JPH046607A - Production of perpendicular thin-film magnetic head - Google Patents

Abstract

PURPOSE:To improve recording and reproducing efficiency by bringing a main magnetic pole and a central magnetic yoke provided in the central part of a thin-film coil into direct contact with each other and disposing a magnetic flux return yoke in proximity to a medium-facing surface or exposing this yoke. CONSTITUTION:The thin-film coil 24 centering at the main magnetic pole 21 and the central magnetic yoke 25 connecting to the main magnetic pole 21 at the center of the thin-film coil 24 are formed stop two sheets of nonmagnetic substrates 22 which are inserted with the main magnetic pole 21 consisting of a soft magnetic film between them and are integrated by adhering. After an insulating layer 26 is deposited on the thin-film coil 24 and the central magnetic yoke 25, the insulating layer 26 is so flattened as to expose the thin-film coil 25. A groove 27 communicating with the inside of the nonmagnetic substrate 22 right under the insulating layer 26 in the outer peripheral part of the thin-film coil 24 is formed and thereafter, a magnetic yoke 28 for magnetic flux return of a magnetic ferrite having a leg-shaped projecting part 28a is adhered onto the insulating layer 26 in the state of fitting this leg-shaped projecting part 28a into the groove 27. The recording and reproducing efficiency are greatly improved.

Description

[Detailed Description of the Invention] [Summary] This invention relates to a method for manufacturing a vertical thin-film magnetic head used in a magnetic disk device, a magnetic tape device, etc., particularly a method for manufacturing a planar type vertical thin-film magnetic head. Soft magnetic On the upper surface of two non-magnetic substrates that are integrated by bonding and sandwiching a main magnetic pole made of a film between them, a thin film coil centered on the main magnetic pole, and a connection to the main magnetic pole at the center of the thin film coil. a step of depositing an insulating layer on the thin film coil and the center magnetic yoke, and then flattening the insulating layer so that the center magnetic yoke is exposed; After forming a groove that communicates with the inside of the non-magnetic substrate immediately below in the insulating layer portion on the outer periphery of the insulating layer, a magnetic yoke for magnetic flux return made of magnetic ferrite having leg-shaped protrusions on the upper surface of the insulating layer is attached to the insulating layer. A step of adhering the protruding portion while it is fitted into the groove, and polishing the lower surface of the non-magnetic substrate flat to a position where the leg-shaped protruding portion of the magnetic flux return magnetic yoke is exposed to form a medium facing surface. It consists of a process.

[Industrial application field]

The present invention relates to a method of manufacturing a perpendicular thin film magnetic head used in a magnetic disk device, a magnetic tape device, etc., and particularly relates to a method of manufacturing a planar type perpendicular thin film magnetic head.

In recent years, magnetic disk drives have become smaller and larger in capacity, and planar thin-film magnetic heads employ perpendicular magnetic recording methods, which are capable of much higher density recording than conventional horizontal magnetic recording methods. However, there is a need for a method for manufacturing a perpendicular thin-film magnetic head with even better recording and reproducing efficiency.

[Conventional technology]

A conventional planar type vertical thin film magnetic head is shown in Fig. 3(a).
), a thin film coil 3 is formed on a magnetic substrate 1 made of ferrite such as Ni-Zn through a glabella insulating layer 2 made of SiO□, etc., and a Ni- A central magnetic yoke 4 made of Fe is formed by mask plating or the like so as to be connected to the magnetic substrate 1.

Next, as shown in FIG. 3(b), a SiO□ film 5 is deposited on the interlayer insulating layer 2, the thin film coil 3, and the central magnetic yoke 4 by sputtering or the like. The magnetic yoke 4 is polished flat so that it is exposed, and then a soft magnetic film is applied to the side surface of one of the non-magnetic substrates made of Af203 TIC% or ceramic, as shown in FIG. 3(C). A non-magnetic substrate on which a main magnetic pole 6 is adhered, and the side surface of another similar non-magnetic substrate is integrally bonded to the side surface of the non-magnetic substrate via an adhesive 6a so as to sandwich the main magnetic pole 6 therebetween. 7 is bonded with an adhesive 8 such as low melting point glass or epoxy resin so that the main magnetic pole 6 is magnetically connected to the central magnetic yoke 4.

