JPH0469457U - - Google Patents

Info

Publication number
JPH0469457U
JPH0469457U JP11253390U JP11253390U JPH0469457U JP H0469457 U JPH0469457 U JP H0469457U JP 11253390 U JP11253390 U JP 11253390U JP 11253390 U JP11253390 U JP 11253390U JP H0469457 U JPH0469457 U JP H0469457U
Authority
JP
Japan
Prior art keywords
substrate
holding jig
forming mask
permanent magnet
substrate holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11253390U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11253390U priority Critical patent/JPH0469457U/ja
Publication of JPH0469457U publication Critical patent/JPH0469457U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案に係わる成膜マスクの要部断面
図、第２図は第１図に示す成膜マスクの平面図、
第３図は比較検討用成膜マスクの要部断面図、第
４図は第３図に示す比較検討用成膜マスクの平面
図、第５図は従来の成膜マスクの断面図である。 １，１１，２１……基板押え治具（センターマス
ク）、２，１２……円板部、３，１３……凸部、
４，１４……永久磁石、２２……基板、２３……
基板ホルダー、２４……固定治具。

Claims (1)

  1. 【実用新案登録請求の範囲】 機能性膜を基板に成膜するプロセスで用いられ
    る、基板ホルダーと、永久磁石を有し前記基板を
    前記基板ホルダーに押圧する基板押え治具と、前
    記基板押え治具の永久磁石に吸引される固定治具
    とを備えた成膜マスクにおいて、 前記基板押え治具は永久磁石を３以上の複数、
    隣接して埋設したことを特徴とする成膜マスク。
JP11253390U 1990-10-26 1990-10-26 Pending JPH0469457U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11253390U JPH0469457U (ja) 1990-10-26 1990-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11253390U JPH0469457U (ja) 1990-10-26 1990-10-26

Publications (1)

Publication Number Publication Date
JPH0469457U true JPH0469457U (ja) 1992-06-19

Family

ID=31860042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11253390U Pending JPH0469457U (ja) 1990-10-26 1990-10-26

Country Status (1)

Country Link
JP (1) JPH0469457U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238465B2 (ja) * 1980-01-30 1990-08-30 Fuiritsupusu Furuuiranpenfuaburiken Nv

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238465B2 (ja) * 1980-01-30 1990-08-30 Fuiritsupusu Furuuiranpenfuaburiken Nv

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