JPH0465529B2 - - Google Patents

Info

Publication number
JPH0465529B2
JPH0465529B2 JP58091177A JP9117783A JPH0465529B2 JP H0465529 B2 JPH0465529 B2 JP H0465529B2 JP 58091177 A JP58091177 A JP 58091177A JP 9117783 A JP9117783 A JP 9117783A JP H0465529 B2 JPH0465529 B2 JP H0465529B2
Authority
JP
Japan
Prior art keywords
region
collector
collector regions
lateral
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58091177A
Other languages
Japanese (ja)
Other versions
JPS59215770A (en
Inventor
Teruo Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP58091177A priority Critical patent/JPS59215770A/en
Publication of JPS59215770A publication Critical patent/JPS59215770A/en
Publication of JPH0465529B2 publication Critical patent/JPH0465529B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30Devices controlled by electric currents or voltages
    • H10D48/32Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34Bipolar devices
    • H10D48/345Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Transistors (AREA)

Description

【発明の詳細な説明】 (イ) 産業上の利用分野 本発明はラテラル型トランジスタ、特に半導体
集積回路に組み込むラテラル型トランジスタの改
良に関する。
DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to lateral type transistors, and particularly to improvements in lateral type transistors incorporated into semiconductor integrated circuits.

(ロ) 従来技術 第1図に従来のマルチコレクタを有するラテラ
ル型トランジスタを示す。1はP型半導体基板上
に積層されたN型エピタキシヤル層を島状にPN
分離されて形成される島領域であり、ラテラル型
トランジスタのベース領域となる。2はP+型の
エミツタ領域、3,4はP+型の第1および第2
コレクタ領域である。5はベース領域1のオーミ
ツク接触を得るためのN+型のコンタクト領域で
ある。
(b) Prior Art FIG. 1 shows a conventional lateral type transistor having a multi-collector. 1 is an island-shaped PN layer of N-type epitaxial layers stacked on a P-type semiconductor substrate.
This is an island region that is formed separately and becomes a base region of a lateral type transistor. 2 is a P + type emitter region, 3 and 4 are P + type first and second
This is the collector area. 5 is an N + type contact region for obtaining ohmic contact with the base region 1;

斯上したマルチコレクタを有するラテラル型ト
ランジスタはエミツタ領域2の周囲を第1および
第2のコレクタ領域3,4で取り囲み、第1およ
び第2のコレクタ領域3,4のエミツタ領域2を
囲む周囲長比で電流比を決定する。たとえば第1
および第2のコレクタ領域3,4ののパターンを
1:1に形成すると、そのコレクタ電流比も1:
1となる。これによりコレクタ電流をマルチコレ
クタのパターン比で所望の比に分割できることが
できる。
The lateral type transistor having a multi-collector as described above has an emitter region 2 surrounded by first and second collector regions 3 and 4, and a peripheral length of the first and second collector regions 3 and 4 surrounding the emitter region 2. Determine the current ratio by the ratio. For example, the first
When the patterns of the second collector regions 3 and 4 are formed in a ratio of 1:1, the collector current ratio is also 1:1.
It becomes 1. This makes it possible to divide the collector current into a desired ratio using the multi-collector pattern ratio.

しかしながら従来のマルチコレクタを有するラ
テラル型トランジスタでは、第1および第2のコ
レクタ領域3,4の離間した部分にエミツタ領域
2より注入されたホールは空乏層がより拡がつて
いるコレクタ領域3,4に多く吸収されるので、
第1および第2のコレクタ領域3,4の電位差に
より電流比が変化し、正確な電流比を維持できな
い欠点があつた。
However, in a conventional lateral transistor having a multi-collector, holes injected from the emitter region 2 into the separated portions of the first and second collector regions 3, 4 are transferred to the collector regions 3, 4 where the depletion layer is more spread. Because it is largely absorbed by
The current ratio changes due to the potential difference between the first and second collector regions 3 and 4, and there is a drawback that an accurate current ratio cannot be maintained.