Thereafter, the non-magnetic substrate 7 is polished flat to a predetermined thickness up to the position indicated by the dashed line along C-C' in the figure, thereby forming the medium facing surface 9 from which the main magnetic pole 6 is exposed. is being created.

The perpendicular thin-film magnetic head having such a configuration is attached to a slider (not shown) as shown in FIG. It is used in combination with a perpendicular magnetic disk 11 having a film structure, and a magnetic flux return yoke is provided on the magnetic head side to improve recording and reproducing efficiency.

[Problem to be solved by the invention]

By the way, in the conventional vertical 'FR film magnetic node mentioned above,
As shown in FIG. 4, a magnetic substrate 1 made of ferrite such as Ni-Zn functions as a magnetic flux return yoke.
The closer this magnetic flux return yoke is to the high-permeability soft magnetic layer 13 of the opposing perpendicular magnetic disk 11 with a two-layer film structure, the better the recording/reproducing efficiency becomes. As shown in the figure, the magnetic flux return yoke is positioned at a considerable distance from the high permeability soft magnetic layer 13 of the perpendicular magnetic disk 11, resulting in a problem of poor recording and reproducing efficiency.

Furthermore, since the cross-sectional area of the main magnetic pole 6 is small, if an adhesive layer is interposed between the main magnetic pole 6 and the central magnetic yoke 4 made of Ni-Fe provided at the center of the thin film coil 3, the above-mentioned efficiency can be further improved. There was a drawback that the value decreased.

In view of the above-mentioned conventional problems, the present invention is configured such that the main magnetic pole and the central magnetic yoke provided at the center of the thin-film coil are in direct contact with each other, and the magnetic flux return yoke is placed close to or exposed to the medium facing surface. The object of the present invention is to provide a method for manufacturing a novel vertical thin-film magnetic head with improved recording/reproducing efficiency.

[Means to solve the problem]

In order to achieve the above-mentioned object, the present invention has a thin film coil centered on the main magnetic pole on the upper surface of two non-magnetic substrates which are bonded and integrated with a main magnetic pole made of a soft magnetic film sandwiched therebetween. forming a central magnetic yoke connected to the main magnetic pole at the center of the thin film coil; depositing an insulating layer on the thin film coil and the central magnetic yoke; After flattening the thin film coil so that it is exposed, and forming a groove in the insulating layer on the outer periphery of the thin film coil that communicates with the inside of the nonmagnetic substrate immediately below, a magnetic A step of adhering a magnetic yoke for magnetic flux return made of ferrite with its leg-shaped protrusion fitted into the groove, and exposing the lower surface of the non-magnetic substrate with the leg-shaped protrusion of the magnetic yoke for magnetic flux return exposed. The method includes the step of flat polishing to a position where the medium facing surface is formed.

[For production]

According to the manufacturing method of the present invention, the central magnetic yoke can be disposed on the main pole in direct contact with the main magnetic pole, and the magnetic flux return yoke can also be disposed with its leg-like protrusions exposed or close to the medium facing surface. Therefore, recording/reproducing efficiency can be improved.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIGS. 1(a) to 1(e) are sectional views of essential parts showing an embodiment of a method for manufacturing a vertical thin-film magnetic head according to the present invention.

First, as shown in FIG. 1(a), for example, sendust (A 12-5i-F
The main pole 21 made of a soft magnetic film such as
For example, on the upper surface of the non-magnetic substrate 22, which is sandwiched between two non-magnetic substrates made of Aj2z (h・TiC, or ceramic, etc.) and adhered with an adhesive layer 21a made of glass, hardening resin, etc., After forming a thin film coil 24 made of a Cu plating film around the main pole 21 via a glabellar insulating layer 23 made of SiO□ by mask plating, a 10 μm thick Ni- film is placed at the center of the thin film coil 24.
A central magnetic yoke 25 made of an Fe film is formed in direct contact with the main magnetic pole 21 by mask plating or the like.

