JPH0462009B2 - - Google Patents

Info

Publication number
JPH0462009B2
JPH0462009B2 JP1989284A JP1989284A JPH0462009B2 JP H0462009 B2 JPH0462009 B2 JP H0462009B2 JP 1989284 A JP1989284 A JP 1989284A JP 1989284 A JP1989284 A JP 1989284A JP H0462009 B2 JPH0462009 B2 JP H0462009B2
Authority
JP
Japan
Prior art keywords
temperature
colors
emissivity
spectral
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1989284A
Other languages
Japanese (ja)
Other versions
JPS60165524A (en
Inventor
Fukuzen Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP1989284A priority Critical patent/JPS60165524A/en
Publication of JPS60165524A publication Critical patent/JPS60165524A/en
Publication of JPH0462009B2 publication Critical patent/JPH0462009B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Description

【発明の詳細な説明】 本発明は放射率の測定方法に関する。一般に試
料の放射率は該試料の材質、温度、酸化状態、表
面粗さ、波長等により変化するので黒体を試料と
同温度、同状態に設け、黒体からの熱放射と試料
からの熱放射を夫々測定してその比を求めること
により求めているが、これには試料及び黒体の温
度を予め知る必要があり、また黒体を設置し同温
にしなければならないので測定が複雑になる欠点
がある。例えば試料が隔離された個所にあつて接
触式の測温を行なえない場合には放射率の測定が
特に困難で、放射率を知ることによつて得られる
試料の酸化状態、組成等を非接触式で知ることは
出来ない。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for measuring emissivity. In general, the emissivity of a sample changes depending on the material, temperature, oxidation state, surface roughness, wavelength, etc. of the sample. This is determined by measuring each radiation and finding the ratio, but this requires knowing the temperature of the sample and blackbody in advance, and the blackbody must be installed to have the same temperature, making the measurement complicated. There is a drawback. For example, if the sample is in an isolated location and contact temperature measurement is not possible, it is particularly difficult to measure emissivity. You can't know by formula.

本発明はこうした欠点を解消することを目的と
したもので、試料からの熱放射を分光して4色以
上の波長の分光熱放射を測定する一方、各波長に
於ける分光熱放射率の直線近似式を仮定し、該直
線近似式に於ける前記波長のうちの3色の波長の
近似分光熱放射率と該3色に対応する前記測定の
分光熱放射とから温度を求めると共に該直線近似
式に於ける前記4色以上のうちの残りの色を含む
3色の波長の近似分光熱放射率と該残りの色を含
む3色に対応する前記測定の分光熱放射とから温
度を求め、夫々求めた温度が一致する温度を該試
料の温度とし、この温度と前記測定の波長及び分
光熱放射とから該試料の分光熱放射率を求めるこ
とを特徴とする。
The purpose of the present invention is to solve these drawbacks, and while measuring the spectral thermal radiation of four or more color wavelengths by spectrally dispersing the thermal radiation from the sample, it also measures the spectral thermal radiation of four or more color wavelengths. Assuming an approximation formula, calculate the temperature from the approximate spectral thermal emissivity of the wavelengths of the three colors among the wavelengths in the linear approximation formula and the spectral thermal radiation of the measurement corresponding to the three colors, and calculate the temperature using the linear approximation. Determine the temperature from the approximate spectral thermal emissivity of the wavelength of three colors including the remaining colors among the four or more colors in the formula and the measured spectral thermal emissivity corresponding to the three colors including the remaining colors, The method is characterized in that the temperature at which the respective determined temperatures match is taken as the temperature of the sample, and the spectral thermal emissivity of the sample is determined from this temperature, the measured wavelength, and the spectral thermal radiation.

本発明の実施例を第1図示のように真空容器1
内に収めた試料2の放射率を測定する場合につき
説明する。
An embodiment of the present invention is shown in a vacuum container 1 as shown in the first diagram.
A case will be explained in which the emissivity of the sample 2 contained in the sample 2 is measured.

