JPH0474859A - Heater for heat treating device - Google Patents

Abstract

PURPOSE:To efficiently heat a substrate by using an IR heater disposed in a reflecting mirror having a specific shape as a substrate heater at the time of evaporating a target material by a laser beam in a vacuum chamber and forming the thin film of the compd. with an introducing gas on the substrate. CONSTITUTION:A ceramic table 3 having a hole 3a is placed in a hermetic chamber 2 consisting of a stainless steel housing 1 and the substrate 7 consisting of sapphire, etc., is imposed via an Mo plate 6 on a heat accumulating material 5 consisting of opaque quartz glass, etc., in the hole 3a. The metallic target 8 is mounted to a stainless steel arm 9 diagonally above the substrate 7 and the laser beam L is introduced through the transparent quartz glass window 12 of a cylindrical conduit 11 mounted in the hermetic chamber 2 to irradiate the target 8 and to evaporate the same. An oxidative gas is simultaneously supplied from a gas supply pipe 14 provided in the conduit 11 into the hermetic chamber 2. A substrate supporting base 5 and the substrate 7 are heated by the IR rays from the IR heater 24 by utilizing the inner reflecting mirror 25B and the outer reflecting mirror 25a existing on the outer side of the hermetic chamber 2 via a closing member 22 made of IR transparent quartz glass, by which the film consisting of the oxide of the target metal is formed on the substrate 7.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a heating device for heating a substrate provided in a sealed chamber of a heat treatment device.

"Conventional technology j Conventionally, in heat treatment equipment such as oxide thin film deposition equipment using a laser beam, it is necessary to heat a substrate housed in a sealed chamber. For this purpose, an opening is formed in the sealed chamber and is closed with a closing member made of a high-temperature heat-resistant infrared transmitting material, and heat from an infrared heater provided outside the sealed chamber is transmitted through the closing member by a reflecting mirror and guided to the substrate, thereby causing the substrate to A heating device for heating has been proposed (Japanese Unexamined Patent Publication No. 1-14632)
Publication No. 0).

In this type of heating device, the infrared heater is installed outside the sealed chamber, so the volume inside the sealed chamber can be reduced compared to when the infrared heater is installed inside the sealed chamber, making it easier to maintain a high vacuum inside the sealed chamber. Furthermore, even when nitrogen, oxygen, etc. are supplied to the monoacid into the sealed chamber, there is an advantage that only a relatively small amount of these needs to be supplied.

"Problems to be Solved by the Invention" However, in the above heating device, the reflecting mirror is placed adjacent to the infrared heater and on the opposite side of the opening, and the heat radiated from the infrared heater to the opposite side of the opening is transmitted through the opening. Thermal efficiency was poor because the light was simply reflected towards the target.

In view of such circumstances, the present invention provides a heating device for a heat treatment apparatus that can efficiently heat a substrate.

"Means for Solving the Problems" That is, the present invention provides the heating device for the heat treatment apparatus described above, in which the reflecting mirror is provided on the inside and outside of the sealed chamber with the closing member sandwiched therebetween, and the reflecting mirror as a whole is The infrared heater is formed into a bottomed cylindrical shape with one end open, and the one end opening faces the substrate inside the sealed chamber, and the infrared heater is housed at the inner bottom of the reflecting mirror outside the sealed chamber.

"Operation" According to the above configuration, the reflecting mirror is formed into a cylindrical shape with a bottom, and the infrared heater is housed in the inner bottom part of the reflecting mirror outside the sealed chamber, so that most of the heat from the infrared heater is reflected. It will now be reflected towards the opening at one end of the mirror. The reflecting mirrors are provided on the inside and outside of the sealed chamber with the closing member made of the above-mentioned high-temperature heat-resistant infrared transmitting material sandwiched therebetween,
In addition, since the opening of the reflecting mirror faces the substrate within the sealed chamber, the substrate can be efficiently heated.

``Example'' The present invention will be described below with reference to an illustrated example.
A sealed chamber 2 is formed inside the sealed chamber 2, and a ceramic disc-shaped table 3 is horizontally arranged inside the sealed chamber 2, and the table 3 is supported horizontally by a ceramic support 4. . A hole 3a is bored in the center of the table 3, and the hole 3a is covered with a substrate support 5 made of a heat storage material having high temperature resistance, such as opaque quartz glass or germanium. A substrate 7 made of sapphire is placed on this substrate support 5 with a plate 6 made of molybdenum having high oxidation resistance interposed therebetween.

A target 8 made of Pb-Zr-Ti oxide is provided diagonally above the substrate 7.
is attached to the tip of arm 9 made of stainless steel. The arm 9 is an actuator 10 provided outside the sealed chamber 1.
It can be raised and lowered by.

One end of a cylindrical conduit 11 is attached to the upper side surface of the national body 1, and a laser beam L is transmitted into the conduit 11 and the sealed chamber 2 through a window 12 made of transparent quartz glass attached to the other end of this conduit 11. It is now possible to introduce This laser beam irradiates the target 8 to generate vapor, which is deposited on the substrate 7 to form a thin film.

