JPH0472680B2 - - Google Patents

Description

[Detailed Description of the Invention] [Objective of the Invention] (Industrial Application Field) The present invention sprays ultra-high pressure water from a nozzle onto the workpiece surface of a non-metallic material during cutting, machining, drilling, or resin molding. This invention relates to ultra-high pressure water processing equipment that performs processing such as removing generated burrs.

(Prior Art) Conventionally, as shown in Japanese Patent Publication No. 57-22692, an ultra-high pressure water machining device that injects ultra-high pressure water onto a workpiece surface to perform ultra-high pressure Some are designed to expand the range of processing using water.

(Problem to be Solved by the Invention) However, since this conventional device only rotates the nozzle itself eccentrically, its processing range only expands into a circular shape. When used on a surface to be machined, it is not possible to spray ultra-high pressure water concentrated from the nozzle over the entire surface of the machine.

The present invention has been made in view of these points, and an object of the present invention is to provide an ultra-high pressure water machining device that can uniformly inject ultra-high pressure water over the entire surface to be machined.

[Structure of the invention]

(Means for Solving the Problems) The present invention provides a large number of nozzles 63 arranged on the opposing surface of the nozzle mounting portion 62 facing parallel to the surface to be processed.
In an ultra-high pressure water machining device that sprays ultra-high pressure water onto a work surface to remove unnecessary materials from the work surface, a first guide body 12 provided parallel to a plane including the work surface is A first sliding body 13 that is slid by a forward/backward drive mechanism 15 is slidably fitted, and a first sliding body 13 that is parallel to a plane that includes the surface to be processed is attached to this first sliding body 13 . A second guide body 42 is provided in a direction perpendicular to the sliding direction of the second guide body 42.
A second sliding body 43 is slidably fitted on the guide body 42, and a vibration mechanism 51 is provided for applying vibration in the direction of the second guide body to the second sliding body 43. This is an ultra-high pressure water processing device in which the plurality of nozzles 63 are provided through the nozzle mounting portion 62.

(Function) In the present invention, in order to uniformly inject ultra-high pressure water ejected from a large number of nozzles 63 disposed in the nozzle mounting portion 62 over the entire surface to be machined, the first slider is moved by the advance/retreat drive mechanism 15. The movable body 13 is reciprocated in the X direction with a necessary stroke and cycle, and while each nozzle 63 is reciprocated in the X direction with a constant stroke and cycle, the vibration mechanism 51 moves the second sliding body 43 in the Y direction as necessary. By vibrating at a constant amplitude and frequency (high-speed reciprocating motion) and vibrating each nozzle 63 at a constant amplitude and frequency in the Y direction,
Make sure to remove resin molding burrs from the entire surface to be machined.

(Example) Hereinafter, the present invention will be described in detail with reference to an example shown in the drawings.

As shown in FIGS. 1 and 2, bases 11 that are integrally supported via support frames 10 are provided in the upper and lower parts, respectively, and the upper surface of the workpiece surface W is placed on the upper and lower bases 11. A pair of ultra-high-pressure water processing devices are provided corresponding to the upper and lower sides, respectively. As shown in FIG. 2, the upper ultra-high pressure water processing apparatus A is installed offset from the lower ultra-high pressure water processing apparatus B in the transport direction of the workpiece W. This is to prevent mutual interference of ultra-high pressure water.

A first guide body 12 is fixed on a base 11, and a first sliding body 13 is slidably fitted onto the first guide body 12. This first sliding body 13 includes the base 11
A piston rod 16 of a fluid pressure cylinder 15 as a forward/backward drive mechanism is mounted on the top via a mounting plate 14.
The cylinder 15 slides along the first guide body 12 by means of the cylinder 15.

A bearing case 22 is attached to the first sliding body 13 via an L-shaped attachment member 21, and a rotating shaft 24 is rotatably provided within this case 22 via a bearing 23. A rotation drive mechanism 31 is connected to the rotation shaft 24 via a universal joint 25.
Connect.

