JPH0469846U - - Google Patents

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Publication number
JPH0469846U
JPH0469846U JP11325190U JP11325190U JPH0469846U JP H0469846 U JPH0469846 U JP H0469846U JP 11325190 U JP11325190 U JP 11325190U JP 11325190 U JP11325190 U JP 11325190U JP H0469846 U JPH0469846 U JP H0469846U
Authority
JP
Japan
Prior art keywords
plasma
cone
mass
tip
mass filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11325190U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11325190U priority Critical patent/JPH0469846U/ja
Publication of JPH0469846U publication Critical patent/JPH0469846U/ja
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来技術を使用した装置の概略断面図
、第２図は本考案を説明する断面図、第３図は筒
体の例を示した斜視図である。 １……プラズマトーチ、２……サンプリングコ
ーン、３……スキマーコーン、４……プラズマ、
５……イオンビーム、６……イオン光学系、７…
…質量フイルタ、８……検出器、９……真空ポン
プ、１０……真空容器、１１……ビス、１２……
Ｏリング、１４……筒体、３２……サンプリング
コーン支持体、３３……スキマーコーン支持体、
３５……サンプリングコーン筒体、３６……スキ
マーコーン筒体。 FIG. 1 is a schematic sectional view of a device using the prior art, FIG. 2 is a sectional view illustrating the present invention, and FIG. 3 is a perspective view showing an example of a cylindrical body. 1... Plasma torch, 2... Sampling cone, 3... Skimmer cone, 4... Plasma,
5...Ion beam, 6...Ion optical system, 7...
... Mass filter, 8 ... Detector, 9 ... Vacuum pump, 10 ... Vacuum container, 11 ... Screw, 12 ...
O-ring, 14... Cylinder, 32... Sampling cone support, 33... Skimmer cone support,
35... Sampling cone cylinder, 36... Skimmer cone cylinder.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 微量元素の同定および定量を行う試料溶液をプ
ラズマ化させるプラズマトーチと、前記プラズマ
を真空内に導入してイオンビームにする先端の孔
を開いた構造のサンプリングコーンおよびスキマ
ーコーンと、前記イオンビームの質量分離を行う
質量フイルタと、前記スキマーコーンを通過した
イオンビームを効率良く前記質量フイルタに導く
ためのイオン光学系と、前記質量フイルタを通過
したイオンを検出する検出器を持つ誘導結合プラ
ズマ質量分析装置において、前記サンプリングコ
ーンあるいはスキマーコーンが、先端が円錐状の
形状をしている支持体が前記支持体の先端で所定
の内径及び所定の深さの孔の開いた筒体を支持し
ている構造としたことを特徴とした誘導結合プラ
ズマ質量分析装置。 A plasma torch that converts a sample solution into plasma for identifying and quantifying trace elements, a sampling cone and a skimmer cone each having a hole in the tip that introduces the plasma into a vacuum and converts it into an ion beam; Inductively coupled plasma mass spectrometry that includes a mass filter that performs mass separation, an ion optical system that efficiently guides the ion beam that has passed through the skimmer cone to the mass filter, and a detector that detects the ions that have passed through the mass filter. In the apparatus, the sampling cone or the skimmer cone has a support having a conical tip supporting a cylindrical body having a hole with a predetermined inner diameter and a predetermined depth at the tip of the support. An inductively coupled plasma mass spectrometer characterized by its structure.
JP11325190U 1990-10-29 1990-10-29 Pending JPH0469846U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11325190U JPH0469846U (en) 1990-10-29 1990-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11325190U JPH0469846U (en) 1990-10-29 1990-10-29

Publications (1)

Publication Number Publication Date
JPH0469846U true JPH0469846U (en) 1992-06-19

Family

ID=31860815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11325190U Pending JPH0469846U (en) 1990-10-29 1990-10-29

Country Status (1)

Country Link
JP (1) JPH0469846U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125903A (en) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol Metal-ceramic composite smpler and skimmer
CN113228227A (en) * 2018-10-24 2021-08-06 珀金埃尔默健康科学加拿大股份有限公司 Mass spectrometer sampling cone and interface and method of sealing same to each other

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125903A (en) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol Metal-ceramic composite smpler and skimmer
CN113228227A (en) * 2018-10-24 2021-08-06 珀金埃尔默健康科学加拿大股份有限公司 Mass spectrometer sampling cone and interface and method of sealing same to each other
JP2022505898A (en) * 2018-10-24 2022-01-14 パーキンエルマー・ヘルス・サイエンシーズ・カナダ・インコーポレイテッド Mass spectrometer sampler cones and interfaces, and how to seal them together

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