In addition, a vacuum passage 13 is connected to the national body 1, and a gas supply pipe 14 is connected to the outer periphery of the conduit 11. N, 0 gas and 02 gas can be supplied inside. At this time, in order to prevent the vapor from the target 8 from adhering to the window 12, the window 12 is connected to the conduit 11 attached to the national polity 1.
is provided to separate the window 12 and target 8 as much as possible, and the gas supply pipe 14 is provided adjacent to the window 12.

A window 15 made of transparent quartz glass is provided on the upper surface of the national polity 1 at a position directly above the substrate 7. By irradiating the substrate 7 with a laser beam through this window 15, the thin film being deposited on the substrate 7 can be removed. The surface can be modified.

Furthermore, a large opening 21 is formed in the bottom surface of the national polity l, and this opening 21 is filled with a high-temperature heat-resistant infrared transmitting material.
It is closed with a closing member 22 made of transparent quartz glass, for example. This closing member 22 is attached to the national polity 1 by fixing a stainless steel frame member 23 provided on its outer periphery to the national polity 1 with bolts (not shown).

An infrared heater 24 for heating the substrate support stand 5 and the substrate 7 is provided outside the sealed chamber 1, and the heat from the infrared heater 24 is transmitted through the closure member 22 by a reflecting mirror 25 and is transmitted to the substrate support stand 5. I am able to guide you. The reflecting mirrors 25 are provided on the inside and outside of the sealed chamber 2 with the closing member 22 in between.
5A has a rounded bottom shape with 125 inner reflections.
B is formed into a cylindrical shape narrowing at the top, thereby making the overall shape of the reflecting mirror 25 a bottomed cylinder with one end open, and in the illustrated embodiment an oval shape with the upper end cut off.

The outer reflective mirror 25A is attached to the inner peripheral surface of the frame member 23, and the inner reflective mirror 25B is attached to the inner peripheral surface of the opening 21. The upper end opening of the inner cylindrical reflecting mirror 25B faces the substrate support stand 5 within the sealed chamber 1.

In the above configuration, when forming a thin film on the substrate 7, the vacuum passage 13 maintains the inside of the sealed chamber 1 in a vacuum, and the gas supply pipe 14 supplies a required concentration of gas into the sealed chamber 1. . Further, the infrared heater 24 is energized, and the heat from the infrared heater 24 is reflected and guided to the closing member 22 made of transparent quartz glass by the outer reflecting mirror 25A, and the heat transmitted through the closing member 22 is reflected to the inner reflecting mirror 25B.
It is reflected and guided to the substrate support stand 5 via. As a result, the substrate support stand 5 made of a heat storage material is heated and heat is stored, and the substrate 7 is heated to around 800°C by the heat of the substrate support stand 5.

At this time, since the infrared heater 24 is housed in a reflecting mirror 25 that has a bottomed cylindrical shape with an open end,
The heat from the infrared heater 24 can be efficiently guided to the substrate support stand 5 and the substrate 7 to heat the substrate 7.

In addition, the heat from the infrared heater 24 does not excessively heat the stainless steel national body 1, etc., and the substrate support 5
The table 3 that supports the substrate 7 is made of ceramic with excellent high temperature resistance and oxidation resistance, so it is possible to prevent C from being generated from inside the stainless steel by heating it, thereby preventing the formation of a thin film deposited on the substrate 7. Degradation of purity can be prevented.

Then, in the above-described state, if a laser beam is emitted from a laser oscillator (not shown) and the target 8 is irradiated from the laser beam 12 through the conduit 11, vapor is generated from the target 8 and deposited on the substrate 7. and forms a thin film.

"Effects of the Invention" As described above, according to the present invention, the reflecting mirror is formed into a bottomed cylindrical shape and the infrared heater is housed therein, so that the heat from the infrared heater is efficiently transferred to the substrate. The effect is that the substrate can be effectively heated by the heat transfer.

[Brief explanation of drawings]

The figure is a sectional view showing one embodiment of the present invention. 1... National polity 2... Sealed room 5... Board support stand 7... Board

Claims (1)

[Scope of Claims] A sealed chamber containing a substrate, a closing member made of a high temperature resistant infrared transmitting material for closing an opening formed in the sealed chamber, an infrared heater provided outside the sealed chamber, and an infrared heater provided outside the sealed chamber; A heating device for a heat treatment apparatus comprising a reflecting mirror that guides heat from an infrared heater to the substrate through the closing member, wherein the reflecting mirror is provided on the inside and outside of the sealed chamber with the closing member in between. At the same time, the overall shape of the reflecting mirror is formed into a bottomed cylindrical shape with one end open, the one end opening facing the substrate within the sealed chamber, and the infrared heater is housed at the inner bottom of the reflecting mirror outside the sealed chamber. A heating device for a heat treatment device characterized by: