JPH0459134U - - Google Patents
Info
- Publication number
- JPH0459134U JPH0459134U JP10066990U JP10066990U JPH0459134U JP H0459134 U JPH0459134 U JP H0459134U JP 10066990 U JP10066990 U JP 10066990U JP 10066990 U JP10066990 U JP 10066990U JP H0459134 U JPH0459134 U JP H0459134U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- vertical furnace
- utility
- weight
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
Description
第１図は本考案に係る石英ボートの一例を示す
図、第２図は従来の石英ボートの一例を示す図、
第３図は本考案に係る石英ボートを用いＳｉウエ
ハを熱処理した場合の模式図、第４図は従来の石
英ボートを用いた場合の模式図である。
符号の説明、１……Ｓｉウエハ、２……支柱、
３……ウエハ支持体。
FIG. 1 is a diagram showing an example of a quartz boat according to the present invention, FIG. 2 is a diagram showing an example of a conventional quartz boat,
FIG. 3 is a schematic diagram when a Si wafer is heat-treated using the quartz boat according to the present invention, and FIG. 4 is a schematic diagram when a conventional quartz boat is used. Explanation of symbols, 1...Si wafer, 2... Support column,
3...Wafer support.
Claims (1)
ウエハの反りを防止するためのウエハ支持体を設
けたことを特徴とする縦型炉用ボート。 A boat for a vertical furnace, characterized in that the boat for a vertical furnace is provided with a wafer support for preventing wafers from warping due to their own weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10066990U JPH0459134U (en) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10066990U JPH0459134U (en) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0459134U true JPH0459134U (en) | 1992-05-21 |
Family
ID=31843481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10066990U Pending JPH0459134U (en) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0459134U (en) |
-
1990
- 1990-09-25 JP JP10066990U patent/JPH0459134U/ja active Pending
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