JPH0471455B2 - - Google Patents
Info
- Publication number
- JPH0471455B2 JPH0471455B2 JP61291314A JP29131486A JPH0471455B2 JP H0471455 B2 JPH0471455 B2 JP H0471455B2 JP 61291314 A JP61291314 A JP 61291314A JP 29131486 A JP29131486 A JP 29131486A JP H0471455 B2 JPH0471455 B2 JP H0471455B2
- Authority
- JP
- Japan
- Prior art keywords
- sample fluid
- detection cell
- flow rate
- measurement
- particle size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 53
- 239000012530 fluid Substances 0.000 claims description 42
- 238000005259 measurement Methods 0.000 claims description 39
- 238000001514 detection method Methods 0.000 claims description 38
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 22
- 230000035945 sensitivity Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measuring Volume Flow (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、例えば半導体製造におけるウエハー
洗浄工程等において用いられる超純水とか、クリ
ーンルームにおける清浄空気とか、あるいは、高
純度試薬などの流体中に含まれる微粒子の粒径お
よび個数（粒子数濃度）を測定するための微粒子
カウンター、更に詳しくは、検出セルに対して照
射された光線の散乱光を検出することにより、そ
の検出セル内を通過流動する試料流体に含まれる
微粒子の粒径および個数を測定するように構成さ
れた所謂光散乱法による微粒子カウンターに関す
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to fluids such as ultrapure water used in wafer cleaning processes in semiconductor manufacturing, clean air in clean rooms, or high purity reagents. A particle counter for measuring the particle size and number of contained particles (particle number concentration); more specifically, by detecting the scattered light of the light beam irradiated to the detection cell, the flow rate passing through the detection cell is measured. The present invention relates to a particle counter using a so-called light scattering method, which is configured to measure the particle size and number of particles contained in a sample fluid.
従来のこの種の微粒子カウンターにおいては、
第３図に例示しているように、試料流体が通過流
動する検出セルＣと、その検出セルＣに対して光
線Ｒ（例えばHe−Neレーザー）を照射する光源
Ｌと、その照射光線Ｒの散乱光ｒを検出する検出
器Ｄと、その検出器Ｄによる光検出結果（パルス
波高およびパルス数）に基いて前記検出セルＣ内
を通過流動する試料流体に含まれる微粒子の粒径
および個数（粒子数濃度）を測定する信号処理回
路Ｓ等を設けて、光散乱法を用いて試料流体中の
微粒子の粒径および粒子数濃度の検出を行う測定
部Ｘが構成されると共に、入口Ｅから導入される
試料流体が、所定の値に固定的に設定された一定
流速で（一定流量ずつ）前記検出セルＣ内を通過
流動して、出口Ｏから排出されるように、前記検
出セルＣの下流側に定圧弁VVおよび流量計Ｑを
設けて試料流体流路Ｙが構成されていた。
In conventional particle counters of this type,
As illustrated in FIG. 3, there is a detection cell C through which a sample fluid flows, a light source L that irradiates the detection cell C with a light beam R (for example, a He-Ne laser), and a light source L that irradiates the detection cell C with a light beam R. A detector D detects the scattered light r, and the particle size and number ( A measuring section The detection cell C is configured such that the introduced sample fluid flows through the detection cell C at a constant flow rate fixedly set to a predetermined value (at a constant flow rate) and is discharged from the outlet O. A sample fluid flow path Y was configured by providing a constant pressure valve V V and a flow meter Q on the downstream side.
この種の微粒子カウンターにおいては、できる
だけ小さな粒径の微粒子の粒子数濃度をできるだ
け短い時間で測定できること、つまり、短時間高
感度測定が理想とされることは言うまでもない。
Needless to say, in this type of particle counter, it is ideal to be able to measure the particle number concentration of particles with the smallest possible particle size in the shortest possible time, that is, short-term, high-sensitivity measurement.
