JPH0459393U - - Google Patents

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Publication number
JPH0459393U
JPH0459393U JP10231790U JP10231790U JPH0459393U JP H0459393 U JPH0459393 U JP H0459393U JP 10231790 U JP10231790 U JP 10231790U JP 10231790 U JP10231790 U JP 10231790U JP H0459393 U JPH0459393 U JP H0459393U
Authority
JP
Japan
Prior art keywords
pump
port
turbo
vicinity
pump mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10231790U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10231790U priority Critical patent/JPH0459393U/ja
Publication of JPH0459393U publication Critical patent/JPH0459393U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す全体断面図、
第２図は従来例を示す全体断面図である。 ……排気系路、１……ケーシング、１ａ……
ケーシング内周、７……ロータ、７ｂ……ロータ
外周、８ａ……タービン、８……ポンプ機構、１
０……吸気口、１１……排気口、１３，１４……
パージ口、１５……ガス供給源。 FIG. 1 is an overall sectional view showing an embodiment of the present invention;
FIG. 2 is an overall sectional view showing a conventional example. ...Exhaust system path, 1...Casing, 1a...
Casing inner periphery, 7... Rotor, 7b... Rotor outer periphery, 8a... Turbine, 8... Pump mechanism, 1
0... Intake port, 11... Exhaust port, 13, 14...
Purge port, 15...Gas supply source.

Claims (1)

【実用新案登録請求の範囲】 ロータ外周とケーシング内周の間に少なくとも
タービンを有したポンプ機構を形成し、このポン
プ機構により吸気口から吸入したガスを排気口に
向かつて圧縮排気し得るように構成されたターボ
分子ポンプにおいて、 ポンプ機構の初段近傍から中段近傍に至るまで
の間に、内部の排気系路を外部に連通させるパー
ジ口を設け、このパージ口に、ポンプ運転中に排
気系路内に不活性ガスを導入し得るガス供給源を
接続したことを特徴とするターボ分子ポンプ。[Scope of Claim for Utility Model Registration] A pump mechanism having at least a turbine is formed between the outer circumference of the rotor and the inner circumference of the casing, and the pump mechanism is capable of compressing and exhausting gas taken in from the intake port toward the exhaust port. In the configured turbo-molecular pump, a purge port is provided between the vicinity of the first stage and the vicinity of the middle stage of the pump mechanism to communicate the internal exhaust system path to the outside, and this purge port is connected to the exhaust system path during pump operation. A turbo-molecular pump characterized in that a gas supply source capable of introducing an inert gas into the pump is connected thereto.
JP10231790U 1990-09-29 1990-09-29 Pending JPH0459393U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10231790U JPH0459393U (en) 1990-09-29 1990-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10231790U JPH0459393U (en) 1990-09-29 1990-09-29

Publications (1)

Publication Number Publication Date
JPH0459393U true JPH0459393U (en) 1992-05-21

Family

ID=31846457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10231790U Pending JPH0459393U (en) 1990-09-29 1990-09-29

Country Status (1)

Country Link
JP (1) JPH0459393U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008248754A (en) * 2007-03-29 2008-10-16 Tokyo Electron Ltd Turbo molecular pump, substrate processing apparatus, and deposit control method for turbo molecular pump
JP2022522883A (en) * 2019-03-05 2022-04-20 ファイファー バキユーム Turbo molecular vacuum pump and its purging method
US12392033B2 (en) 2020-12-15 2025-08-19 Tokyo Electron Limited Substrate processing apparatus and substrate processing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008248754A (en) * 2007-03-29 2008-10-16 Tokyo Electron Ltd Turbo molecular pump, substrate processing apparatus, and deposit control method for turbo molecular pump
JP2022522883A (en) * 2019-03-05 2022-04-20 ファイファー バキユーム Turbo molecular vacuum pump and its purging method
US12392033B2 (en) 2020-12-15 2025-08-19 Tokyo Electron Limited Substrate processing apparatus and substrate processing method

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