同図に於て4は真空窓3を介して該試料2の熱
放射を複数の波長に分光する分光器5と、分光さ
れた分光熱放射の量を検出する検出器6と、その
検出値を演算する計算機例えばマイクロプロセツ
サ7を備えた放射温度計を示し、該分光器5に於
ては熱放射を4色もしくはそれ以上の波長に分光
し、各分光熱放射は分光数に応じた受光部を有す
る検出器6で同時に測定され、各測定値はマイク
ロプロセツサ7に於て試料2の放射率を求めるた
めの演算に供される。一般に放射温度計を使用し
て試料の放射率の測定を行なう場合黒体を併設し
てこれよりの熱放射をも測定する必要があるが、
本発明に於ては特に黒体を設けることなく試料の
放射率を正確に求めることが出来る。
In the figure, reference numeral 4 denotes a spectroscope 5 that separates the thermal radiation of the sample 2 into multiple wavelengths through the vacuum window 3, a detector 6 that detects the amount of the spectroscopic thermal radiation, and its detected value. For example, a radiation thermometer equipped with a microprocessor 7 is shown, and the spectroscope 5 separates the thermal radiation into four or more colors of wavelengths, and each spectral thermal radiation is divided into spectral numbers. They are simultaneously measured by a detector 6 having a light receiving section, and each measured value is submitted to a microprocessor 7 for calculation to determine the emissivity of the sample 2. Generally, when measuring the emissivity of a sample using a radiation thermometer, it is necessary to also install a blackbody to measure the thermal radiation from this body.
In the present invention, the emissivity of the sample can be accurately determined without particularly providing a blackbody.

実施例に於て試料2の温度がT、熱放射率が
ε、熱放射がLであるとする。このうち温度T及
び熱放射率εは未知数であり、熱放射Lは4色以
上の波長λ1,λ2……λoに分光され、夫々の波長に
於ける分光熱放射L1,L2……Loが放射温度計4
により測定される。
In the example, it is assumed that the temperature of the sample 2 is T, the thermal emissivity is ε, and the thermal radiation is L. Of these, the temperature T and thermal emissivity ε are unknown quantities, and the thermal radiation L is spectrally divided into wavelengths λ 1 , λ 2 ... λ o of four or more colors, and the spectral thermal radiation L 1 , L 2 at each wavelength is ...L o is radiation thermometer 4
It is measured by

一方、各波長λ1,λ2……λoに於ける分光熱放射
率ε1,ε2……εoを黒体の熱放射等の比較対象の熱
放射を知らなければ求め得ないものであるが、あ
る曲線に沿つて変化するものであることが知られ
ており、第2図示の如く分光熱放射率ε1,ε2……
εoの各点或は各点の付近を通る分光熱放射率の直
線近似式εcを想定することが出来る。この近似式
εcは波長λの1次式で次のように表現出来る。
On the other hand, the spectral thermal emissivity ε 1 , ε 2 ...ε o at each wavelength λ 1 , λ 2 ...λ o cannot be determined without knowing the thermal radiation to be compared, such as the thermal radiation of a black body. However, it is known that it changes along a certain curve, and as shown in the second diagram, the spectral thermal emissivity ε 1 , ε 2 ...
A linear approximation equation εc of the spectral thermal emissivity passing through each point or the vicinity of each point of ε o can be assumed. This approximate expression ε c can be expressed as a linear expression of the wavelength λ as follows.

εc=aλ+b ……〔〕 測定された分光熱放射Loは黒体からの分光熱放
射をL* oとすれば、 Lo=εc・L* o =(aλo+b)・L* o …〔〕 となる。このL* oはブランクの公式から L* o=C1/λ5o・1/exp(C2/λoT)−1…〔
〕 で表わされ、これに於てC1は1.19196×10-p〔W・
m2〕、C2は0.014388〔m・K〕で表わされる常数で
ある。
ε c = aλ + b ... [] If the measured spectral thermal radiation L o is the spectral thermal radiation from the black body as L * o , then L o = ε c・L * o = (aλ o + b)・L * o …[] becomes. This L * o is obtained from Blank's formula: L * o = C 1 / λ 5 / o・1/exp (C 2 / λ o T) − 1... [
], where C 1 is 1.19196×10 -p [W・
m 2 ], C 2 is a constant expressed as 0.014388 [m·K].

