JPH0472623U - - Google Patents
Info
- Publication number
- JPH0472623U JPH0472623U JP11631890U JP11631890U JPH0472623U JP H0472623 U JPH0472623 U JP H0472623U JP 11631890 U JP11631890 U JP 11631890U JP 11631890 U JP11631890 U JP 11631890U JP H0472623 U JPH0472623 U JP H0472623U
- Authority
- JP
- Japan
- Prior art keywords
- spin dryer
- turntable
- processed
- substrate
- tray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005406 washing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11631890U JPH0472623U (2) | 1990-11-06 | 1990-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11631890U JPH0472623U (2) | 1990-11-06 | 1990-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0472623U true JPH0472623U (2) | 1992-06-26 |
Family
ID=31864135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11631890U Pending JPH0472623U (2) | 1990-11-06 | 1990-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0472623U (2) |
-
1990
- 1990-11-06 JP JP11631890U patent/JPH0472623U/ja active Pending
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