Next, as shown in FIG. 1(b), a 15 μm thick layer is placed on the glabella insulating layer 23 including the thin film coil 24 and the central magnetic yoke 25.
After depositing an inorganic insulating layer 26 having a thickness of 1203 by sputtering, the inorganic insulating layer 26 is flattened to expose the central magnetic yoke 25.

Next, as shown in FIG. 1(C), a non-magnetic substrate 2 directly below the inorganic insulating layer 26 on the outer periphery of the thin film coil 24 is placed on a predetermined portion of the inorganic insulating layer 26.
After forming a groove 27 leading into the inside of the substrate 22 by machining to a depth corresponding to about 80% of the thickness of the substrate 22, the central magnetic yoke 25 is exposed as shown in FIG. 1(d). On the insulating layer 26, a Ni-
A magnetic flux return magnetic yoke 28 made of magnetic ferrite such as Zn or Mn-Zn is adhesively fixed with an adhesive 29 such as glass or epoxy resin with its leg-shaped projections 28a fitted into the grooves 27.

Thereafter, the lower surface of the non-magnetic substrate 22 is polished flat to the position indicated by the dashed line AA' in the figure, where the leg-shaped protrusion 28a of the magnetic yoke 28 for magnetic flux turning is exposed.
As shown in FIG. 1(e), together with the leg-like protrusions 28a of the magnetic flux return magnetic yoke 28, a medium facing surface 30 from which the main magnetic pole 21 is exposed is formed.

In this way, the main magnetic pole 21 exposed on the medium facing surface 30 is directly connected to the central magnetic yoke 25, and the leg-like protrusions 28a of the magnetic flux return magnetic yoke 28 are exposed on the medium facing surface 30. , the positional relationship is extremely close to the perpendicular magnetic disk having a double-layer film structure during recording and reproduction, and recording and reproduction efficiency is significantly improved.

Furthermore, FIGS. 2(a) to 2(d) are sectional views of main parts showing another embodiment of the method for manufacturing a vertical thin film magnetic head according to the present invention.

In this example, first, as shown in FIG. 2(a), for example, Sendust (A
The main magnetic pole 21 made of a soft magnetic film such as 12-5i-Fe) is sandwiched between two non-magnetic substrates made of, for example, Af203.TiC or ceramic, and then placed between two non-magnetic substrates made of glass,
Alternatively, a Cu plating film is formed on the upper surface of the non-magnetic substrate 22 which is bonded and integrated with an adhesive layer 21a made of a curable resin or the like, with the main magnetic pole 21 at its center via an interlayer insulating layer 23 made of SiO□. After the thin film coil 24 is formed by mask plating, a central magnetic yoke 25 made of a 10 μm thick Ni-Fe film is connected directly to the main magnetic pole 21 at the center of the thin film coil 24, and the outer periphery of the thin film coil 24 is also formed. A site magnetic yoke 31 made of a Ni--Fe film is formed on the portion by mask plating or the like.

Next, as shown in FIG. 2(b), an inorganic insulating layer 32 made of A1203 with a thickness of 15 μm is sputtered on the interlayer insulating layer 23 including the thin film coil 24, the central magnetic yoke 25, and the side magnetic yokes 31. After being deposited by a method, the inorganic insulating layer 32 is polished flat so that the central magnetic yoke 25 and side magnetic yokes 31 are exposed.

Next, as shown in FIG. 2(C), a magnetic flux strip made of magnetic ferrite such as Ni-Zn or Mn-Zn is placed on the inorganic insulating layer 32 where the central magnetic yoke 25 and the side magnetic yokes 31 are exposed. After bonding the magnetic yoke 33 with an adhesive 34 such as glass or curable resin, the lower surface of the non-magnetic substrate 22 is polished flat to the position indicated by the dashed line BB' in the figure. As shown in FIG. 2(d), the layer is thinned to form a medium facing surface 35 where the main pole 21 is exposed.

In this way, the main magnetic pole 21 exposed on the medium facing surface 35 is directly connected to the central magnetic yoke 25, and the side magnetic yoke 31, which is magnetically connected to the magnetic flux return magnetic yoke 33, is connected to the medium facing surface 35. Since the magnetic yoke 33 for magnetic flux return is located close to the perpendicular magnetic disk having a double-layer structure during recording and reproduction, the magnetic yoke 33 for magnetic flux return is positioned close to the double-layered perpendicular magnetic disk during recording and reproduction, thereby improving recording and reproduction efficiency.