また〔〕式は実測により L1=(aλ1+b)・L* 1 L2=(aλ2+b)・L* 2 L3=(aλ3+b)・L* 3 L4=(aλ4+b)・L* 4 〔〕 で与えられ、このうち3色の波長λ1,λ2,λ3に関
する前記〔〕式を用いて係数a,bを消去する
と L1/L*1(λ3−λ2)+L2/L*2(λ1−λ3) +L3/L*3(λ2−λ1)=0 …〔〕 となる。これに於て黒体からの熱放射L* oは〔〕
式で与えられるので〔〕式は y=L1λ5 1〔exp(C2/λ1T)−1〕・(λ3−λ2) +L2λ5 2〔exp(C2/λ2T)−1〕・(λ1−λ3) +L3λ5 3(exp(C2/λ3T)−1〕・(λ2−λ1
=0 …〔〕 となり、このyをマイクロプロセツサ7により温
度Tでプロツトすると第3図示のように2個の解
TA・TBを求めることが出来る。而してTA・TB
いずれかが試料2の温度であるかを判別し得ない
のでさらに測定波長のうちの残りの色即ちλ4を含
めた3色例えばλ2,λ3,λ4の波長に関する前記
〔〕式より係数a,bを消去し、〔〕と同様の y=L2λ5 2〔exp(C2/λ2T)−1〕・(λ4−λ3) +L3λ5 3〔exp(C2/λ3T)−1〕・(λ2−λ4) +L4λ5 4(exp(C2/λ4T)−1〕・(λ3−λ2
=0 …〔〕 から温度Tでプロツトし、第4図示のような2個
の解TC,TDを求める。
In addition, the formula [] is determined by actual measurement as L 1 = (aλ 1 + b)・L * 1 L 2 = (aλ 2 + b)・L * 2 L 3 = (aλ 3 + b)・L * 3 L 4 = (aλ 4 + b )・L * 4 [], and if we eliminate the coefficients a and b using the above formula [] regarding the wavelengths of the three colors λ 1 , λ 2 , λ 3 , we get L 1 /L * / 13 −λ 2 )+L 2 /L * / 21 −λ 3 ) +L 3 /L * / 32 −λ 1 )=0…[]. In this case, the heat radiation L * o from the black body is []
Since it is given by the formula, the [] formula is y=L 1 λ 5 1 [exp(C 21 T)−1]・(λ 3 −λ 2 ) +L 2 λ 5 2 [exp(C 22 T) −1]・(λ 1 −λ 3 ) +L 3 λ 5 3 (exp(C 23 T)−1)・(λ 2 −λ 1 )
=0...[], and when this y is plotted against the temperature T by the microprocessor 7, two solutions are obtained as shown in the third figure.
You can find T A and T B. Therefore, since it is not possible to determine whether either T A or T B is the temperature of sample 2, the remaining colors of the measurement wavelengths, that is, three colors including λ 4 , for example, λ 2 , λ 3 , λ Eliminate the coefficients a and b from the above [] formula regarding the wavelength of 4 , and obtain y = L 2 λ 5 2 [exp (C 2 / λ 2 T) - 1] · (λ 4 - λ 3 ), which is the same as []. +L 3 λ 5 3 [exp(C 23 T)-1]・(λ 2 −λ 4 ) +L 4 λ 5 4 (exp(C 24 T)−1]・(λ 3 −λ 2 )
=0... [] Plot the temperature T to obtain two solutions T C and T D as shown in the fourth diagram.

その結果TA=TC,TB≠TDであれば、TAが試
料2の温度であることが判定できる。
As a result, if T A = T C and T B ≠ T D , it can be determined that T A is the temperature of sample 2.

温度Tで〔〕〔〕式をプロツトしても解が
なく第5図示のように極小値を有する場合がある
が、その場合のTEに於けるyが零に近ければTE
は近似的な試料2の温度であると判断出来る。
Even if you plot the equation [][] at temperature T, there may be no solution and it may have a minimum value as shown in Figure 5, but in that case, if y at T E is close to zero, then T E
can be determined to be the approximate temperature of sample 2.

さらに第6図示のように解も極小値もない場合
があるが、この場合波長λを変えて熱放射の測定
と演算を行ない温度T若しくは近似温度を求める
ことが可能である。波長λは4色以上であればよ
く、例えば6色の場合該試料2の熱放射をλ1……
λ6の波長で分光測定し、λ1……λ3と、λ4……λ6
分けて演算することが出来る。
Further, as shown in FIG. 6, there may be cases where there is neither a solution nor a minimum value, but in this case, it is possible to measure and calculate the thermal radiation by changing the wavelength λ to obtain the temperature T or an approximate temperature. The wavelength λ may be four or more colors. For example, in the case of six colors, the thermal radiation of the sample 2 is λ 1 ...
Spectral measurement can be performed at a wavelength of λ 6 , and calculations can be made by dividing it into λ 1 ... λ 3 and λ 4 ... λ 6 .

