JPH0473879A - Manufacture of gas-filled discharge tube - Google Patents

Abstract

PURPOSE:To simplify the process by forming a number of insulating bases on one parent base, and forming electrodes and trigger means on the insulating bases at once. CONSTITUTION:Three insulating bases 10 are formed on one parent base, and dividing channels 59, 59 are formed by laser beams on the boundary of each insulating base 10. One-side surfaces of the insulating bases 10 are coated with a paste containing fine powder of glass and baked to form a glass coating layer 28, and a coat of a paste containing Cu is applied on the glass coating layer 28 in end parts 12, 14 followed by baking to form discharging electrodes 16, 18. Further, conductive linear pieces 22, 24 are formed on the glass coating layer 28 by laser CVD with a part of the electrodes 16, 18 as a seed, terminals are connected to the electrodes 16, 18 by soldering, and each insulating base 10 is separated along the dividing channels 59, 59. Thus, the manufacturing process can be simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a gas-filled discharge tube for protecting electronic equipment from abnormal surges.

[Prior Art] FIG. 5 is a sectional view showing an example of a conventional gas-filled discharge tube.

The gas-filled discharge tube has a similar shape as a whole, with an insulating tube 101 made of a hollow cylinder made of ceramic or the like, and a tube end joint surface 102.
Electrode 1 is connected to 103 through brazing filler metals 104 and 105, respectively.
06.107, an inert gas such as argon (A r ) is sealed inside, and the opposing discharge surfaces 10B, 10
This is a structure in which a discharge is obtained in a discharge gap 110 between 9 and 9. 1
11.112 is the flange of the electrode 106.107, 113.1
14 is a part of the taper of electrode 106.107, 115.11
Reference numeral 6 denotes a metallized layer provided on the tube end joint surfaces 102 and 103 of the insulating tube 101. A conductive strip 118 is provided on the inner wall 117 of the insulating tube 101 as a trigger means.

As the conductive strip 118, a carbon strip is currently in practical use. The carbon strip has a proximal edge at the tube end joint surface 102 where one of the electrodes, for example, the electrode 106, is located, and a distal edge at the wall surface adjacent to the discharge surface 109 of the other electrode 107. has been done. Although not shown, there are cases where the tip edge extends to the front of the flange 112 of the other electrode 107, and where the two tube end joining surfaces 102 and 103
A structure in which both edges are separated from each other has also been implemented.

In addition, in this method of manufacturing a gas-filled discharge tube, a conductive strip 118 is formed on the inner wall 117 of each insulated tube 101 separated one by one, and a conductive strip 118 is formed on the inner wall 117,
．． The electrode 106.103 is connected to the electrode 106.103 through the brazing material 104.105.
107 to seal it.

(Problems to be Solved by the Invention) By the way, in such a conventional method for manufacturing a gas-filled discharge tube, a conductive strip is inserted into a tube in which a large number of insulating tubes 101 are arranged in series in the axial direction. It was not possible to form the strip 118 or the electrode 106.

The longer the insulating tube 101 becomes, the more difficult it becomes to form the conductive strips 118 on its inner wall 117.
Tube end joining surface 102.1 on which electrodes 106.107 are formed
This is because 03 does not appear unless it is separated one by one.

Therefore, in the conventional method of manufacturing a gas-filled discharge tube, there is a limit to the simplification of the manufacturing process due to such problems.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a gas-filled discharge tube that solves the above problems and simplifies the manufacturing process.

[Means to solve the problem]

The method for manufacturing a gas-filled discharge tube according to the present invention includes an insulating substrate, electrodes provided at separate ends of the insulating substrate, trigger means provided between these electrodes, and the trigger means. A gas-filled discharge tube comprising the electrode and an insulating case hermetically sealed with gas for discharge,
The method is characterized in that, after forming at least one of the third pole and the trigger means on a mother board on which a large number of the insulating substrates are formed in a planar manner, the mother board is divided and the insulating substrates are taken out. be.

