JPH04737U - - Google Patents
Info
- Publication number
- JPH04737U JPH04737U JP4007490U JP4007490U JPH04737U JP H04737 U JPH04737 U JP H04737U JP 4007490 U JP4007490 U JP 4007490U JP 4007490 U JP4007490 U JP 4007490U JP H04737 U JPH04737 U JP H04737U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- sample mounting
- electrode
- sample
- rotation shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Description
第１図は、実施例の概略構成図、第２図は、試
料装着電極の動作説明図、第３図は、垂直エツチ
ングの説明図である。
１……ドライエツチング装置、１１……試料装
着電極、１２……回動軸、１３……試料装着部。
FIG. 1 is a schematic diagram of the configuration of the embodiment, FIG. 2 is an explanatory diagram of the operation of the sample mounting electrode, and FIG. 3 is an explanatory diagram of vertical etching. DESCRIPTION OF SYMBOLS 1... Dry etching device, 11... Sample attachment electrode, 12... Rotation shaft, 13... Sample attachment part.
Claims (1)
室の内部に試料装着電極を設けたもので、前記試
料装着電極に装着した試料をエツチングするため
のドライエツチング装置において、 前記試料装着電極を、 前記エツチング室に対して回動自在に設けた回
動軸と、 前記回動軸に対して傾動自在に設けた試料装着
部とにより構成したことを特徴とするドライエツ
チング装置。[Scope of Claim for Utility Model Registration] In a dry etching apparatus for etching a sample attached to the sample mounting electrode, the sample mounting electrode is provided inside an etching chamber for isolating the etching atmosphere, and the sample mounting A dry etching apparatus characterized in that an electrode is constituted by a rotation shaft rotatably provided with respect to the etching chamber, and a sample mounting portion provided tiltably with respect to the rotation shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4007490U JPH04737U (en) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4007490U JPH04737U (en) | 1990-04-13 | 1990-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04737U true JPH04737U (en) | 1992-01-07 |
Family
ID=31549547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4007490U Pending JPH04737U (en) | 1990-04-13 | 1990-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04737U (en) |
-
1990
- 1990-04-13 JP JP4007490U patent/JPH04737U/ja active Pending