JPH0468540U - - Google Patents
Info
- Publication number
- JPH0468540U JPH0468540U JP1990112452U JP11245290U JPH0468540U JP H0468540 U JPH0468540 U JP H0468540U JP 1990112452 U JP1990112452 U JP 1990112452U JP 11245290 U JP11245290 U JP 11245290U JP H0468540 U JPH0468540 U JP H0468540U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- columns
- loading jig
- wafer loading
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図ａ，ｂは本考案の一実施例を示す平面図
及び正面図、第２図ａ，ｂは従来のウエーハ装填
治具の平面図及び正面図である。
１，２，３，４……支柱、５……支持体、６…
…半導体ウエーハ、７……支柱間支持体。
1A and 1B are a plan view and a front view showing an embodiment of the present invention, and FIGS. 2A and 2B are a plan view and a front view of a conventional wafer loading jig. 1, 2, 3, 4... Support column, 5... Support body, 6...
...Semiconductor wafer, 7... Inter-pillar support.
Claims (1)
の２対の支柱と、前記各支柱の側面より内側に向
けて突出した支持体を有する半導体ウエーハ装填
治具において、対をなす前記支柱の左右の間の間
隔がいずれも収納する半導体ウエーハの直径より
も僅か広く設定されていることを特徴とする半導
体ウエーハ装填治具。 In a semiconductor wafer loading jig having two pairs of front and rear columns that are symmetrical and parallel to each other, and a support that protrudes inward from the side surface of each column, the left and right columns of the pair of columns are A semiconductor wafer loading jig characterized in that the intervals between the two are set slightly wider than the diameter of the semiconductor wafer to be stored.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990112452U JPH0468540U (en) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990112452U JPH0468540U (en) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0468540U true JPH0468540U (en) | 1992-06-17 |
Family
ID=31859953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990112452U Pending JPH0468540U (en) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0468540U (en) |
-
1990
- 1990-10-25 JP JP1990112452U patent/JPH0468540U/ja active Pending
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