JPH0469558A - Goniometer in x-ray analysis apparatus - Google Patents

Abstract

PURPOSE:To eliminate such inconvenience that the apparatus is intricate by driving the respective driving shafts of a sample or spectral crystal and X-ray detector directly by respective motors. CONSTITUTION:A revolving shaft 16 revolves when a rotating body 10a is rotated by a motor control system and, therefore, the sample 9 turns in an arbitrary direction. On the other hand, an arm 22 turns together with a disk 14b when a rotating body 10b is rotated by supplying pulse signals to a motor 7 and, therefore, the X-ray detector 23 turns in an arbitrary direction. The diffraction X-rays from the sample 19 can be detected by the detector 23 while Bragg diffraction conditions are satisfied if the respective motor rotating bodies 10a, 10b are rotated in the same direction and 10b is rotated at the rotating speed twice higher than the rotating speed of 10a. This goniometer is so constituted that the rotating bodies are directly rotated by the motors in such a manner and, therefore, the construction is simplified and the analysis accuracy is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement of a goniometer in an X-ray analysis device such as an X-ray diffraction device.

[Prior Art] As shown in FIG. 2, the goniometer of such an X-ray diffraction apparatus has an X-ray source 2 and an In addition to arranging the light receiving slit 4 of the detector 3, the sample 1 and the X-ray detector 3 (light receiving slit 4) are arranged at a ratio of 1:2 with the X-ray source fixed in order to satisfy Bragg's diffraction conditions. Devices configured to rotate are known.

However, as a drive mechanism for the sample and the X-ray detector, a structure in which a worm gear and a worm are used to reduce the rotational force from a motor is generally widely used.

[Problems to be Solved by the Invention] The structure using the worm gear and the worm as described above has the following problems.

■ Because gear backlash occurs, a spring must be incorporated to prevent backlash, making the structure complicated.

■ Since lubricants such as oil and grease are required, a cover to prevent scattering is required, and these must be replenished periodically, making handling extremely troublesome.

■ It is necessary to prevent gear noise and vibration.

■ Because the gear ratio (1/360) increases,
When rapidly moving a line detector, there is a limit to the rotation speed.

■ Due to the structure, the motor protrudes outside the goniometer body, making the entire device larger.

Therefore, an object of the present invention is to provide a device that can solve this problem.

[Means for Solving the Problem] In order to achieve the above object, the goniometer in the X-ray analyzer of the present invention is a goniometer in which the X-ray detector is rotated around the rotation center of the sample or the spectroscopic crystal. The present invention is characterized in that each drive shaft of the sample or the spectroscopic crystal and the X-ray detector is directly driven by a motor.

Hereinafter, embodiments of the present invention will be explained in detail based on the drawings.

[Example] FIG. 1 is a schematic diagram showing an embodiment of the present invention.

In the figure, 5 is a goniometer main body, and 6 and 7 are motors made of, for example, induction motors, and these motors are each coaxially fixed to the main body 5. Further, each motor has a cylindrical fixed part 8a, 8b fixed to the main body 5, and a bearing 9a on the outer periphery of this fixed part.

A bottomed cylindrical rotating body 1 rotatably arranged via 9b.
0a, 10b and the stator core 11 fixed to the fixed part
a, 11b and rotor core 1.2a fixed to the rotating body
, 12b.

Further, openings 13a and 13b are formed at the center of the bottom of the rotating body. 14a and 14b are rotating bodies 10a and 1, respectively.
It is a disk fixed at 0b. Incidentally, although not shown, a rotary encoder for position detection for controlling the positioning and rotational speed of the rotary body is incorporated in the cylinders 15a and 15b provided in the opening of the rotary body.

Reference numeral 16 denotes a hollow rotating shaft that is loosely fitted into the openings 13a and 13b of each motor 6.7, and this rotating shaft is arranged coaxially with the rotation center of each motor (the center of the rotating bodies 10a and 10b). ing. Further, one end of this rotating shaft is fixed to a disc 14a of the motor 6, and the other end is fixed to a disc 14a of the motor 7.
It is rotatably supported by a bearing 17 provided at b. 18
is a sample stage fitted to the tip of this rotating shaft, on which the sample 19 is held. Reference numeral 20 denotes a rod rotatably supported inside the rotating shaft 16, and a male screw portion 21 formed at the tip thereof is screwed onto the sample stage 18 and tightened to fix the sample stage to the rotating shaft. It is something. 22 is an arm for fixing the X-ray detector 23 to the disc 14b of the motor 4.