しかしながら、上記従来構成の微粒子カウンタ
ーにおいては、前述したように、検出セルＣ内を
通過流動する試料流体の流速を一定の値に固定的
に設定する構成とされていたために、その流速を
高く設定した場合には、測定時間を短くすること
はできるが測定感度が低くなつてしまい、一方、
その流速を低く設定した場合には、測定感度を高
くすることはできるが測定時間が長くかかつてし
まう、という二律背反的な問題があり、そのため
に、前記検出セルＣ内を通過流動する試料流体の
流速は、結局のところ、それほど高くも無く且つ
それほど低くも無い適当な（中途半端な）値に設
定せざるを得ず、従つて、高感度測定および短時
間測定という要求の何れをも充分には満足させる
ことができなかつた。 However, in the conventional particle counter described above, as described above, the flow rate of the sample fluid flowing through the detection cell C is fixedly set to a constant value, so the flow rate is set high. In this case, although it is possible to shorten the measurement time, the measurement sensitivity will decrease;
If the flow rate is set low, there is a trade-off problem in that although the measurement sensitivity can be increased, the measurement time will be long or slow. In the end, the flow velocity has to be set at an appropriate (half-way) value that is neither very high nor very low, and therefore cannot adequately meet both the demands for high sensitivity measurement and short time measurement. could not be satisfied.
しかるに、最近は、半導体素子の極端なマイク
ロ化等に伴つて、この種の微粒子カウンターの更
なる高感度化が強く要望されるに至つている。 However, recently, with the extreme miniaturization of semiconductor devices, there has been a strong demand for even higher sensitivity of this type of particle counter.
そこで、照射光線Ｒの散乱光ｒを検出するため
の検出器Ｄの感度を相対的に高めるために、より
波長が短くて且つパワーが大きい照射光線Ｒ（例
えばArイオンレーザー）を用いるという手段が
考えられるが、その場合には、極めて高価な光源
Ｌを使用しなければならない、という欠点が生じ
る。 Therefore, in order to relatively increase the sensitivity of the detector D for detecting the scattered light r of the irradiation light R, it is possible to use an irradiation light R with a shorter wavelength and higher power (for example, an Ar ion laser). Although this is conceivable, in that case, the drawback would be that an extremely expensive light source L would have to be used.
本発明は、上記従来実情に鑑みてなされたもの
であつて、その目的は、比較的簡素で安価な構成
で済む手段を用いながら、実用上において測定時
間の問題を生じることが無く、しかも、必要に応
じて従来よりも格段に高感度の測定を容易に行う
ことができる微粒子カウンターを提供せんとする
ことにある。 The present invention has been made in view of the above-mentioned conventional situation, and its purpose is to use a means that requires a relatively simple and inexpensive configuration, while eliminating the problem of measurement time in practical use. It is an object of the present invention to provide a particle counter that can easily carry out measurements with much higher sensitivity than conventional ones, if necessary.
上記目的を達成するために、本発明による微粒
子カウンターは、冒頭に記載したような基本的構
成を有するものにおいて、前記検出セルを通過す
る試料流体の流速を変化させることにより、前記
微粒子の粒径測定レンジを切り換え可能に構成し
てある、という特徴を備えている。
In order to achieve the above object, the particle counter according to the present invention has the basic configuration as described at the beginning, and the particle size of the particles is determined by changing the flow rate of the sample fluid passing through the detection cell. It has the feature that the measurement range can be switched.
かかる特徴構成により発揮される作用は次の通
りである。
The effects achieved by this characteristic configuration are as follows.
