の変化に対する感度の
変化を示す線図、第５図は本発明の第１の適用例
を示す断面図、第６図は本発明の第２の適用例を
示す断面図、第７図は本発明の第３の適用例を示
す断面図である。
図中、１はガイド、２は摺動枠、３Ａ〜３Ｄは
それぞれ軸受パツドである。
FIG. 1 is a front view showing an embodiment of a hydrostatic fluid bearing according to the present invention, FIG. 2 is a perspective view of this embodiment, and FIG.
The figure is a diagram showing the amount of change in 〓 with respect to the amount of change in the supply pressure, Figure 4 is a diagram showing the change in sensitivity with respect to the change in the sum of the supply pressure, and Figure 5 is a diagram showing the first application example of the present invention. 6 is a sectional view showing a second application example of the present invention, and FIG. 7 is a sectional view showing a third application example of the invention. In the figure, 1 is a guide, 2 is a sliding frame, and 3A to 3D are bearing pads.
Claims (1)
に対して浮上支持するために前記ガイドのガイド
面に複数個の流体噴射パツドから流体を噴射して
前記流体噴射パツドと前記ガイド面の間に間隔を
形成すると共に、前記流体噴射パツドのそれぞれ
に供給される流体の供給圧の和を維持した状態
で、前記流体噴射パツドのそれぞれへの流体の供
給圧の差を変化させることにより前記流体噴射パ
ツドと前記ガイド面の間の間隔を変化させる静圧
流体軸受において、 前記流体噴射パツドのそれぞれへの流体の供給
圧の和を変化させることにより、前記流体噴射パ
ツドのそれぞれへの流体の供給圧の差の変化に対
する前記流体噴射パツドと前記ガイド面の間の間
隔の変化の割合を調整することを特徴とする静圧
流体軸受の調整方法。[Scope of Claims] 1. In order to levitate and support a movable body moving while being guided by a guide, fluid is injected from a plurality of fluid ejecting pads onto the guide surface of the guide, and the fluid ejecting pads and the forming a gap between the guide surfaces and changing the difference in the pressure of fluid supplied to each of the fluid ejection pads while maintaining the sum of the supply pressures of the fluid supplied to each of the fluid ejection pads; In a hydrostatic fluid bearing in which the spacing between the fluid injection pads and the guide surface is varied, the spacing between the fluid injection pads and the guide surface is changed by changing the sum of the fluid supply pressures to each of the fluid injection pads. A method for adjusting a hydrostatic fluid bearing, comprising: adjusting a rate of change in the distance between the fluid injection pad and the guide surface with respect to a change in the difference in fluid supply pressure.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58119679A JPS6014620A (en) | 1983-07-01 | 1983-07-01 | How to adjust hydrostatic fluid bearings |
| US06/623,473 US4588288A (en) | 1983-07-01 | 1984-06-22 | Static pressure bearing and transport device utilizing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58119679A JPS6014620A (en) | 1983-07-01 | 1983-07-01 | How to adjust hydrostatic fluid bearings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6014620A JPS6014620A (en) | 1985-01-25 |
| JPH0457894B2 true JPH0457894B2 (en) | 1992-09-16 |
Family
ID=14767361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58119679A Granted JPS6014620A (en) | 1983-07-01 | 1983-07-01 | How to adjust hydrostatic fluid bearings |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6014620A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6843982B1 (en) | 1994-01-26 | 2005-01-18 | L'oreal | Anhydrous cosmetic or dermatological composition containing the combination of a silicone oil and a wax made from an ethylene homopolymer or copolymer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2665740B2 (en) * | 1987-03-19 | 1997-10-22 | キヤノン株式会社 | Fluid bearing device |
-
1983
- 1983-07-01 JP JP58119679A patent/JPS6014620A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6843982B1 (en) | 1994-01-26 | 2005-01-18 | L'oreal | Anhydrous cosmetic or dermatological composition containing the combination of a silicone oil and a wax made from an ethylene homopolymer or copolymer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6014620A (en) | 1985-01-25 |
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