JPH0466581U - - Google Patents
Info
- Publication number
- JPH0466581U JPH0466581U JP11045790U JP11045790U JPH0466581U JP H0466581 U JPH0466581 U JP H0466581U JP 11045790 U JP11045790 U JP 11045790U JP 11045790 U JP11045790 U JP 11045790U JP H0466581 U JPH0466581 U JP H0466581U
- Authority
- JP
- Japan
- Prior art keywords
- strain gauge
- ceramic substrate
- cantilever
- acceleration sensor
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
Description
第１図は加速度センサ部の平面図、第２図はカ
バー密閉前の第１図Ａ−Ａ線に沿つた断面図、第
３図は第１図Ｂ−Ｂ線に沿つた断面図、第４図は
切断加工前のラミネート基板の平面図、第５図は
第４図Ｃ−Ｃ線に沿つた断面図である。
１……ステム、２……セラミツク基板、６……
処理回路部、７……加速度センサ部、８……カン
チレバー、９……ひずみゲージ、１１……重り部
。
Figure 1 is a plan view of the acceleration sensor section, Figure 2 is a sectional view taken along the line A-A in Figure 1 before the cover is sealed, Figure 3 is a sectional view taken along the line B-B in Figure 1, and Figure 3 is a sectional view taken along the line B-B in Figure 1. FIG. 4 is a plan view of the laminate substrate before cutting, and FIG. 5 is a sectional view taken along line CC in FIG. 4. 1... Stem, 2... Ceramic substrate, 6...
Processing circuit section, 7... Acceleration sensor section, 8... Cantilever, 9... Strain gauge, 11... Weight section.
Claims (1)
けられた振動を感知するカンチレバーと、前記セ
ラミツク基板上に設けられ、前記カンチレバーに
配置されたひずみゲージおよび該ひずみゲージの
検出信号を処理する回路とを具備する加速度セン
サ。 A cantilever made of a ceramic substrate and provided with a weight portion at the tip for sensing vibrations, a strain gauge provided on the ceramic substrate and arranged on the cantilever, and a circuit for processing a detection signal of the strain gauge. Equipped with an acceleration sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990110457U JP2551281Y2 (en) | 1990-10-22 | 1990-10-22 | Acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990110457U JP2551281Y2 (en) | 1990-10-22 | 1990-10-22 | Acceleration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0466581U true JPH0466581U (en) | 1992-06-11 |
| JP2551281Y2 JP2551281Y2 (en) | 1997-10-22 |
Family
ID=31857798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990110457U Expired - Lifetime JP2551281Y2 (en) | 1990-10-22 | 1990-10-22 | Acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2551281Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3091972U (en) * | 2002-08-07 | 2003-02-21 | 株式会社慶洋エンジニアリング | Vehicle article support |
-
1990
- 1990-10-22 JP JP1990110457U patent/JP2551281Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3091972U (en) * | 2002-08-07 | 2003-02-21 | 株式会社慶洋エンジニアリング | Vehicle article support |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2551281Y2 (en) | 1997-10-22 |