[Effects of the Invention] As is clear from the above description, according to the method for manufacturing a vertical thin film magnetic head according to the present invention, the main magnetic pole exposed on the medium facing surface is directly connected to the central magnetic yoke, and the main magnetic pole is directly connected to the central magnetic yoke. The magnetic flux return magnetic yoke that returns the magnetic flux from the magnetic pole to the main magnetic pole through the soft magnetic layer of the facing perpendicular magnetic disk with a two-layer film structure can be exposed to the medium facing surface or placed close to it. It has excellent practical effects, such as significantly improved recording/reproducing efficiency.

[Brief explanation of drawings]

FIGS. 1(a) to (e) are cross-sectional views of main parts showing an embodiment of the method for manufacturing a vertical thin film magnetic head according to the present invention, and FIGS. 2(a) to (d) are vertical thin film magnetic heads according to the present invention. 3(a) to (d) are sectional views of essential parts showing an example of a conventional method of manufacturing a vertical thin film magnetic head; FIG. 1 is a sectional view of a main part for explaining problems of a conventional vertical thin film magnetic head. In FIGS. 1(a) to (e) and FIGS. 2(a) to (d), 21 is a main magnetic pole, 22 is a non-magnetic substrate, 23 is an interlayer insulating layer, 24 is a thin film coil, and 25 is a central magnetic yoke. ,2
6 is an inorganic insulating layer, 27 is a groove, 28.degree. 33 is a magnetic yoke for magnetic flux return, 28a is a leg-like projection, 30.35 is a medium facing surface, 31 is a side magnetic yoke, and 32 is an inorganic insulating layer. On ffi'9f4 n'PL5I-1J? (to J1
%! t, fjfn/ff^5E'Je/j#p#t; Japanese cypress W Fig. 2 3Wt

Claims (2)

[Claims] (1) With a main magnetic pole (21) made of a soft magnetic film in between,
A thin film coil (24) centered on the main magnetic pole (21) is mounted on the upper surface of two non-magnetic substrates (22) that are bonded and integrated.
), and the main magnetic pole (21
) and a central magnetic yoke (25) connected to the thin film coil (24) and the central magnetic yoke (25).
After depositing an insulating layer (26) thereon, flattening the insulating layer (26) so that the central magnetic yoke (25) is exposed; (26) A groove (2) communicating with the inside of the non-magnetic substrate (22) directly below
7), a magnetic flux return magnetic yoke (28) made of magnetic ferrite having leg-like protrusions (28a) on the upper surface of the insulating layer (26) is attached to the upper surface of the insulating layer (26).
) is fitted into the groove (27) and the lower surface of the non-magnetic substrate (22) is placed at a position where the leg-like protrusion (28a) of the magnetic flux return magnetic yoke (28) is exposed. A method for manufacturing a vertical thin-film magnetic head, comprising the step of polishing to a flat surface to form a medium facing surface (30). (2) With a main magnetic pole (21) made of a soft magnetic film in between,
A thin film coil (24) centered on the main magnetic pole (21) is mounted on the upper surface of two non-magnetic substrates (22) that are bonded and integrated.
), and the main magnetic pole (2) is located at the center of the thin film coil (24).
1) A central magnetic yoke (25) made of a magnetic film connected to
and forming a side magnetic yoke (31) on the outer periphery, and after depositing an insulating layer (32) on the thin film coil (24), the central magnetic yoke (25) and the side magnetic yoke (31), The insulating layer (32) is connected to the central magnetic yoke (25).
) and side magnetic yokes (31) are flattened to expose the central magnetic yoke (25) and side magnetic yokes (31).
) is exposed on the insulating layer (32), a magnetic flux return magnetic yoke (33) made of magnetic ferrite is bonded, and then the lower surface of the non-magnetic substrate (22) is flattened to make it a thin layer. ) A method for manufacturing a perpendicular thin film magnetic head, the method comprising the step of forming a vertical thin film magnetic head.