JPH0474423U - - Google Patents
Info
- Publication number
- JPH0474423U JPH0474423U JP11839090U JP11839090U JPH0474423U JP H0474423 U JPH0474423 U JP H0474423U JP 11839090 U JP11839090 U JP 11839090U JP 11839090 U JP11839090 U JP 11839090U JP H0474423 U JPH0474423 U JP H0474423U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- heater
- gas
- introduction means
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
Description
第１図は本考案の実施例に係る横型熱処理炉を
示す模式的斜視図、第２図は同じくその正面断面
図、第３図は同じくその側面断面図、第４図は温
度シーケンスを示すグラフ図、第５図はヒータの
種々の分割態様を示す模式図、第６図は従来の横
型熱処理炉を示す側面断面図、第７図は同じくそ
の正面断面図である。
１……チユーブ、２……ガス導入部、３……蓋
、４，４ａ，４ｂ……ソース側ヒータ、５，５ａ
，５ｂ……センターヒータ、６，６ａ，６ｂ……
アウト側ヒータ、８……ボート、９……ウエハ。
Fig. 1 is a schematic perspective view showing a horizontal heat treatment furnace according to an embodiment of the present invention, Fig. 2 is a front sectional view thereof, Fig. 3 is a side sectional view thereof, and Fig. 4 is a graph showing a temperature sequence. FIG. 5 is a schematic view showing various divisions of the heater, FIG. 6 is a side sectional view showing a conventional horizontal heat treatment furnace, and FIG. 7 is a front sectional view thereof. 1...Tube, 2...Gas introduction part, 3...Lid, 4, 4a, 4b...Source side heater, 5, 5a
, 5b...center heater, 6, 6a, 6b...
Out side heater, 8...Boat, 9...Wafer.
Claims (1)
のチヤンバの一端からガスを導入してチヤンバ内
にガスを通流させるガス導入手段と、前記チヤン
バの周囲に配設され前記ガスの通流方向及びこれ
に直交する方向に夫々複数個に分割されて前記チ
ヤンバ内の被処理物を加熱するヒータと、各ヒー
タを個別的に制御する制御手段とを有することを
特徴とする横型熱処理炉。 a chamber in which a plurality of objects to be processed are housed; a gas introduction means for introducing gas from one end of the chamber to flow the gas into the chamber; and a gas introduction means disposed around the chamber in a direction in which the gas flows. A horizontal heat treatment furnace comprising: a heater that is divided into a plurality of heaters in a direction perpendicular to the heater for heating the workpiece in the chamber; and a control means that individually controls each heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11839090U JPH0474423U (en) | 1990-11-08 | 1990-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11839090U JPH0474423U (en) | 1990-11-08 | 1990-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474423U true JPH0474423U (en) | 1992-06-30 |
Family
ID=31866306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11839090U Pending JPH0474423U (en) | 1990-11-08 | 1990-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474423U (en) |
-
1990
- 1990-11-08 JP JP11839090U patent/JPH0474423U/ja active Pending