JPH0460553U

JPH0460553U -

Info

Publication number: JPH0460553U
Application number: JP10241090U
Authority: JP
Priority date: 1990-09-28
Filing date: 1990-09-28
Publication date: 1992-05-25

Description

[Brief explanation of the drawing]

第１図〜第３図はこの考案の第１実施例を示し
、第１図はプラズマＣＶＤ装置の概略断面図、第
２図は第１図における−線断面図、第３図は
第１図における−線断面図である。第４図は
第２実施例のプラズマＣＶＤ装置における駆動機
構の正面図である。１……真空槽、２……可動電極、３……固定電
極、８……回転軸、１２……基板、１４……回転
機構、１５……往復機構。 1 to 3 show a first embodiment of this invention, in which FIG. 1 is a schematic sectional view of a plasma CVD apparatus, FIG. 2 is a sectional view taken along the - line in FIG. 1, and FIG. FIG. FIG. 4 is a front view of the drive mechanism in the plasma CVD apparatus of the second embodiment. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 2... Movable electrode, 3... Fixed electrode, 8... Rotating shaft, 12... Substrate, 14... Rotating mechanism, 15... Reciprocating mechanism.

Claims

[Scope of Claim for Utility Model Registration] (1) A movable electrode and a fixed electrode each formed into a cylindrical shape are arranged inside and outside the vacuum chamber, and a group of substrates is attached to the outer periphery. The movable electrode is rotatably supported via a rotating shaft penetrating the vacuum chamber inside and outside, and a rotating mechanism for rotating the movable electrode via the rotating shaft is provided outside the vacuum chamber; Plasma C equipped with a reciprocating mechanism that reciprocates along the heart
VD device. (2) The rotating mechanism is composed of a motor and a reduction gear, and the output shaft of the reduction gear is connected to the rotating shaft, and the reciprocating mechanism is composed of a forward/reverse motor, a screw shaft that converts motor power into reciprocating motion, and a screw shaft. The plasma CVD apparatus according to claim 1, further comprising a nut body that engages with the nut body, and wherein the rotation mechanism is supported by the nut body.