JPS60234985A - レチクルケ−スの洗浄装置 - Google Patents

レチクルケ−スの洗浄装置

Info

Publication number: JPS60234985A
Authority: JP; Japan
Prior art keywords: case; reticle; bucket; shower; encasing
Prior art date: 1984-05-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP9037784A

Other languages

English (en)

Japanese (ja)

Other versions

JPH046797B2 (2

Inventor

Yoji Yamanaka

山中　洋示

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NEC Corp

Original Assignee

NEC Corp

Nippon Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-05-07

Filing date

1984-05-07

Publication date

1985-11-21

1984-05-07 Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp

1984-05-07 Priority to JP9037784A priority Critical patent/JPS60234985A/ja

1985-11-21 Publication of JPS60234985A publication Critical patent/JPS60234985A/ja

1992-02-06 Publication of JPH046797B2 publication Critical patent/JPH046797B2/ja

Status Granted legal-status Critical Current

Links

238000005406 washing Methods 0.000 title abstract description 7
230000003068 static effect Effects 0.000 claims abstract description 5
238000004140 cleaning Methods 0.000 claims description 10
238000000034 method Methods 0.000 claims description 6
230000005611 electricity Effects 0.000 claims description 3
238000004506 ultrasonic cleaning Methods 0.000 claims description 3
238000001259 photo etching Methods 0.000 claims description 2
238000001035 drying Methods 0.000 claims 1
238000005507 spraying Methods 0.000 claims 1
239000000428 dust Substances 0.000 abstract description 5
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 4
239000007789 gas Substances 0.000 abstract description 2
229910052757 nitrogen Inorganic materials 0.000 abstract description 2
238000001694 spray drying Methods 0.000 abstract description 2
230000008021 deposition Effects 0.000 abstract 1
238000007599 discharging Methods 0.000 abstract 1
238000005530 etching Methods 0.000 abstract 1
239000003960 organic solvent Substances 0.000 abstract 1
238000003860 storage Methods 0.000 description 5
230000000694 effects Effects 0.000 description 4
239000007788 liquid Substances 0.000 description 4
239000004065 semiconductor Substances 0.000 description 4
ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
230000007547 defect Effects 0.000 description 3
238000010586 diagram Methods 0.000 description 3
230000003287 optical effect Effects 0.000 description 2
235000012431 wafers Nutrition 0.000 description 2
LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
238000007664 blowing Methods 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
235000015927 pasta Nutrition 0.000 description 1
238000000206 photolithography Methods 0.000 description 1
230000002250 progressing effect Effects 0.000 description 1
238000012827 research and development Methods 0.000 description 1
230000009291 secondary effect Effects 0.000 description 1

Landscapes

Cleaning In General (AREA)
Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

JP9037784A 1984-05-07 1984-05-07 レチクルケ−スの洗浄装置 Granted JPS60234985A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP9037784A JPS60234985A (ja)	1984-05-07	1984-05-07	レチクルケ−スの洗浄装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP9037784A JPS60234985A (ja)	1984-05-07	1984-05-07	レチクルケ−スの洗浄装置

Publications (2)

Publication Number	Publication Date
JPS60234985A true JPS60234985A (ja)	1985-11-21
JPH046797B2 JPH046797B2 (2)	1992-02-06

Family

ID=13996873

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP9037784A Granted JPS60234985A (ja)	1984-05-07	1984-05-07	レチクルケ−スの洗浄装置

Country Status (1)

Country	Link
JP (1)	JPS60234985A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01207181A (ja) *	1988-02-16	1989-08-21	Hitachi Ltd	印刷回路板の洗浄方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5125369A (ja) *	1974-08-27	1976-03-01	New Nippon Electric Co	Senjosochi
JPS5163562A (ja) *	1974-11-29	1976-06-02	Daikin Ind Ltd	Senjosochi

1984
- 1984-05-07 JP JP9037784A patent/JPS60234985A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5125369A (ja) *	1974-08-27	1976-03-01	New Nippon Electric Co	Senjosochi
JPS5163562A (ja) *	1974-11-29	1976-06-02	Daikin Ind Ltd	Senjosochi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01207181A (ja) *	1988-02-16	1989-08-21	Hitachi Ltd	印刷回路板の洗浄方法

Also Published As

Publication number	Publication date
JPH046797B2 (2)	1992-02-06

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Legal Events

Date	Code	Title	Description
2004-05-07	EXPY	Cancellation because of completion of term