JPH0461229B2 - - Google Patents

Info

Publication number
JPH0461229B2
JPH0461229B2 JP27917185A JP27917185A JPH0461229B2 JP H0461229 B2 JPH0461229 B2 JP H0461229B2 JP 27917185 A JP27917185 A JP 27917185A JP 27917185 A JP27917185 A JP 27917185A JP H0461229 B2 JPH0461229 B2 JP H0461229B2
Authority
JP
Japan
Prior art keywords
plunger
diaphragm
gas
plate
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP27917185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62141378A (ja
Inventor
Masatoshi Hikosaka
Kuniaki Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP27917185A priority Critical patent/JPS62141378A/ja
Publication of JPS62141378A publication Critical patent/JPS62141378A/ja
Publication of JPH0461229B2 publication Critical patent/JPH0461229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP27917185A 1985-12-13 1985-12-13 ガスクロマトグラフ用切換弁 Granted JPS62141378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27917185A JPS62141378A (ja) 1985-12-13 1985-12-13 ガスクロマトグラフ用切換弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27917185A JPS62141378A (ja) 1985-12-13 1985-12-13 ガスクロマトグラフ用切換弁

Publications (2)

Publication Number Publication Date
JPS62141378A JPS62141378A (ja) 1987-06-24
JPH0461229B2 true JPH0461229B2 (fr) 1992-09-30

Family

ID=17607435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27917185A Granted JPS62141378A (ja) 1985-12-13 1985-12-13 ガスクロマトグラフ用切換弁

Country Status (1)

Country Link
JP (1) JPS62141378A (fr)

Also Published As

Publication number Publication date
JPS62141378A (ja) 1987-06-24

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