即ち、上記本発明による微粒子カウンターは、
例えば半導体製造において使用される超純水を試
料流体として測定を行う場合、測定開始後暫くの
過渡期間（試料流体供給後の立ち上がり時）に
は、その試料流体中に含まれる微粒子の粒径や微
粒子濃度が比較的大きく且つその状態が大幅に変
動するのが普通であるから、測定感度は比較的低
くても差支え無く、むしろ測定時間の短縮化が重
要であり、一方、試料流体供給開始からある程度
時間が経過して、その試料流体中に含まれる微粒
子の粒径や微粒子濃度が比較的小さくなると共に
その状態が大きく変化しなくなつた安定期間に
は、多少測定時間が長くかかつても差支え無い
が、できるだけ高い測定感度を得ることが極めて
重要となる、という実情に即した考察結果に鑑み
て開発されたものであつて、後述する実施例の記
載からもより一層明らかとなるように、検出セル
を通過する試料流体の流速を変化させ得るように
する、という非常に簡素で安価な構成で済む手段
を用いるだけでありながら、状況に応じて微粒子
の粒径測定レンジを大小に容易に且つ任意に切り
換え得て、非常に効率的で且つ的確な測定を行え
るようになつた。 That is, the particle counter according to the present invention has the following features:
For example, when measuring ultrapure water used in semiconductor manufacturing as a sample fluid, during a short transition period after the start of the measurement (starting up after supplying the sample fluid), the particle size of the particles contained in the sample fluid may change. Since the concentration of particulates is relatively large and its state fluctuates widely, there is no problem even if the measurement sensitivity is relatively low.In fact, it is important to shorten the measurement time. After a certain amount of time has passed, the measurement time may be slightly longer during a stable period when the particle size and concentration of particles contained in the sample fluid become relatively small and their conditions no longer change significantly. However, it was developed based on the consideration that it is extremely important to obtain as high a measurement sensitivity as possible, and as will become clearer from the description of the examples below, By simply changing the flow rate of the sample fluid passing through the detection cell, which requires a very simple and inexpensive configuration, it is possible to easily increase or decrease the particle size measurement range depending on the situation. Moreover, it has become possible to switch at will, making it possible to perform very efficient and accurate measurements.
つまり、測定感度が多少低くても実際上問題と
ならない測定開始後暫くの過渡期間（試料流体供
給後の立ち上がり時）には、検出セルを通過する
試料流体の流速を高く設定することによつて、非
常に短時間で所要の測定（大レンジ測定）を行う
ことができ、一方、測定時間が多少長くかかつて
も実際上問題とならない安定期間（試料流体供給
開始からある程度時間が経過した後）には、検出
セルを通過する試料流体の流速を低く設定するこ
とによつて、極めて高感度の測定（小レンジ測
定）を行うことができるのである。 In other words, during the transient period after the start of the measurement (at the time of start-up after supplying the sample fluid), when the measurement sensitivity is somewhat low, it does not pose a problem in practice, by setting the flow rate of the sample fluid passing through the detection cell high. , the required measurement (large range measurement) can be performed in a very short time, while the stable period (after a certain amount of time has elapsed from the start of sample fluid supply) during which the measurement time is somewhat long is not a practical problem. By setting the flow rate of the sample fluid passing through the detection cell low, extremely sensitive measurements (small range measurements) can be performed.
ちなみに、粒径が0.2μｍより小さい粒子からの
光の散乱はレーリー散乱領域と呼ばれ、その散乱
光の強度は粒径の略６乗に比例する。故に、粒径
が0.2μｍの粒子と0.1μｍの粒子とでは散乱光の強
度に64倍の開きがあり、これを同じＳ／Ｎ比とし
て得るためには照射光量を64の２乗倍（約4000
倍）に高める必要があり、現実的には極めて困難
であるのに対して、本発明による場合には、後記
する実施例中で詳細に説明しているように、検出
セルを通過する試料流体の流速に略逆比例した
Ｓ／Ｎ比が得られるため、実測によれば、試料流
体の流速を略1/32倍に低下させるという非常に容
易な手段によつて、測定粒子径を従前の1/2まで
向上させることができるようになつた。 Incidentally, the scattering of light from particles with a particle size smaller than 0.2 μm is called the Rayleigh scattering region, and the intensity of the scattered light is approximately proportional to the sixth power of the particle size. Therefore, there is a 64 times difference in the intensity of scattered light between particles with a particle size of 0.2 μm and particles with a particle size of 0.1 μm, and in order to obtain this same S/N ratio, the irradiation light amount must be multiplied by the square of 64 (approximately 4000
However, in the case of the present invention, as will be explained in detail in the examples below, the sample fluid passing through the detection cell According to actual measurements, it is possible to obtain an S/N ratio that is approximately inversely proportional to the flow rate of Now it is possible to improve it to 1/2.