[Effect]

In the method for manufacturing a gas-filled discharge tube according to the present invention, a large number of insulating substrates are formed on one mother substrate, and electrodes and trigger means are formed on these insulating substrates at the same time. 2 and 3 are plan views showing an embodiment of the method for manufacturing a gas-filled discharge tube according to the invention, and FIG. 2 shows a gas-filled discharge tube manufactured by the method shown in FIG.
3 is a plan view.

First, a gas-filled discharge tube manufactured by the method shown in FIG. 1 will be explained based on FIGS. 2 and 3.

The gas-filled discharge tube includes an insulating substrate 1o and an end portion 12 of the insulating substrate.
．． 14 for trigger discharge provided separately from each other.
t8ii16.18 and main discharge electrode 30.32,
A conductive strip 22.24 as a trigger means provided on the insulating substrate 10 between the electrodes 16.18 and a conductive strip 22.2
4 and the electrodes 16, 18, 30, 32, and an insulating case 26 that hermetically seals the electrodes 16, 18, 30, 32 with a gas for discharge, and the electrodes 16. Electrodes 3o and 32 for main discharge are arranged on one surface 48 of the insulating substrate 10, and the other surface 50 of the insulating substrate 10. A gap 20 is formed between the conductive strips 22 and 24.

Further, a glass coating layer 28 can be formed on the insulating substrate 10.

Next, an embodiment of the method for manufacturing a gas-filled discharge tube according to the present invention will be explained in order of steps with reference to FIGS. 1 to 3.

In FIG. 1A, three insulating substrates 10 are formed on one mother substrate 58. In FIG. The insulating substrate 10 is made of electrically insulating ceramic, synthetic resin, or the like. In this embodiment, as the insulator 1110, ceramic inx whose main component is aluminum oxide is used. Furthermore, dividing grooves 59 and 59 are formed at the boundaries of each insulating substrate 10 using laser light. Note that the dividing grooves 59 and 59 may be formed not only in this process but also in any other process. Then, a paste containing fine glass powder is applied to one surface 48 of the insulating substrate 10 and fired to form the glass coating layer 28.

In FIG. 1B, a paste containing Cu is applied onto the glass coating layer 28 on the end portion 12.14 of the insulating substrate 10 and fired to form the discharge electrode 16.18. Then, laser CVD (Chemical Vapo
r Deposit.

n), a conductive strip 22.24 having a width and thickness of approximately 3 μm is formed on the glass coating layer 28 using a portion of the electrode 16.18 as a seed.

In (c) of Fig. 1, the terminal 38.40 is connected to the electrode 16.18.
are connected by solders 34 and 36, respectively. Further, the electrode 16 and the electrode 30 are electrically connected through contact pieces 54a and 54b, and the electrode 18 and the electrode 32 are electrically connected through contact pieces 56a and 56b, respectively.

In (d) of FIG. 1, the mother substrate 58 is divided into the respective insulating substrates 10 along the dividing grooves 59 and 59. At this time, terminal 38
．． 40 is also cut out for each insulating substrate 10.

Finally, a discharge gas such as Ar is sealed between the upper member 42 and the lower member 44 of the insulating case 26 made of ceramics, etc., and the entire insulating substrate 10 is placed with the terminals 38 and 40 exposed outside. .

Then, the entire insulating substrate 10 is hermetically sealed with the insulating case 26 by melting the sealing layer 46 made of low melting point glass or the like.

Note that the inner wall 57 of the insulating case 26 is coated with promethium (
A radioactive isotope such as Pt) or nickel (Ni) may also be deposited.

Further, the length A of the gap 20 between the conductive strips 22.24 and the distance B between the main discharge electrodes 30.32 are set so that A<B. A gap 52 is provided between the insulating substrate 10 and the insulating case 26 so that the gas ionized by the trigger discharge can easily diffuse toward the electrodes 30 and 32 for the multi-electrode.