(ハ) 発明の目的 本発明は斯る欠点に鑑みてなされ、従来の欠点
を大巾に改善したマルチコレクタを有するラテラ
ル型トランジスタを提供することにある。
(c) Object of the Invention The present invention was made in view of the above drawbacks, and an object of the present invention is to provide a lateral type transistor having a multi-collector, which greatly improves the conventional drawbacks.

(ニ) 発明の構成 本発明に依るラテラル型トランジスタは第2図
に示す如く、ベース領域11と、ベース領域11
表面に設けられたエミツタ領域12と、エミツタ
領域12を取り囲む複数個のコレクタ領域13,
14と、コレクタ領域13,14間に設けた高濃
度拡散領域16より構成されている。
(d) Structure of the Invention As shown in FIG. 2, the lateral type transistor according to the present invention has a base region 11 and a
an emitter region 12 provided on the surface, a plurality of collector regions 13 surrounding the emitter region 12,
14, and a high concentration diffusion region 16 provided between the collector regions 13 and 14.

(ホ) 実施例 第2図に本発明によるマルチコレクタを有する
ラテラル型トランジスタを示す。
(E) Embodiment FIG. 2 shows a lateral type transistor having a multi-collector according to the present invention.

11はP型半導体基板上に積層されたN型のエ
ピタキシヤル層を島状にPN分離されて形成され
る島領域であり、ラテラル型トランジスタのベー
ス領域を形成する。12はP+型のエミツタ領域、
13,14はP+型の第1および第2のコレクタ
領域であり、共に同時に選択拡散して形成され
る。15はベース領域11にオーミツク接触を得
るためのN+型のコンタクト領域である。エミツ
タ領域12、第1および第2のコレクタ領域1
3,14およびベースコレクタ領域15には夫々
斜線で示す部分にコンタクトを形成している。
Reference numeral 11 denotes an island region formed by separating an N-type epitaxial layer stacked on a P-type semiconductor substrate into island-like PN regions, which forms a base region of a lateral type transistor. 12 is a P + type emitter region,
Reference numerals 13 and 14 denote P + type first and second collector regions, which are both formed by selective diffusion at the same time. Reference numeral 15 denotes an N + type contact region for making ohmic contact with the base region 11. Emitter region 12, first and second collector regions 1
3 and 14 and the base collector region 15, contacts are formed in the hatched portions, respectively.

16は本発明の最も特徴とする点でN+型の高
濃度拡散領域である。この拡散領域16はベース
コンタクト領域15と同時に拡散形成され、U字
状の第1および第2のコレクタ領域13,14の
離間する部分に配置されている。拡散領域16は
第1および第2コレクタ領域13,14から拡が
る空乏層をここで停止させる働きを有し、第1お
よび第2のコレクタ領域13,14の電位差によ
る空乏層の拡がりの差を最少限にとどめることに
意義がある。
Reference numeral 16 is an N + type high concentration diffusion region which is the most characteristic feature of the present invention. This diffusion region 16 is formed by diffusion at the same time as the base contact region 15, and is arranged in a spaced apart portion of the U-shaped first and second collector regions 13 and 14. The diffusion region 16 has the function of stopping the depletion layer expanding from the first and second collector regions 13 and 14, and minimizes the difference in the expansion of the depletion layer due to the potential difference between the first and second collector regions 13 and 14. It makes sense to keep it to a minimum.

具体的に高濃度拡散領域16は隣接する第1お
よび第2のコレクタ領域13,14より約7μm程
度離間させ、且つ第1および第2のコレクタ領域
13,14の巾より約5μm程度巾広く形成され
る。これは空乏層を有効に規制するためである。
Specifically, the high concentration diffusion region 16 is formed to be approximately 7 μm apart from the adjacent first and second collector regions 13 and 14 and approximately 5 μm wider than the width of the first and second collector regions 13 and 14. be done. This is to effectively control the depletion layer.

