JPH0466306B2 - - Google Patents

Info

Publication number
JPH0466306B2
JPH0466306B2 JP5343587A JP5343587A JPH0466306B2 JP H0466306 B2 JPH0466306 B2 JP H0466306B2 JP 5343587 A JP5343587 A JP 5343587A JP 5343587 A JP5343587 A JP 5343587A JP H0466306 B2 JPH0466306 B2 JP H0466306B2
Authority
JP
Japan
Prior art keywords
suction cup
units
suction
manifold
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5343587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63218834A (ja
Inventor
Kiichi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP5343587A priority Critical patent/JPS63218834A/ja
Publication of JPS63218834A publication Critical patent/JPS63218834A/ja
Publication of JPH0466306B2 publication Critical patent/JPH0466306B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP5343587A 1987-03-09 1987-03-09 走査型吸着盤における漏れ検出装置 Granted JPS63218834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5343587A JPS63218834A (ja) 1987-03-09 1987-03-09 走査型吸着盤における漏れ検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5343587A JPS63218834A (ja) 1987-03-09 1987-03-09 走査型吸着盤における漏れ検出装置

Publications (2)

Publication Number Publication Date
JPS63218834A JPS63218834A (ja) 1988-09-12
JPH0466306B2 true JPH0466306B2 (it) 1992-10-22

Family

ID=12942766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5343587A Granted JPS63218834A (ja) 1987-03-09 1987-03-09 走査型吸着盤における漏れ検出装置

Country Status (1)

Country Link
JP (1) JPS63218834A (it)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6042154B2 (ja) * 1983-03-29 1985-09-20 工業技術院長 吸着装置

Also Published As

Publication number Publication date
JPS63218834A (ja) 1988-09-12

Similar Documents

Publication Publication Date Title
JP3286535B2 (ja) 真空弁制御装置
US4565090A (en) Detection device for detecting and indicating operation of a gas meter
CA2298205A1 (en) Low leakage air valve for variable air intake system
JPS6374593A (ja) 過負荷保護装置
EP0892204A3 (en) Improved diaphragm valve with leak detection
JPS6015828B2 (ja) ダイヤフラム弁
JPH0466306B2 (it)
US4342225A (en) Device for the internal inspection of pipelines
JPH03279061A (ja) 車輪の回転速度検出装置
JPH06506750A (ja) 斜板式ポンプ
JP2001082836A5 (it)
US5279251A (en) Bidirectional pipeline pig signaling device
CN212672542U (zh) 一种夹管阀工作状态检测装置
JP3097832B2 (ja) 開閉弁の開閉検出装置
JPH0828711A (ja) グランドパッキングシール診断装置
JP3777313B2 (ja) 可変吸気装置におけるロータリーバルブのシール構造
JPS63221984A (ja) 走査型吸着盤
JP3383888B2 (ja) ウォータポンプ構造
JP2547749Y2 (ja) ダクト内の検測口装置
JPS58169015A (ja) パイプラインの肉厚測定用ピグ
JPS5928122Y2 (ja) エンジンのエアクリ−ナ故障検知装置
JP2544058Y2 (ja) 真空圧回路の漏洩検出装置
JPH0527741Y2 (it)
JPH0730931Y2 (ja) ガスエンジン用ガス圧力検出装置
JPS6123511B2 (it)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term