24a and 24b are electromagnetic brakes, and each of the motors 6.7
gears 26a, 26b, 27a by stopping power to solenoids 25a, 25b in conjunction with stopping power to the control circuit (not shown).

The brake clamp 2 is connected to each rotating body 10a, 10b of the motor 6°7 via the shaft 27b and the shafts 28g, 28b.
9a, 29b and amateur 30a.

30b are pressed and brought into close contact with each other to lock the movement of each motor (rotating body). Each of the above amateurs 3
0a and 30b are constantly pressed toward the brake clamps 29a and 29b by springs 31a and 31b, and are also connected to a guide bin 32a.

32b so as to be slidable along the axes of the shafts 28a and 28b.

In such a configuration, if the rotating body 10a is rotated by a motor control system not shown, the rotating shaft 1 is rotated through the disk 14a.
6 rotates, the sample 19 rotates in both directions around the axis of the rotation shaft. On the other hand, if a pulse signal is similarly supplied to the motor 7 to rotate the rotating body 10b, the disc 14b
Since the arm 22 rotates at the same time, the X-ray detector 23 rotates in an arbitrary direction about the axis of the rotating shaft. Therefore,
If the rotational directions of the rotating bodies 10a and 10b of each motor are rotated in the same direction, and 10b is rotated at twice the rotational speed of 10a, the diffraction from the sample 19 can be achieved while satisfying Bragg's diffraction condition. XfjI can be detected by the X-ray detector 23. At this time, each electromagnetic brake 24
The treids of a and 24b are energized, and the amateur 30a,
30b is attracted and separated from the brake clamps 29a and 29b.

It should be noted that the above description is an example of the present invention, and many modifications can be made in implementing the present invention. For example, in the above embodiment, X
Although it has been described that the line detector is rotated at twice the rotation angle relative to the sample, it goes without saying that this is not the case in thin film measurements and the like.

In addition, in the above embodiment, the electromagnetic brake is placed away from the rotation center of each motor, but the electromagnetic brake is placed concentrically with the rotation center of each motor, and the electromagnetic brake armature is not limited to this. 30a and 30b are the rotating body 10a of the direct motor.

It may be pressed and brought into close contact with the side surface of 10b.

Further, in the above embodiments, the case where the present invention is applied to a goniometer of an X-ray diffraction apparatus is described, but the present invention can be similarly applied to a goniometer of a fluorescent X-ray analyzer. In this case, the sample is fixed, a spectroscopic crystal for dispersing characteristic X-rays from the sample is placed at the rotation center of the goniometer, and the X-ray detector is rotated at the rotation speed of the spectroscopic crystal with this spectroscopic crystal as the center. It is configured to rotate at twice the rotation speed.

[Effects] As detailed above, according to the present invention, the drive mechanism of the goniometer is configured to be directly rotated by the motor without using a worm and a worm gear as in the conventional case. This eliminates the need for a spring, which simplifies the structure, improves mechanical transmission accuracy, and improves analysis accuracy. Also, since no lubricant is required,
There is no need to maintain or cover the supply, making handling extremely easy. Furthermore, since the rotation speed can be adjusted arbitrarily, fast forwarding of the sample and the X-ray detector can be easily performed. Furthermore, there is no need to take measures against noise and vibration, and the motor can be incorporated into the goniometer body, making it possible to downsize the entire device.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a diagram for explaining a conventional X-ray diffraction apparatus. 1: Sample 2: X-ray source 3.23: X-ray detector 4: Light receiving slit 5: Goniometer body 6.7: Motor 8g, 8b: Fixed parts 9a, 9b, 17: Bearings 10a, 10b: Rotating body 11a, llb Nisteeta coils 12a, 12b: Rotor coils 13a, 13b: Openings 14a, 14b: Disc 16: Rotating shaft 18: Sample stage 19: Sample 20: Rod 22: Arms 24a, 24b: Electronic brakes 25a, 25b: Solenoid 26a, 26b, 27a, 27b: Gears 28a, 28
b: Axis 29a, 29b brake clamp 30a, 30b: armature 31a, 31b spring

Claims (1)

[Claims] In a goniometer in which an X-ray detector is rotated around the rotation center of a sample or a spectroscopic crystal, each drive shaft of the sample or spectroscopic crystal and the X-ray detector is directly driven by a motor. A goniometer in an X-ray analyzer characterized by: