JPH0472547U - - Google Patents
Info
- Publication number
- JPH0472547U JPH0472547U JP11552590U JP11552590U JPH0472547U JP H0472547 U JPH0472547 U JP H0472547U JP 11552590 U JP11552590 U JP 11552590U JP 11552590 U JP11552590 U JP 11552590U JP H0472547 U JPH0472547 U JP H0472547U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- plasma generation
- vessel
- lead part
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11552590U JPH0472547U ( ) | 1990-11-02 | 1990-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11552590U JPH0472547U ( ) | 1990-11-02 | 1990-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472547U true JPH0472547U ( ) | 1992-06-25 |
Family
ID=31863298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11552590U Pending JPH0472547U ( ) | 1990-11-02 | 1990-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472547U ( ) |
-
1990
- 1990-11-02 JP JP11552590U patent/JPH0472547U/ja active Pending
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