This rotary drive mechanism 31 includes a bearing case 33 mounted on the base 11 via a mounting plate 32, a hollow shaft 35 rotatably provided in the case 33 via a bearing 34, and fixed to the hollow shaft 35. A spline shaft 37 is spline-fitted into the spline fitting body 36, and the spline shaft 37 is connected to the rotary shaft 24 via the universal joint 25. Furthermore, the hollow shaft 3
A timing pulley 38 is integrally fitted to the upper timing pulley 38 and a lower timing pulley 38, and a timing belt 39 is wound around the upper timing pulley 38 and the lower timing pulley 38, and this timing belt 39 is driven by a motor 40 shown in FIG. It is also wound around the rotating drive timing pulley 38a, and drives the upper and lower timing pulleys 38 simultaneously.

Further, a second guide body 42 consisting of two rods extending in a direction orthogonal to the sliding direction of the first sliding body 13 is provided on the first sliding body 13 via a mounting plate 41. 42, the second sliding body 43 is slidably fitted thereto.

The rotating shaft 24 and the second sliding body 43
A vibration mechanism 51 is provided between the second sliding member and the second sliding member to apply vibration due to eccentric rotation to the second sliding member. This vibration mechanism 51
A bearing 54 is attached to an eccentric position of the large-diameter portion 52 of the rotating shaft 24 with a bolt 53, and a slider 56 is integrally provided to the second sliding body 43 via a mounting plate 55. The bearing 54 is slidably fitted into a long hole 57 in the direction. The bearing 54 can slide in the elongated hole 57 in the vertical direction with a stroke twice the eccentric mounting amount.
Since one side is always in contact with one vertical side of the elongated hole 57, changes in the bearing circumferential surface caused by eccentric mounting of the bearing 54 are directly transmitted to the slider 56 in the direction of the second guide 42. The second sliding body 43 reciprocates along the second guide body 42.

A block-shaped nozzle mounting portion 62 is provided on the second sliding body 43 via a mounting plate 61, and a plurality of nozzles 63 are further provided on this nozzle mounting portion 62 as shown in FIG. In the upper nozzle mounting part 62, a nozzle 63 is provided on the lower surface, and in the lower nozzle mounting part 62, the nozzle 63 is provided in the upper surface, and the workpiece W is disposed between the upper and lower nozzles 63.
position. Each nozzle 63 has a nozzle mounting portion 6
2 and connect it to the ultra-high pressure water supply hose.

As shown in FIG. 4, the workpiece W is a flat package type integrated circuit manufacturing process in which a plurality of IC packages b are molded (resin-filled) on a lead frame a such as one copper plate. This is the one that has just been installed, and its IC package b
Since unnecessary excess mold (indicated by the shaded area) c is attached to the outer periphery of the mold, this excess mold c is removed by this ultra-high pressure water processing device.

The conveyor that supports and conveys the workpiece W has a sprocket 71 as shown in FIG.
A receiving part 74 is attached at a predetermined pitch to an endless chain 73 that rotates along a guide 72, and the workpiece W is supported by this receiving part 74, and is fixed to a frame 75 on the guide 72. The holding plate 76 prevents the workpiece from lifting up. A pair of the endless chains 73 and the like are provided on both the left and right sides of the workpiece W, but the left side is omitted.

Next, the operation of this embodiment will be explained.

By reciprocating the first sliding body 13 along the first guide body 12 by the fluid pressure cylinder 15 above and below the workpiece W, and by driving the timing belt 39 by the motor 40, The timing pulley 38, the hollow shaft 35, and the spline fitting part 36 are rotated, the spline shaft 37, which is slid in the axial direction by the cylinder 15, is rotated relative to the fitting part 36, and the universal joint 25 is rotated. The rotating shaft 24 is rotated through the rotating shaft 24, the bearing 54 of the vibration mechanism 51 is eccentrically rotated, and the second sliding body 43 is connected to the second guiding body 42 through the slider 56.
vibrate along the

As a result, as shown in FIG. 6, when viewed in plan, the nozzle mounting portion 62 is moved reciprocally in the width direction (X direction) of the workpiece W by the fluid pressure cylinder 15, while The mechanism 51 causes the workpiece W to vibrate in the longitudinal direction (Y direction). Therefore, the ultra-high pressure water ejected from the large number of nozzles 63 is ejected over the entire upper and lower surfaces of the workpiece W, and the water pressure of the ultra-high pressure water causes the
Excess mold c on IC lead frame a is removed.