以下、本発明の具体的な一実施例を図面（第１
図および第２図）に基いて説明する。
A specific embodiment of the present invention is shown in the drawings (first embodiment) below.
The explanation will be based on FIG.
第１図は本発明に係る微粒子カウンターの全体
概略構成を示し、図において、Ｘは、光散乱法を
用いて微粒子の粒径および粒子数濃度の検出を行
うように構成された測定部であつて、試料流体が
通過流動する検出セルＣと、その検出セルＣに対
して光線Ｒ（例えばHe−Neレーザー）を照射す
る光源Ｌと、その照射光源Ｒの散乱光ｒを検出す
る検出器Ｄと、その検出器Ｄによる光検出結果
（パルス波高およびパルス数）に基いて前記検出
セルＣ内を通過流動する試料流体に含まれる微粒
子の粒径および個数（粒子数濃度）を測定する信
号処理回路Ｓ等から構成され、また、Ｙは前記測
定部Ｘにおける検出セルＣへ試料流体を通過流動
させるための試料流体流路であつて、次のように
構成されている。 FIG. 1 shows the overall schematic configuration of a particle counter according to the present invention, and in the figure, X is a measuring section configured to detect the particle size and particle number concentration of particles using a light scattering method. A detection cell C through which a sample fluid flows, a light source L that irradiates the detection cell C with a light beam R (for example, a He-Ne laser), and a detector D that detects scattered light r of the irradiation light source R. and signal processing to measure the particle size and number (particle number concentration) of fine particles contained in the sample fluid flowing through the detection cell C based on the photodetection results (pulse height and pulse number) by the detector D. It is composed of a circuit S, etc., and Y is a sample fluid flow path for causing the sample fluid to flow through the detection cell C in the measurement section X, and is constructed as follows.
即ち、入口Ｅから導入された試料流体は、前記
検出セルＣおよびその検出セルＣを通過する試料
流体の流量を確認するための流量計Ｑを含むメイ
ン流路１（検出セルＣと流量計Ｑの接続順は図と
は逆でも可）と、前記メイン流路１への流量を微
調節するためのニードル弁VNを備えたバイパス
流路２とに分岐され、定流量弁VQの上流側にお
ける合流部３で合流した後、その定流量弁VQを
通過して出口Ｏから排出されるように構成されて
いる。そして、更に、前記定流量弁VQを通過す
る総流量を変化させること無く、前記検出セルＣ
を通過する試料流体の流量（つまり流速）を、複
数段（この例では大小２段）に、必要に応じて容
易に且つ任意に切り換えられるようにするため
に、次のような構成の流速切換手段Ｚが設けられ
ている。 That is, the sample fluid introduced from the inlet E passes through the main flow path 1 (detection cell C and flowmeter Q) including the detection cell C and a flowmeter Q for checking the flow rate of the sample fluid passing through the detection cell C. (The connection order can be reversed from the diagram) and a bypass flow path 2 equipped with a needle valve V N for finely adjusting the flow rate to the main flow path 1, which is connected upstream of the constant flow valve V Q. After merging at the merging section 3 on the side, the liquid is configured to pass through the constant flow valve VQ and be discharged from the outlet O. Furthermore, without changing the total flow rate passing through the constant flow valve VQ , the detection cell C
In order to easily and arbitrarily switch the flow rate (that is, the flow rate) of the sample fluid passing through the sample fluid into multiple stages (in this example, two stages, large and small) as needed, we have adopted a flow rate switching system with the following configuration. Means Z are provided.
