JPH0461014A - Composite type thin-film magnetic head and production thereof - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a thin film magnetic head used in a magnetic recording/reproducing device, particularly a composite thin film magnetic head in which a thin film magnetic head for recording and a thin III magnetic head for reproduction are laminated. This invention relates to a head and its manufacturing method.

2. Description of the Related Art In recent years, thin film magnetic heads have been attracting attention in response to increased recording densities, higher data transfer speeds, and increased number of channels in magnetic recording and reproducing devices. In particular, in a magnetic recording device in which a recording medium runs at a low speed, a magnetoresistive thin film magnetic head whose reproduction output does not depend on the speed is used.

Since this magnetoresistive thin-film magnetic head is a read-only head, it is laminated with an inductive thin-film magnetic head with a magnetic circuit wrapped around a coil, and used as a composite thin-film magnetic head with integrated recording and playback functions. be done. FIG. 3 shows an external appearance of a conventional composite thin film magnetic head, and FIG. 4 shows a cross section taken along line AA'. 3 and 4, first, a magnetoresistive thin film magnetic head 1 is formed in the following steps. A first insulating layer 22 on a magnetic substrate 21, a bias conductor 23 for applying a bias magnetic field to a magnetoresistive element to be described later.
, a second insulating layer 24, a magnetoresistive element 25, and electrodes 26a and 26b for passing a drive current through the magnetoresistive element 25.
, a third insulating layer 27, a pair of magnetically permeable yokes consisting of a front yoke 28 and a back yoke 29, and a fourth insulating layer 30 as a separation insulating layer are formed in this order.

In particular, the front yoke 28 and the back yoke 29 are formed so that the magnetoresistive element 25 and its ends overlap with each other. Further, a magnetic gap lO is formed between the float yoke 28 and the substrate 21 to guide the recording magnetic field generated from the recording medium into the magnetic head.

An inductive thin film magnetic henode 2 is formed on the isolation insulating layer 30 as follows. First, the unevenness on the surface of the separation insulating layer 300 is removed and planarized by a method such as polishing. Next, the lower magnetic layer 31. Fifth insulating layer 32. Coil N33.
6th insulation @34. Upper magnetic layer 35, seventh layer as a protective film
An insulating layer 36 is sequentially formed and patterned into a predetermined shape.

Thereafter, the protective substrate 37 is bonded and the sliding surface with the magnetic tape is polished to complete the composite thin film magnetic head. 38
is a magnetic gap for generating a recording magnetic field to the outside.

The purpose of the above-described planarization of the separation insulating layer 30 is to make the magnetic gap 10 of the magnetoresistive thin film magnetic head 1 and the magnetic gap 38 of the inductive thin film magnetic head 2 accurately parallel, and to make the lower magnetic layer a flat surface. It is important not to deteriorate its magnetic properties by forming it on top of the magnetic layer.

Problems to be Solved by the Invention However, in the conventional composite thin film magnetic head described above, the coil layer 33 is formed so as to cross the stepped portion 40 generated by the lower magnetic layer, so the coil layer 33 is easily disconnected. was there.

SUMMARY OF THE INVENTION In view of the conventional drawbacks, an object of the present invention is to provide a composite thin film magnetic henode and a method for manufacturing the same, which can prevent disconnection of the coil layer while maintaining the parallelism of two magnetic gaps.

Means for Solving the Problems In order to achieve the above objects, the composite thin film magnetic head of the present invention comprises a lower magnetic layer of an inductive type magnetic head formed on a separation insulating layer, and a lower magnetic layer thereof. The surface of the insulating layer formed thereon is a flat surface at the same height.

In order to manufacture flat surfaces with the same height, the isolation insulating layer is flattened, the lower magnetic layer of the inductive thin film magnetic head is formed on it, processed into a predetermined shape, and then the lower magnetic layer is formed on top of the lower magnetic layer. Either an insulating layer is formed and the lower magnetic layer and the insulating layer are processed into flat surfaces with the same height, or a lower magnetic layer is formed on the separation insulating layer, and an insulating layer is formed on the lower magnetic layer. , the lower magnetic layer and the insulating layer are processed into flat surfaces with the same height.

Function: Due to the above-described structure and manufacturing method, the surfaces on which the coil layers are formed are flat surfaces having the same height.

Example Examples of the present invention will be described below.

FIG. 1 is a sectional view of a composite thin film magnetic head in a first embodiment of the present invention.

