JPH0474785U - - Google Patents
Info
- Publication number
- JPH0474785U JPH0474785U JP11546190U JP11546190U JPH0474785U JP H0474785 U JPH0474785 U JP H0474785U JP 11546190 U JP11546190 U JP 11546190U JP 11546190 U JP11546190 U JP 11546190U JP H0474785 U JPH0474785 U JP H0474785U
- Authority
- JP
- Japan
- Prior art keywords
- valve seat
- opening
- substrate
- gasket
- connecting rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Details Of Valves (AREA)
- Check Valves (AREA)
Description
第１図は本考案の一例による真空圧力調節弁を
示す断面図、第２図は本考案で用いられるガスケ
ツトの一例を示す断面図、第３図は本考案による
真空圧力調節弁が備えられたスパツタリング装置
を示す断面図、そして第４図および第５図はそれ
ぞれ従来の真空圧力調節弁を示す断面図である。
図中、１……基板、２……開口部、１１……バ
ルブシート、１２……ガスケツト、１５……連接
棒、１６……アーム、１７……駆動ユニツト。
Fig. 1 is a sectional view showing a vacuum pressure regulating valve according to an example of the present invention, Fig. 2 is a sectional view showing an example of a gasket used in the present invention, and Fig. 3 is a sectional view showing a vacuum pressure regulating valve according to the present invention. A sectional view showing a sputtering device, and FIGS. 4 and 5 are sectional views showing a conventional vacuum pressure regulating valve, respectively. In the figure, 1... substrate, 2... opening, 11... valve seat, 12... gasket, 15... connecting rod, 16... arm, 17... drive unit.
Claims (1)
成された開口部を、ガスケツトを介して該開口部
周辺の該基板の面に当接して閉止し得るように可
動に備えられたバルブシートと、前記基板におけ
る前記開口部周辺に形成された孔を密封状に貫通
して前記バルブシートに連結された複数の連接棒
と、前記連接棒を介して前記バルブシートを動作
する駆動ユニツトを含み、前記バルブシートによ
り前記開口部を閉じた際に僅かな隙間が生じるよ
うに前記ガスケツトには複数の溝が形成されてい
ることを特徴とする真空圧力調節弁。 A valve seat is movably provided so as to be able to close an opening formed in a substrate partitioning a vacuum processing chamber and an exhaust device by coming into contact with a surface of the substrate around the opening via a gasket. , a plurality of connecting rods connected to the valve seat by sealingly passing through holes formed around the opening in the substrate, and a drive unit operating the valve seat via the connecting rods, A vacuum pressure regulating valve characterized in that a plurality of grooves are formed in the gasket so that a slight gap is created when the opening is closed by the valve seat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11546190U JPH0474785U (en) | 1990-11-02 | 1990-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11546190U JPH0474785U (en) | 1990-11-02 | 1990-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474785U true JPH0474785U (en) | 1992-06-30 |
Family
ID=31863235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11546190U Pending JPH0474785U (en) | 1990-11-02 | 1990-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474785U (en) |
-
1990
- 1990-11-02 JP JP11546190U patent/JPH0474785U/ja active Pending