Furthermore, the electrodes 30 and 32 are provided apart from the insulating substrate 10 and the insulating case 26 in order to avoid creeping discharge with unstable characteristics and to create an air discharge.

Next, a method for forming the conductive strips 22, 24 by laser CVD will be described with reference to FIG. FIG. 4 shows conductive strips 22 and 24 formed by laser CV in the manufacturing method shown in FIG.
FIG.

Inside the chamber 60, an insulating substrate IO before being divided from the mother substrate 58 is placed, and Ar and W(Co)a
A mixed gas 62 flows. The light source 64 uses a YAG laser with a second harmonic wavelength of 532 nm. This laser beam 66 is focused by an optical system 68 and is irradiated perpendicularly onto the insulating substrate 10 through the glass window 70 of the chamber 60 . Then, in the insulating substrate 10, the temperature of the portion irradiated with the laser beam 66 increases, W (Co) around the portion is thermally decomposed, and tungsten is deposited. Then, when the insulating substrate 10 is moved, conductive strips 22 and 24 made of tungsten are formed in the portions irradiated with the laser beam 66. According to this method, the conductive strips 22, 24 can be formed with extremely high precision. In particular, if the glass coating layer 28 is formed on the insulating substrate 10 and the insulating substrate 10 is flattened, the conductive strips 22 and 24 can be drawn with a width of 1 micron and a thickness of 0.1 micron. .

Further, the conductive strips 22, 24 may be formed by marking with a pencil or the like. Regardless of the method used, the conductive strips 22, 24 can be continuously formed on the mother substrate 5 days on which a large number of insulating substrates 10 are formed, and can be formed very efficiently.

Although the conductive strips 22.24 have been described as trigger means, a conductive film such as carbon coating is formed on most of the surface 48 of the insulating substrate 10, and the picture electrodes 16.1
Trigger means may be provided by forming a slit-like gap in the conductive film approximately in the center of 8.

In addition, although the above embodiment shows a two-pole gas-filled discharge tube,
The same method can be applied to gas-filled discharge tubes having three or more electrodes.

[Effects of the Invention] According to the method for manufacturing a gas-filled discharge tube according to the present invention, a large number of insulating substrates are formed on one mother substrate, and electrodes and trigger means are formed on these insulating substrates at the same time. ,−
The process can be simplified compared to a method of forming electrodes and trigger means one by one.

[Brief explanation of drawings]

FIG. 1 is a plan view showing an embodiment of the method for manufacturing a gas-filled discharge tube according to the present invention, and FIGS. 2 and 3 show a gas-filled discharge tube manufactured by the method shown in FIG. Figure 2 is the third
Figure 3 is a plan view, and Figure 4 is a cross-sectional view of the vertical line taken along the line ■-■ in the figure.
FIG. 5 is a sectional view showing an example of a conventional gas-filled discharge tube. 10... Insulating substrate 12.14... End portion of insulating substrate 16.18... Electrode for trigger discharge 22.24... Conductive strip (trigger means) 26... Insulating case 30.32 ...Electrode 58 for main discharge...Mother board patent applicant...Hakusan Seisakusho Co., Ltd. Agent...
・Patent Attorney Yoshi 1) Thousand tickets Figure 1 58 Mother board No. 22.24

Claims (1)

[Claims] An insulating substrate, electrodes provided spaced apart from each other at the ends of the insulating substrate, a trigger means provided between these electrodes, and a trigger means for discharging the trigger means and the electrodes. In a gas-filled discharge tube equipped with an insulating case that encloses gas and hermetically seals the tube, after forming at least one of the electrode and the trigger means on a mother board in which a large number of the insulating substrates are formed in a planar manner. . A method for manufacturing a gas-filled discharge tube, comprising dividing the mother substrate and taking out the insulating substrate.