JPH0487631U - - Google Patents
Info
- Publication number
- JPH0487631U JPH0487631U JP13078190U JP13078190U JPH0487631U JP H0487631 U JPH0487631 U JP H0487631U JP 13078190 U JP13078190 U JP 13078190U JP 13078190 U JP13078190 U JP 13078190U JP H0487631 U JPH0487631 U JP H0487631U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- furnace
- core tube
- furnace core
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000000605 extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
Description
第１図、第２図は、本考案に係る半導体装置の
実施例を示すもので、第１図は第１実施例の要部
を示す図、第２図は第２実施例の要部を示す図、
第３図は従来の半導体装置の要部を示す図である
。
１，１１……炉、２，１２，１２′……炉心管
、３，１３……ボート、４，１４……半導体ウエ
ハー、１６ａ，１６ａ′……不活性ガス流入用の
管。
1 and 2 show embodiments of a semiconductor device according to the present invention. FIG. 1 shows the main part of the first embodiment, and FIG. 2 shows the main part of the second embodiment. The figure shown,
FIG. 3 is a diagram showing the main parts of a conventional semiconductor device. 1, 11... Furnace, 2, 12, 12'... Furnace tube, 3, 13... Boat, 4, 14... Semiconductor wafer, 16a, 16a'... Tube for inert gas inflow.
Claims (1)
ハーを内部に配置した炉心管が設けられ、該炉心
管の該半導体フエハー取り出し位置付近にガス流
入用の管が形成されてなる構成の半導体装置。 A semiconductor device having a structure in which a furnace core tube in which a semiconductor wafer is placed inside is provided in a horizontally elongated furnace with both ends open, and a gas inflow tube is formed in the vicinity of the semiconductor wafer extraction position of the furnace core tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13078190U JPH0487631U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13078190U JPH0487631U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487631U true JPH0487631U (en) | 1992-07-30 |
Family
ID=31878096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13078190U Pending JPH0487631U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487631U (en) |
-
1990
- 1990-11-30 JP JP13078190U patent/JPH0487631U/ja active Pending
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