斯上した本発明のラテラル型トランジスタに依
れば、空乏層の拡がりの差を高濃度拡散領域16
で規制するので、第1および第2のコレクタ領域
13,14間に注入されるホールによつて第1お
よび第2のコレクタ領域13,14のコレクタ電
流の比は影響されず、パターンより決定された一
定の電流比を維持できる。
According to the above-mentioned lateral transistor of the present invention, the difference in the spread of the depletion layer is reduced by the high concentration diffusion region 16.
Therefore, the ratio of the collector currents of the first and second collector regions 13, 14 is not affected by the holes injected between the first and second collector regions 13, 14, and is determined by the pattern. A constant current ratio can be maintained.

(ヘ) 効果 本発明に依れば高濃度拡散領域16により、マ
ルチコレクタ領域の各々の電流比をほぼそのパタ
ーンサイズで決定できる利点を有する。この結果
回路設計をより簡単に行なえ、所定の電流比を容
易に実現できる。
(f) Effects According to the present invention, the high concentration diffusion region 16 has the advantage that the current ratio of each of the multi-collector regions can be determined almost by the pattern size. As a result, the circuit can be designed more easily and a predetermined current ratio can be easily achieved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のラテラル型トランジスタを説明
する上面図、第2図は本発明のラテラル型トラン
ジスタを説明する上面図である。 11はベース領域、12はエミツタ領域、1
3,14はコレクタ領域、15はベースコンタク
ト領域、16は高濃度拡散領域である。
FIG. 1 is a top view illustrating a conventional lateral type transistor, and FIG. 2 is a top view illustrating a lateral type transistor of the present invention. 11 is a base area, 12 is an emitter area, 1
3 and 14 are collector regions, 15 is a base contact region, and 16 is a high concentration diffusion region.

Claims (1)

【特許請求の範囲】 1 一導電型のベース領域表面に形成した逆導電
型のエミツタ領域と該エミツタ領域を囲む一導電
型の複数のコレクタ領域を具備し、前記コレクタ
領域のパターン寸法で各コレクタの電流比を決定
するラテラル型トランジスタにおいて、 隣接する前記コレクタ領域間の全ての個所に、
各々のコレクタ領域から等距離となる一導電型の
高濃度拡散領域を設け、この領域において前記コ
レクタ領域からの空乏層の拡がりが等しくなるよ
うに規制することを特徴とするラテラル型トラン
ジスタ。
[Scope of Claims] 1. An emitter region of an opposite conductivity type formed on the surface of a base region of one conductivity type, and a plurality of collector regions of one conductivity type surrounding the emitter region, each collector having a pattern dimension of the collector region. In a lateral type transistor that determines the current ratio of
A lateral type transistor characterized in that a high concentration diffusion region of one conductivity type is provided equidistant from each collector region, and the spread of a depletion layer from the collector region is regulated to be equal in this region.
JP58091177A 1983-05-23 1983-05-23 Lateral transistor Granted JPS59215770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58091177A JPS59215770A (en) 1983-05-23 1983-05-23 Lateral transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58091177A JPS59215770A (en) 1983-05-23 1983-05-23 Lateral transistor

Publications (2)

Publication Number Publication Date
JPS59215770A JPS59215770A (en) 1984-12-05
JPH0465529B2 true JPH0465529B2 (en) 1992-10-20

Family

ID=14019176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58091177A Granted JPS59215770A (en) 1983-05-23 1983-05-23 Lateral transistor

Country Status (1)

Country Link
JP (1) JPS59215770A (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5247383A (en) * 1975-10-13 1977-04-15 Toshiba Corp Semiconductor device
JPS5368984A (en) * 1976-12-01 1978-06-19 Hitachi Ltd Transistor

Also Published As

Publication number Publication date
JPS59215770A (en) 1984-12-05

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