In the above embodiment, by providing two sets of ultra-high pressure water processing equipment, ultra-high pressure water is injected onto the upper and lower sides of the workpiece W, and excess mold c on both sides is removed.
Although the present invention is not limited to this, the present invention may be such that ultra-high pressure water is injected only onto one side of the workpiece W using a set of ultra-high pressure water processing equipment. . In that case, after processing one side of the workpiece W, if necessary, the workpiece W may be reversed and the other side may be processed. Also,
In the embodiment described above, the second sliding body 43 is vibrated by the eccentric rotating bearing 54 as the vibration mechanism 51, but the present invention is not limited to this, and for example, a vibrator using a servo valve can be used. may be used as this vibration mechanism.

Further, in the above embodiment, the workpiece W is transported as an example of use, but it goes without saying that the ultra-high pressure water processing apparatus of the present invention can also be used for a workpiece fixed in a fixed position.

〔Effect of the invention〕

According to the present invention, the first sliding body that is slid by the advance/retreat drive mechanism is slidably fitted onto the first guide body provided parallel to the plane including the workpiece surface, and the first sliding body The movable body is provided with a second guide body extending in a direction parallel to the plane including the surface to be processed and perpendicular to the sliding direction of the first sliding body, and the second sliding body is slid on the second guide body. A vibration mechanism is provided that is freely fitted and applies vibration in the direction of the second guide to the second sliding body, and the vibration mechanism is attached to the second sliding body through a nozzle mounting portion that faces parallel to the workpiece surface. Since a large number of nozzles are arranged on the opposing surface, the first sliding body is reciprocated with the required stroke and cycle by the forward/backward drive mechanism, and each nozzle is reciprocated parallel to the workpiece surface with a constant stroke and cycle. While letting
The vibration mechanism causes the second sliding body to vibrate at the required amplitude and frequency, and each nozzle is vibrated at a constant amplitude and frequency parallel to the workpiece surface and in a direction perpendicular to the reciprocating direction (high-speed reciprocating motion). ) can be made. In this way, the stroke and cycle of the reciprocating motion of the nozzle, as well as the amplitude and frequency of vibration, can be stably controlled. For example, resin molding burrs on the surface to be processed can be removed reliably over the entire surface.

Further, since the forward/backward drive mechanism and the vibration mechanism can accurately control the area to be processed by ultra-high pressure water (X direction, Y direction), the area to be processed by ultra-high pressure water can be limited to only the necessary portion. For example, in a molded product, it is also possible to selectively inject ultra-high pressure water only to the surplus mold part on the X-Y plane to efficiently remove only the surplus part.

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway front view showing an embodiment of the ultra-high pressure water processing apparatus of the present invention, and FIG. 2 is a side view thereof.
Fig. 3 is a perspective view of the nozzle mounting part, Fig. 4 is a plan view of the workpiece, Fig. 5 is a sectional view of the conveyor that supports and conveys the workpiece W, and Fig. 6 shows the movement trajectory of the nozzle. FIG. 12...first guide body, 13...first sliding body, 15...
Forward/backward drive mechanism, 42... Second guide body, 43... Second sliding body, 51... Vibration mechanism, 62... Nozzle attachment part, 6
3...Nozzle.

Claims (1)

[Claims] 1 Ultra-high pressure water machining equipment that sprays ultra-high-pressure water onto the workpiece surface from multiple nozzles arranged on the opposing surface of the nozzle mounting part facing parallel to the workpiece surface to remove unnecessary materials from the workpiece surface. In this step, a first sliding body that is slid by an advance/retreat drive mechanism is slidably fitted onto a first guide body provided parallel to a plane including the surface to be processed, and on this first sliding body, A second guide body is provided in a direction parallel to the plane including the surface to be processed and perpendicular to the sliding direction of the first sliding body, and the second sliding body is slidably fitted to the second guide body. the second sliding body is provided with a vibration mechanism that applies vibration in the direction of the second guide body, and the plurality of nozzles are provided on the second sliding body via the nozzle mounting portion. Ultra-high pressure water processing equipment.