この流速切換手段Ｚは、前記メイン流路１にお
ける検出セルＣおよび流量計Ｑの下流側に介装さ
れた流動抵抗の大きい第１キヤピラリーC1と、
同メイン流路１における前記第１キヤピラリー
C1の上流側から前記合流部３に至る分岐流路１
Ｂに介装され流動抵抗が第１キヤピラリーC1よ
りも大幅に小さい第２キヤピラリーC2と、前記
バイパス流路２におけるニードル弁VNの上流側
から前記合流部３に至る分岐流路２Ｂに介装され
流動抵抗が前記第２キヤピラリーC2と実質的
（分岐流路１Ｂおよび分岐流路２Ｂの流動抵抗を
含めてという意味）に同じ第３キヤピラリーC3
と、前記第２キヤピラリーC2を有する分岐流路
１Ｂと前記第３キヤピラリーC3を有する分岐流
路２Ｂとを択一的に開閉する３方切換弁Ｖとから
成り、その３方切換弁Ｖを切り換えることによ
り、前記定流量弁VQにより決定される一定の総
導入流量から前記ニードル弁VNを通過する一定
流量を差し引いた残りの一定流量の試料流体が、
前記第１キヤピラリーC1および第２キヤピラリ
ーC2を通過するように流動する状態〔即ち、前
記検出セルＣを通過する試料流体の流量（つまり
流速）を大きくする状態〕と、前記第１キヤピラ
リーC1および第３キヤピラリーC3を通過するよ
うに流動する状態〔即ち、前記検出セルＣを通過
する試料流体の流量（つまり流速）を小さくする
状態〕とに、容易かつ任意に切り換えられるよう
に構成されている。 This flow rate switching means Z includes a first capillary C 1 having a large flow resistance and installed downstream of the detection cell C and the flow meter Q in the main flow path 1 ;
The first capillary in the main flow path 1
Branch flow path 1 from the upstream side of C 1 to the merging section 3
A second capillary C 2 is interposed in the capillary B and has a flow resistance significantly lower than that of the first capillary C 1 , and a branch flow path 2 B from the upstream side of the needle valve V N in the bypass flow path 2 to the merging section 3 A third capillary C 3 is interposed and has substantially the same flow resistance as the second capillary C 2 (meaning including the flow resistance of the branch flow path 1B and the branch flow path 2B).
and a three-way switching valve V that selectively opens and closes the branch channel 1B having the second capillary C2 and the branch channel 2B having the third capillary C3. By switching the constant flow rate of the sample fluid remaining after subtracting the constant flow rate passing through the needle valve V N from the constant total introduced flow rate determined by the constant flow valve V Q ,
A state in which the sample fluid flows through the first capillary C 1 and the second capillary C 2 (i.e., a state in which the flow rate (i.e., flow velocity) of the sample fluid passing through the detection cell C is increased); and 1 and the third capillary C3 [i.e., a state in which the flow rate (i.e., flow velocity) of the sample fluid passing through the detection cell C is reduced] can be easily and arbitrarily switched. has been done.
第２図は、上記のように構成された微粒子カウ
ンターを用いて、前記検出セルＣを通過する試料
流体の流速ｖと所定流量（例えば１ml）の測定に
要する時間ｔとの関係を調べた結果、ならびに、
検出セルＣを通過する試料流体の流速ｖと検出器
Ｄからの相対出力ｈとの関係を種々の粒径ｄ（こ
の例では、0.500μｍ、0.212μｍ、0.109μｍ、
0.091μｍ）の微粒子について調べた結果を対数グ
ラフで表したものである。 Figure 2 shows the results of investigating the relationship between the flow rate v of the sample fluid passing through the detection cell C and the time t required to measure a predetermined flow rate (for example, 1 ml) using the particle counter configured as described above. , as well as
The relationship between the flow rate v of the sample fluid passing through the detection cell C and the relative output h from the detector D is expressed using various particle sizes d (in this example, 0.500 μm, 0.212 μm, 0.109 μm,
This is a logarithmic graph showing the results of an investigation on fine particles (0.091 μm).
