JPH0465970U - - Google Patents
Info
- Publication number
- JPH0465970U JPH0465970U JP10755090U JP10755090U JPH0465970U JP H0465970 U JPH0465970 U JP H0465970U JP 10755090 U JP10755090 U JP 10755090U JP 10755090 U JP10755090 U JP 10755090U JP H0465970 U JPH0465970 U JP H0465970U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerator
- compressor
- compression ratio
- expansion rate
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 claims 2
- 238000007906 compression Methods 0.000 claims 2
- 230000008014 freezing Effects 0.000 claims 1
- 238000007710 freezing Methods 0.000 claims 1
- 238000010992 reflux Methods 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案に係る真空ポンプの実施例を示
す要部断面側面図、第２図は従来の真空ポンプの
具体例を示す要部断面側面図である。
７……ポンプ容器、１１……冷凍機、１２……
コンプレツサ、１３……フイードバツク手段。
FIG. 1 is a cross-sectional side view of a main part showing an embodiment of a vacuum pump according to the present invention, and FIG. 2 is a cross-sectional side view of a main part showing a specific example of a conventional vacuum pump. 7... Pump container, 11... Freezer, 12...
Compressor, 13...Feedback means.
Claims (1)
ると共に、膨張率を可変にした冷凍機と、上記冷
凍機を収納し、その周囲の気体分子を冷凍吸着さ
せて真空引きするポンプ容器と、上記冷凍機に圧
縮気体を供給して膨張気体を還流させると共に、
圧縮比を可変にしたコンプレツサと、上記ポンプ
容器内の圧力を検知して上記冷凍機とコンプレツ
サにフイードバツクし、その圧力に応じて上記膨
張率と圧縮比を変えるようにしたフイードバツク
手段とを具備したことを特徴とする真空ポンプ。 A refrigerator that rapidly expands and cools supplied compressed gas and has a variable expansion rate; a pump container that houses the refrigerator and evacuates the surrounding gas molecules by freezing and adsorbing them; Supplying compressed gas to the refrigerator and refluxing the expanded gas,
It is equipped with a compressor having a variable compression ratio, and a feedback means configured to detect the pressure inside the pump container and feed it back to the refrigerator and the compressor, and change the expansion rate and compression ratio according to the pressure. A vacuum pump characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10755090U JPH0465970U (en) | 1990-10-11 | 1990-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10755090U JPH0465970U (en) | 1990-10-11 | 1990-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0465970U true JPH0465970U (en) | 1992-06-09 |
Family
ID=31854119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10755090U Pending JPH0465970U (en) | 1990-10-11 | 1990-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0465970U (en) |
-
1990
- 1990-10-11 JP JP10755090U patent/JPH0465970U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS63151985U (en) | ||
| CA2351851A1 (en) | Compression system for cryogenic refrigeration with multicomponent refrigerant | |
| JPH0188352U (en) | ||
| JPH0355829Y2 (en) | ||
| JPH0158046U (en) | ||
| JPH03106186U (en) | ||
| JPH0243475U (en) | ||
| JPH0367864U (en) | ||
| JPS63196054U (en) | ||
| JPS6247783U (en) | ||
| JPH0296571U (en) | ||
| JPH01175271U (en) | ||
| JPS63155957U (en) | ||
| JPH0161471U (en) | ||
| JPH0214479U (en) | ||
| JPS6245382U (en) | ||
| JPH0188353U (en) | ||
| JPH0348677U (en) | ||
| JPH0234963U (en) | ||
| JPH0327572U (en) | ||
| JPH02110277U (en) | ||
| JPS6382082U (en) | ||
| JPS6451786U (en) | ||
| JPH03104189U (en) | ||
| JPS61145267U (en) |