JPH03100353U - - Google Patents
Info
- Publication number
- JPH03100353U JPH03100353U JP766990U JP766990U JPH03100353U JP H03100353 U JPH03100353 U JP H03100353U JP 766990 U JP766990 U JP 766990U JP 766990 U JP766990 U JP 766990U JP H03100353 U JPH03100353 U JP H03100353U
- Authority
- JP
- Japan
- Prior art keywords
- mass filter
- quadrupole mass
- terminal
- leaf spring
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の要部構成断面図であり
、第２図は従来例の構成説明図、第３図は四重極
マスフイルタの従来例構成断面図である。
１……プラズマトーチ、２，２２，２４……流
量制御部、３……アルゴンガス供給源、４……試
料槽、４′……試料ガス導入口、５……ネブライ
ザ、６……高周波誘導コイル、７……高周波誘導
結合プラズマ、８……ノズル、９……スキマー、
１１……フオアチヤンバー、１３……センターチ
ヤンバー、１６……マスフイルタ、１７……リア
チヤンバー、２０……信号処理部、２１……円筒
状のホルダー、２２……四重極マスフイルタのロ
ツド（棒状部材）、２３……セラミツクホルダー
、２４……ネジ穴、２５，２５′……端子、２６
……絶縁物、２７……板バネ、２８……四重極マ
スフイルタコンタクト、２９……固定用プレート
、３０……固定用ネジ。
FIG. 1 is a sectional view of the main part of the embodiment of the present invention, FIG. 2 is an explanatory view of the structure of a conventional example, and FIG. 3 is a sectional view of the structure of a conventional quadrupole mass filter. 1... Plasma torch, 2, 22, 24... Flow rate control unit, 3... Argon gas supply source, 4... Sample tank, 4'... Sample gas inlet, 5... Nebulizer, 6... High frequency induction Coil, 7... High frequency inductively coupled plasma, 8... Nozzle, 9... Skimmer,
11...Four chamber, 13...Center chamber, 16...Mass filter, 17...Rear chamber, 20...Signal processing unit, 21...Cylindrical holder, 22...Quadrupole mass filter rod (rod-shaped member) , 23... Ceramic holder, 24... Screw hole, 25, 25'... Terminal, 26
... Insulator, 27 ... Leaf spring, 28 ... Quadrupole mass filter contact, 29 ... Fixing plate, 30 ... Fixing screw.
Claims (1)
生じたイオンを真空中に導入し四重極マスフイル
タを通して質量分析計検出器に導いて検出するこ
とによつて試料中の被測定元素を分析する分析計
において、 前記四重極マスフイルタの中心部を形成する４
本のロツドと、該ロツドを支えるセラミツクホル
ダーと、駆動電圧が印加される端子と、該端子に
接続された板バネと、該板バネと接触するように
配設された四重極マスフイルタコンタクトと、前
記端子が絶縁物を介して固定された固定用プレー
トと、該固定用プレートが固定用ネジを介して固
定されると共に前記マスフイルタの外枠を形成す
る円筒状ホルダーとを具備し、前記ロツドに前記
板バネと四重極マスフイルタコンタクトを介して
前記端子から四重極マスフイルタの駆動用電圧を
印加することを特徴とする高周波誘導結合プラズ
マ質量分析計。[Claim for Utility Model Registration] The ions in the sample are excited by using high-frequency inductively coupled plasma, the resulting ions are introduced into a vacuum, guided through a quadrupole mass filter to a mass spectrometer detector, and detected. In an analyzer for analyzing elements to be measured, a quadrupole mass filter that forms the center of the
A book rod, a ceramic holder that supports the rod, a terminal to which a driving voltage is applied, a leaf spring connected to the terminal, and a quadrupole mass filter contact arranged to be in contact with the leaf spring. a fixing plate to which the terminal is fixed via an insulator; and a cylindrical holder to which the fixing plate is fixed via a fixing screw and forms an outer frame of the mass filter; A high frequency inductively coupled plasma mass spectrometer, characterized in that a voltage for driving a quadrupole mass filter is applied to the rod from the terminal through the leaf spring and the quadrupole mass filter contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766990U JPH03100353U (en) | 1990-01-30 | 1990-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP766990U JPH03100353U (en) | 1990-01-30 | 1990-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03100353U true JPH03100353U (en) | 1991-10-21 |
Family
ID=31511324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP766990U Pending JPH03100353U (en) | 1990-01-30 | 1990-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03100353U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07142026A (en) * | 1993-11-18 | 1995-06-02 | Shimadzu Corp | Quadrupole mass spectrometer |
| JPH1097838A (en) * | 1996-07-30 | 1998-04-14 | Yokogawa Analytical Syst Kk | Inductively coupled plasma mass spectrometer |
| JP2001351563A (en) * | 2000-06-07 | 2001-12-21 | Shimadzu Corp | Mass spectrometer |
| WO2019155543A1 (en) * | 2018-02-07 | 2019-08-15 | 株式会社島津製作所 | Mass spectrometry device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5894745A (en) * | 1981-11-30 | 1983-06-06 | Agency Of Ind Science & Technol | Multipole lens |
| JPS63155547A (en) * | 1986-12-18 | 1988-06-28 | Seiko Instr & Electronics Ltd | Analyzer tube for quadrupole mass analysis meter |
| JPS646352A (en) * | 1987-06-29 | 1989-01-10 | Yokogawa Electric Corp | High-frequency inductive coupling plasma mass spectrometer |
-
1990
- 1990-01-30 JP JP766990U patent/JPH03100353U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5894745A (en) * | 1981-11-30 | 1983-06-06 | Agency Of Ind Science & Technol | Multipole lens |
| JPS63155547A (en) * | 1986-12-18 | 1988-06-28 | Seiko Instr & Electronics Ltd | Analyzer tube for quadrupole mass analysis meter |
| JPS646352A (en) * | 1987-06-29 | 1989-01-10 | Yokogawa Electric Corp | High-frequency inductive coupling plasma mass spectrometer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07142026A (en) * | 1993-11-18 | 1995-06-02 | Shimadzu Corp | Quadrupole mass spectrometer |
| JPH1097838A (en) * | 1996-07-30 | 1998-04-14 | Yokogawa Analytical Syst Kk | Inductively coupled plasma mass spectrometer |
| JP2001351563A (en) * | 2000-06-07 | 2001-12-21 | Shimadzu Corp | Mass spectrometer |
| WO2019155543A1 (en) * | 2018-02-07 | 2019-08-15 | 株式会社島津製作所 | Mass spectrometry device |
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