即ち、二点鎖線で示す計測時間ラインＴから明
らかなように、所定流量の測定に要する時間ｔ
は、当然のことながら、検出セルＣを通過する試
料流体の流速ｖとは逆比例することが判り、ま
た、夫々の粒径ｄの微粒子についての相対出力ラ
インＨ…（夫々実線で示す）が全て前記計測時間
ラインＴに平行になつていることから、検出器Ｄ
からの相対出力ｈもまた、検出セルＣを通過する
試料流体の流速ｖとは逆比例していることが判
る。 That is, as is clear from the measurement time line T shown by the two-dot chain line, the time t required to measure the predetermined flow rate
As a matter of course, it turns out that is inversely proportional to the flow rate v of the sample fluid passing through the detection cell C, and the relative output line H... (respectively shown by a solid line) for each fine particle with a particle size d is Since all of them are parallel to the measurement time line T, the detector D
It can be seen that the relative power h from is also inversely proportional to the flow rate v of the sample fluid passing through the detection cell C.
従つて、例えば測定感度を２倍に高めようとす
る場合には、検出器Ｄからの出力ｈが同じ大きさ
で粒径が1/2の微粒子を検出できるようにすれば
よいから、グラフ中点線で例示しているように、
検出セルＣを通過する試料流体の流速ｖを実質的
に1/32倍に低下させることによつて、粒径測定レ
ンジを切り換え得るように、前記流速切換手段Ｚ
における第１キヤピラリーC1、第２キヤピラリ
ーC2および第３キヤピラリーC3を選定すればよ
い。 Therefore, if you want to double the measurement sensitivity, for example, you just need to make the output h from detector D detect particles with the same size and half the particle size, so the graph shows As illustrated by the dotted line,
The flow rate switching means Z is configured to switch the particle size measurement range by substantially reducing the flow rate v of the sample fluid passing through the detection cell C to 1/32 times.
What is necessary is to select the first capillary C 1 , the second capillary C 2 and the third capillary C 3 in .
なお、前記流速切換手段Ｚの構成は上記した実
施例のものに限定されるものでは無く、例えば、
検出セルと定圧弁とニードル弁を直列に接続し、
そのニードル弁による流量調節によつて、検出セ
ルを通過する試料流体の流速を変化させるという
単純な構成を採ることも可能である。 Note that the configuration of the flow rate switching means Z is not limited to that of the above-described embodiment, and for example,
Connect the detection cell, constant pressure valve, and needle valve in series,
It is also possible to adopt a simple configuration in which the flow rate of the sample fluid passing through the detection cell is changed by adjusting the flow rate using the needle valve.
また、前記定流量弁VQに代えて、定圧弁とニ
ードル弁の組み合わせを用いても差支え無い。 Further, in place of the constant flow valve VQ , a combination of a constant pressure valve and a needle valve may be used.
