JPH046797B2 - - Google Patents

Info

Publication number
JPH046797B2
JPH046797B2 JP59090377A JP9037784A JPH046797B2 JP H046797 B2 JPH046797 B2 JP H046797B2 JP 59090377 A JP59090377 A JP 59090377A JP 9037784 A JP9037784 A JP 9037784A JP H046797 B2 JPH046797 B2 JP H046797B2
Authority
JP
Japan
Prior art keywords
tank
case
reticle
cleaning
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59090377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60234985A (ja
Inventor
Yoji Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP9037784A priority Critical patent/JPS60234985A/ja
Publication of JPS60234985A publication Critical patent/JPS60234985A/ja
Publication of JPH046797B2 publication Critical patent/JPH046797B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP9037784A 1984-05-07 1984-05-07 レチクルケ−スの洗浄装置 Granted JPS60234985A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9037784A JPS60234985A (ja) 1984-05-07 1984-05-07 レチクルケ−スの洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9037784A JPS60234985A (ja) 1984-05-07 1984-05-07 レチクルケ−スの洗浄装置

Publications (2)

Publication Number Publication Date
JPS60234985A JPS60234985A (ja) 1985-11-21
JPH046797B2 true JPH046797B2 (2) 1992-02-06

Family

ID=13996873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9037784A Granted JPS60234985A (ja) 1984-05-07 1984-05-07 レチクルケ−スの洗浄装置

Country Status (1)

Country Link
JP (1) JPS60234985A (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2665343B2 (ja) * 1988-02-16 1997-10-22 株式会社日立製作所 印刷回路板の洗浄方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125369A (ja) * 1974-08-27 1976-03-01 New Nippon Electric Co Senjosochi
JPS5163562A (ja) * 1974-11-29 1976-06-02 Daikin Ind Ltd Senjosochi

Also Published As

Publication number Publication date
JPS60234985A (ja) 1985-11-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term