JPH0472502A - Flatness measuring device - Google Patents

Abstract

PURPOSE:To measure the flatness of the original meaning in the arrangement concerned with a high accuracy by installing a sheet member to be measured with its one end face put in contact with the reference plane, pressing the other end face by one surface of a pressing member made of metal having a dia. larger than the sheet member, and by furnishing a plurality of distance measuring means on the other surface of the pressing member. CONSTITUTION:A gasket 1 made of a ring-shaped sheet to be measured is placed on the plane of a reference member 2, and a pressing member 5 having a dia. larger than the gasket 1 is installed on the oversurface of the gasket and pressed by springs 6a, 6b. Displacement sensors 10, 11, 12 of a contactless distance measuring means are arranged over this pressing member 5 to sense its displacement, and the flatness of the gasket 1 is calculated by a calculating part 15. Deformation of the gasket 1 being processed is removed by the forces of the springs 6a, 6b, and only the flatness of the original meaning in the arrangement is measured. Even though the dia. of the gasket 1 is small, its flatness can be measured accurately and automatically.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a device for measuring the flatness of a thin plate member, and in particular to a flatness measuring device that can accurately and automatically measure minute differences in flatness. Regarding.

According to JIS, flatness refers to the degree of deviation of a planar object from a geometrically correct plane. Flatness is required.

Conventional technology Conventionally, flatness was calculated by measuring several flat areas using a micrometer or dial gauge, or by measuring the difference in the reflection time of ultrasonic waves as a non-contact measurement. or by measuring the displacement of the reflected position of the laser beam,
Alternatively, a method was used in which eddy currents were generated by a magnetic field and measured by the size of the eddy currents.

Problems to be Solved by the Invention Although flatness can be measured relatively easily using a micrometer or dial gauge, it is difficult to measure multiple locations at the same time, and mechanical measurement is difficult. There are some problems that make it difficult to automate. On the other hand, when measuring non-contact using ultrasonic waves, laser light, or magnetic fields, it is relatively easy to automate and the measurement accuracy is high because it is non-contact. This method also measures displacement other than the degree of opening, that is, deformation, warpage, and distortion that occur during processing or transportation of the thin plate-like member, and there is a problem in that pure flatness cannot be obtained. In addition, in the case of the non-contact measurement mentioned above, the size of the part of the sensor that emits ultrasonic waves or laser light must be at least a certain size, and if the thin plate-like member to be measured is very small, multiple locations must be Problems that could not be measured were also rare.

Therefore, the technical problem of the present invention is to enable automatic measurement of only the original flatness of a thin plate-like member with high precision even if the member is small.

Means for Solving the Problems The technical means of the present invention taken to solve the above problems is that in measuring the flatness of a thin plate member, one end of the thin plate member to be measured is aligned with the plane of the reference flat member. A flat holding plate member made of a metal material having a diameter larger than that of the thin plate member to be measured is provided at the other end, and a plurality of non-stick plates for measuring flatness are provided on one surface of the holding plate member. The contact type distance measuring means is J2 beast.

action The operation of the above technical means is as follows.

By arranging one end of the thin plate-like member to be measured in contact with the flat part of the reference plane member, one end surface of the thin plate-like member to be measured is located on the same plane as the reference plane. By holding the other end of the thin plate-like member to be measured with a flat holding plate member made of a metal material with a large diameter, displacement other than the original flatness of the thin plate-like member to be measured, such as during processing or transportation, can be prevented. The resulting deformation, warpage, and distortion are eliminated, and the presser plate member is positioned at a distance corresponding to the original thickness of the thin plate member.

The pure flatness of the thin plate member to be measured can be measured by measuring one side of the flat presser plate member separated by a distance corresponding only to the plate thickness using the distance M measuring means.

Effects of the Invention The flatness related only to the thickness of a thin plate member can be measured, and the flatness measurement accuracy is improved. In order to measure via a holding plate member with a larger diameter than the thin plate member to be measured,
Even if the thin plate-shaped member to be measured is small, the flatness can be expanded in the radial direction and measurement accuracy can be improved. Points can be measured simultaneously. Additionally, by measuring via non-contact distance measuring means,
Can be easily automated.

Embodiment An embodiment illustrating a specific example of the above technical means will be described (see FIGS. 1 to 3).

This example shows an example of measuring the flatness of a thin ring-shaped gasket.

FIG. 1 is a configuration diagram of a flatness measuring device, in which a gasket 1 as a thin plate member is placed on the plane of a reference flat member 2, and the reference flat member 2 is movable in the vertical direction by a piston rod 3 and a cylinder 4. Deploy. As shown in a perspective view in FIG. 2, the gasket 1 has a thin ring shape with a thickness of h and a width of L. A flat presser plate member 5 is arranged on the upper surface of the gasket 1. The holding plate member 5 has a larger diameter than the gasket 1 and is made of a metal material so as to easily generate an induced current. Spring 6a for biasing the presser plate member 5 toward the gasket 1 at both left and right ends of the presser plate member 5.

Attach 6b. [Supporting coil springs 5a, 6b] The coil spring support cylinders 7a, 7b and the cylinder 4 are fixed on a base 8. The sensor is mounted on the base 8 by fixing the member 9 and mounting a displacement sensor 10.11.12 at its upper end as a non-contact distance measuring means for detecting the position of the upper surface of the presser plate member 5. . Displacement sensor 10.1
As 1.12, ultrasonic waves or laser light can be used, but one using eddy current can be produced relatively inexpensively and easily. The displacement of the presser plate member 5 detected by the displacement sensor 10.11.degree. 12 is sent to the control section 15.
The flatness of the gasket 1 is calculated and displayed on the display section 16. That is, as shown in the partially enlarged sectional view of the gasket 1 in its free state in FIG. 3, the gasket 1 undergoes deformation during processing, transportation, etc. (deformation indicated by height 2H in FIG. 3). If the flatness of the gasket 1 is measured without using the presser plate member 5, a value including the deformation will be calculated as the flatness of the gasket 1, but by using the presser plate member 5, the weight of the presser plate member 5 itself will be calculated. Alternatively, the deformation of the gasket 1 is canceled by the spring force of the coil springs 5a and 5b, and the pure flatness of the gasket 1 (height h in FIG. 3) can be calculated. Since the gasket 1 is normally attached by tightening with a flange (not shown) or a screw member (not shown), pure flatness without deformation is required. In addition, if the diameter of gasket 1 is very small, displacement sensor 10.11.12
Even in cases where multiple locations cannot be measured at the same time due to the size difference, the flatness of the gasket 1 can be enlarged and measured by using the presser plate member 5.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of an embodiment of the flatness measuring apparatus according to the present invention, FIG. 2 is a perspective view of the member to be measured in FIG. 1, and FIG. 3 is a partially enlarged sectional view of the member to be measured in FIG. 1: Gasket 2: Reference plane member 5: Holding plate member 8: Base 10.11, 12: Displacement sensor

Claims (1)

[Claims] 1. In measuring the flatness of a thin plate-like member, one end of the thin plate-like member to be measured is placed on a flat part of a reference flat member,
A flat holding plate member made of a metal material having a diameter larger than that of the thin plate member to be measured is provided at the other end, and a plurality of non-contact distance measuring means for measuring flatness are provided on one surface of the holding plate member. flatness measuring device.