以上詳述したところから明らかなように、本発
明に係る微粒子カウンターによれば、検出セルを
通過する試料流体の流速を変化させ得るようにす
る、という非常に簡素で安価な構成で済む手段を
用いるだけでありながら、状況に応じて微粒子の
粒径測定レンジを大小に容易に且つ任意に切り換
え得るようになり、例えば、測定感度が多少低く
ても実際上問題とならない測定開始後暫くの過渡
期間（試料流体供給後の立ち上がり時）には、検
出セルを通過する試料流体の流速を高く設定する
ことによつて、非常に短時間で所要の測定（大レ
ンジ測定）を行うことができ、一方、測定時間が
多少長くかかつても実際上問題とならない安定期
間（試料流体供給開始からある程度時間が経過し
た後）には、検出セルを通過する試料流体の流速
を低く設定することによつて、極めて高感度の測
定（小レンジ測定）を行うことができるというよ
うに、実用上において測定時間の問題を生じるこ
と無く、しかも、必要に応じて従来よりも格段に
高感度の測定を効率的且つ的確に測定を行える、
という優れた効果が発揮されるに至つた。
As is clear from the detailed description above, the particle counter according to the present invention provides a means for changing the flow rate of the sample fluid passing through the detection cell, which requires a very simple and inexpensive configuration. Although it is only used, it is now possible to easily and arbitrarily switch the particle size measurement range of fine particles to large or small depending on the situation. By setting the flow rate of the sample fluid that passes through the detection cell at a high rate during the start-up period (starting up after supplying the sample fluid), the required measurement (large range measurement) can be performed in a very short time. On the other hand, during a stable period (after a certain amount of time has elapsed since the start of sample fluid supply) when the measurement time is somewhat long or is not a practical problem, the flow rate of the sample fluid passing through the detection cell may be set low. , it is possible to perform extremely high-sensitivity measurements (small range measurements), without causing measurement time problems in practical use, and when necessary, it is possible to perform measurements with much higher sensitivity than conventional methods. And it is possible to measure accurately.
This resulted in excellent effects.
第１図および第２図は本発明に係る微粒子カウ
ンターの具体的な一実施例を示し、第１図は全体
概略構成図、第２図は作用を説明するためのグラ
フである。また、第３図は本発明の技術的背景お
よび従来技術の問題点を説明するためのものであ
つて、従来構成の微粒子カウンターの全体概略構
成図を示している。
Ｃ……検出セル、Ｒ……照射光線、ｒ……散乱
光、Ｚ……流速切換手段。
FIGS. 1 and 2 show a specific embodiment of the particle counter according to the present invention, with FIG. 1 being a general schematic diagram and FIG. 2 being a graph for explaining the operation. Further, FIG. 3 is for explaining the technical background of the present invention and the problems of the prior art, and shows a schematic diagram of the overall configuration of a conventional particle counter. C...detection cell, R...irradiation light, r...scattered light, Z...flow rate switching means.
Claims (1)
検出することにより、その検出セル内を通過流動
する試料流体に含まれる微粒子の粒径および個数
を測定するように構成してある微粒子カウンター
において、 前記検出セルを通過する試料流体の流速を変化
させることにより、前記微粒子の粒径測定レンジ
を切り換え可能に構成してあることを特徴とする
微粒子カウンター。[Scope of Claims] 1. Constructed to measure the particle size and number of particles contained in a sample fluid flowing through the detection cell by detecting the scattered light of the light beam irradiated to the detection cell. What is claimed is: 1. A particle counter according to claim 1, characterized in that the particle size measurement range of the particles can be switched by changing the flow rate of the sample fluid passing through the detection cell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61291314A JPS63144235A (en) | 1986-12-05 | 1986-12-05 | Particle counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61291314A JPS63144235A (en) | 1986-12-05 | 1986-12-05 | Particle counter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63144235A JPS63144235A (en) | 1988-06-16 |
| JPH0471455B2 true JPH0471455B2 (en) | 1992-11-13 |
Family
ID=17767296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61291314A Granted JPS63144235A (en) | 1986-12-05 | 1986-12-05 | Particle counter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63144235A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3638807B2 (en) * | 1999-01-07 | 2005-04-13 | ミドリ安全株式会社 | Cigarette smoke particle measuring device |
| DE10343457C5 (en) * | 2003-09-19 | 2012-01-12 | Hydac Filtertechnik Gmbh | Device for particle measurement |
| JP5074934B2 (en) * | 2008-01-11 | 2012-11-14 | 積水化学工業株式会社 | Fine particle concentration measuring apparatus and fine particle concentration measuring method |
| JP2026056794A (en) * | 2024-09-20 | 2026-04-02 | 東京エレクトロン株式会社 | Particle measuring device, particle measuring system, and particle measuring method |
-
1986
- 1986-12-05 JP JP61291314A patent/JPS63144235A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63144235A (en) | 1988-06-16 |
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