First, the magnetoresistive thin film magnetic head 1 is fabricated on a magnetic substrate 21 in a similar manner to the conventional method. Next, an inductive cap I is formed on the fourth insulating layer 50, which is a flattened isolation insulating layer.
II magnetic head 2 is formed. At that time, first, a lower magnetic layer 51 is formed, and a fifth insulating layer 52 is formed on the zero-order lower magnetic layer 51 which is patterned into a predetermined shape.
The lower magnetic layer 51 and the fifth insulating layer 52 are planarized by a method such as polishing so that they are at the same height and parallel to the surface of the magnetic substrate 21. Then, a sixth insulator 1i153 is formed,
A coil layer 54 is formed on the insulating Ji 53. That is, the coil layer 54 is formed on the insulating layer 53 which is parallel to the magnetic substrate 21 and has a flat surface. As a result, the magnetic gap 10 of the magnetoresistive thin-film magnetic head I and the magnetic gear knob 59 of the inductive thin-film magnetic head 2 become precisely parallel, and good recording and reproduction can be achieved. In addition, the coil layer 54
Since it is formed on the sixth insulating layer 53 with no difference, there is no disconnection. After that, the seventh insulating layer 55. Upper magnetic layer 5
6. An eighth insulating layer 57 is sequentially formed and patterned into a predetermined shape. Thereafter, a protective substrate 58 is bonded and the sliding surface with the magnetic tape is polished to complete the composite thin film magnetic head. 59 is a magnetic gear for generating a recording magnetic field to the outside.

FIG. 2 is a sectional view of a composite thin film magnetic head in a second embodiment of the present invention. As in this embodiment, the lower magnetic layer 5
If the thickness of the fourth insulating layer 50 is sufficiently thicker than the step 60, it is not necessarily necessary to planarize the fourth insulating layer 50. In this embodiment, the thickness of the lower magnetic layer 51 is 5 μm, and the maximum step difference is about 2 μm, and in this case, the step does not deteriorate the magnetic properties of the lower magnetic layer.

In the above two embodiments, a magnetic material is used as the substrate, but a substrate made of a non-magnetic material on which a magnetic yi film is formed may also be used.

Further, in the above embodiment, the coil of the induction type thin 11 magnetic head 2 has a one-turn configuration, but it may have a multi-turn configuration of two or more turns. In this case, the current required to record on the recording medium can be reduced in proportion to the number of turns.

Effects of the Invention As described above, according to the composite thin-film magnetic head and the manufacturing method thereof of the present invention, the coil layer is formed on the insulating layer that is parallel to the substrate and has a flat surface, so that the coil layer does not cause disconnection. There's nothing to do.

Furthermore, since the lower magnetic layer is directly polished, the magnetic gap surface becomes an extremely smooth plane. Furthermore, the present invention has many advantages, such as the magnetic gap of the magnetoresistive thin film magnetic head and the magnetic gap of the inductive thin film magnetic head being precisely parallel to each other, thereby achieving good recording and reproduction.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a composite thin film magnetic head according to a first embodiment of the present invention, FIG. 2 is a sectional view of a multiple thin film magnetic head according to a second embodiment, and FIG. 3 is a conventional composite thin film magnetic head. A perspective view of the thin film magnetic head, FIG. 4 is a sectional view taken along the line AA' in FIG. 3. 1... Magnetoresistive thin film magnetic head, 2...
... Inductive thin film magnetic head, 21 ... Substrate, 5
0... Separation insulating layer, 51... Lower magnetic layer, 52... Insulating layer. Name of agent: Patent attorney Shigetaka Awano Haka 1 person 2F - Board 9 - Father # Kisho 1 Figure

Claims (3)

[Claims] (1) In a composite thin-film magnetic head in which a magnetoresistive thin-film magnetic head, a separation insulating layer, and an inductive thin-film magnetic head are laminated on a substrate, a lower magnetic layer of the inductive thin-film magnetic head and a layer above the lower magnetic layer are provided. A composite thin film magnetic head characterized in that the surface of an insulating layer formed on the surface is a flat surface at the same height. (2) A method for manufacturing a composite thin film magnetic head in which a magnetoresistive thin film magnetic head, a separation insulating layer, and an inductive thin film magnetic head are laminated on a substrate, including the step of flattening the separation insulating layer, and the step of flattening the separation insulating layer; A step of forming a lower magnetic layer of a thin film magnetic head and processing it into a predetermined shape, a step of forming an insulating layer on the lower magnetic layer, and a step of forming the lower magnetic layer and the insulating layer on a flat surface of the same height. 1. A method for manufacturing a composite thin-film magnetic head, comprising the steps of: (3) In a method for manufacturing a composite thin film magnetic head in which a magnetoresistive thin film magnetic head, a separation insulating layer, and an inductive thin film magnetic head are laminated on a substrate, a lower magnetic layer of the inductive thin film magnetic head is formed and , forming an insulating layer on the lower magnetic layer, and fixing the lower magnetic layer and the insulating layer into a flat surface having the same layer height. A method for manufacturing a composite thin-film magnetic head.