こうして試料2の温度Tが求まると実測の分光
熱放射Lo及び波長λoとから〔〕,〔〕式を用
いて各波長に於ける近似分光熱放射率ε1,……εo
を求めることが出来る。
When the temperature T of the sample 2 is determined in this way, from the actually measured spectral thermal radiation L o and the wavelength λ o , the approximate spectral thermal emissivity ε 1 , ... ε o at each wavelength is calculated using the formulas [ ] and [ ].
can be found.

以上のように本発明によるときは、試料の熱放
射を4色以上に分光測定し、分光熱放射率の直線
近似式と測定した分光熱放射とから3色ずつを適
用して試料の温度を求め、この温度と実測の分光
熱放射及び波長とから近似分光熱放射率を求める
ので黒体等の比較対象を特に設置する必要がな
く、簡単に放射率を測定出来、非接触式で試料の
放射率を知ることが出来る等の効果がある。
As described above, according to the present invention, the thermal radiation of a sample is spectroscopically measured in four or more colors, and the temperature of the sample is determined by applying three colors each from the linear approximation formula of the spectral thermal emissivity and the measured spectral thermal radiation. Since the approximate spectral thermal emissivity is calculated from this temperature and the actually measured spectral thermal radiation and wavelength, there is no need to set up a comparison target such as a blackbody, and the emissivity can be easily measured without contact. There are effects such as being able to know the emissivity.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の測定方法の1例の線図、第2
図は分光熱放射率と直線近似式との関係を示す線
図、第3図乃至第6図は温度Tでプロツトして得
られるyの曲線図である。
Fig. 1 is a diagram of one example of the measuring method of the present invention, Fig. 2 is a diagram of an example of the measuring method of the present invention;
The figure is a diagram showing the relationship between spectral thermal emissivity and a linear approximation formula, and FIGS. 3 to 6 are curve diagrams of y obtained by plotting with temperature T.

Claims (1)

【特許請求の範囲】[Claims] 1 試料からの熱放射を分光して4色以上の波長
の分光熱放射を測定する一方、各波長に於ける分
光熱放射率の直線近似式を仮定し、該直線近似式
に於ける前記波長のうちの3色の波長の近似分光
熱放射率と該3色に対応する前記測定の分光熱放
射とから温度を求めると共に該直線近似式に於け
る前記4色以上の波長のうちの残りの色を含む3
色の波長の近似分光熱放射率と該残りの色を含む
3色に対応する前記測定の分光熱放射とから温度
を求め、夫々求めた温度が一致する温度を該試料
の温度とし、この温度と前記測定の波長及び分光
熱放射とから該試料の分光熱放射率を求めること
を特徴とする放射率測定方法。
1. While spectroscopically measuring the spectral thermal radiation of four or more color wavelengths by spectroscopy of the thermal radiation from the sample, a linear approximation formula for the spectral thermal emissivity at each wavelength is assumed, and the wavelength in the linear approximation formula is The temperature is determined from the approximate spectral thermal emissivity of the wavelengths of three of the colors and the measured spectral thermal radiation corresponding to the three colors, and the remaining wavelengths of the four or more colors in the linear approximation formula are calculated. 3 including colors
The temperature is determined from the approximate spectral thermal emissivity of the wavelength of the color and the measured spectral thermal radiation corresponding to the three colors including the remaining colors, and the temperature at which the respective determined temperatures match is taken as the temperature of the sample, and this temperature An emissivity measurement method characterized in that the spectral thermal emissivity of the sample is determined from the measured wavelength and the spectral thermal radiation.
JP1989284A 1984-02-08 1984-02-08 Emissivity measuring method Granted JPS60165524A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989284A JPS60165524A (en) 1984-02-08 1984-02-08 Emissivity measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989284A JPS60165524A (en) 1984-02-08 1984-02-08 Emissivity measuring method

Publications (2)

Publication Number Publication Date
JPS60165524A JPS60165524A (en) 1985-08-28
JPH0462009B2 true JPH0462009B2 (en) 1992-10-02

Family

ID=12011842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989284A Granted JPS60165524A (en) 1984-02-08 1984-02-08 Emissivity measuring method

Country Status (1)

Country Link
JP (1) JPS60165524A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4881823A (en) * 1988-03-29 1989-11-21 Purdue Research Foundation Radiation thermometry
US10132688B2 (en) 2010-12-17 2018-11-20 General Electric Company System and method for detecting spall within a turbine engine

Also Published As

Publication number Publication date
JPS60165524A (en) 1985-08-28

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