JPH0475171U - - Google Patents
Info
- Publication number
- JPH0475171U JPH0475171U JP11818390U JP11818390U JPH0475171U JP H0475171 U JPH0475171 U JP H0475171U JP 11818390 U JP11818390 U JP 11818390U JP 11818390 U JP11818390 U JP 11818390U JP H0475171 U JPH0475171 U JP H0475171U
- Authority
- JP
- Japan
- Prior art keywords
- cold trap
- casing
- vacuum device
- cold
- panels
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図はこの考案の第１の実施例の真空装置を
示す模式図、第２図はその装置の要部断面図、第
３図はその装置に適用された低温バツフルを示す
斜視図、第４図はこの考案の第２の実施例の真空
装置を示す要部断面図、第５図は第４図の−
線断面図、第６図は第４図の−線断面図、第
７図は従来の真空装置の要部断面図である。
１１……真空チヤンバ、１３……油拡散ポンプ
、２１，３１……ケーシング、２４，３４……低
温バツフル、２４ｂ，３４ｂ……クライオパネル
、２５，３５……水冷バツフル、２５ｂ，３５ｂ
……水冷パネル。
Fig. 1 is a schematic diagram showing a vacuum device according to the first embodiment of this invention, Fig. 2 is a cross-sectional view of the main parts of the device, Fig. 3 is a perspective view showing a low temperature buffer applied to the device, and Fig. 3 is a perspective view showing a low temperature buffer applied to the device. Figure 4 is a cross-sectional view of the essential parts of the vacuum device of the second embodiment of this invention, and Figure 5 is a cross-sectional view of the vacuum device of the second embodiment of this invention.
6 is a cross-sectional view taken along the line -- in FIG. 4, and FIG. 7 is a cross-sectional view of a main part of a conventional vacuum device. 11... Vacuum chamber, 13... Oil diffusion pump, 21, 31... Casing, 24, 34... Low temperature buffer, 24b, 34b... Cryopanel, 25, 35... Water cooling buffer, 25b, 35b
...Water cooling panel.
Claims (1)
経路上に、被処理流体が通過するケーシングとそ
のケーシング内に配置されるコールドトラツプ本
体とをそれぞれ有する第１および第２コールドト
ラツプが配置される真空装置において、 前記第１コールドトラツプのケーシングと、前
記第２コールドトラツプのケーシングとが一体的
に形成されたことを特徴とする真空装置。 (2) 請求項１記載の真空装置であつて、 前記第１コールドトラツプのコールドトラツプ
本体および前記第２コールドトラツプのコールド
トラツプ本体のうち一方側のコールドトラツプ本
体には非平板状の複数枚のパネルが設けられるこ
とにより、各パネル間で構成される前記被処理流
体の経路が非直線状となるようにされた真空装置
。 (3) 請求項１記載の真空装置であつて、 前記第１コールドトラツプのコールドトラツプ
本体には、第１の方向に沿つて相互に略平行に配
置されたプレート状の複数枚の第１パネルが設け
られるとともに、前記第２コールドトラツプのコ
ールドトラツプ本体には、第２の方向に沿つて相
互に略平行に配置されたプレート状の複数枚の第
２パネルが設けられ、前記第１および第２の方向
を異なる方向としたことを特徴とする真空装置。[Claims for Utility Model Registration] (1) A first and second trap having a casing through which the fluid to be treated passes and a cold trap body disposed within the casing, respectively, on the suction path from the vacuum chamber to the oil diffusion pump. A vacuum device in which a second cold trap is arranged, characterized in that the casing of the first cold trap and the casing of the second cold trap are integrally formed. (2) The vacuum apparatus according to claim 1, wherein one of the cold trap bodies of the first cold trap and the second cold trap has a non-flat plate. A vacuum device in which a plurality of panels having a shape are provided so that a path of the fluid to be processed formed between the panels is non-linear. (3) The vacuum device according to claim 1, wherein the cold trap body of the first cold trap includes a plurality of plate-shaped cold traps arranged substantially parallel to each other along the first direction. The cold trap body of the second cold trap is provided with a plurality of plate-shaped second panels arranged substantially parallel to each other along the second direction, A vacuum device characterized in that the first and second directions are different directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990118183U JP2522383Y2 (en) | 1990-11-08 | 1990-11-08 | Vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990118183U JP2522383Y2 (en) | 1990-11-08 | 1990-11-08 | Vacuum equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0475171U true JPH0475171U (en) | 1992-06-30 |
| JP2522383Y2 JP2522383Y2 (en) | 1997-01-16 |
Family
ID=31866087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990118183U Expired - Lifetime JP2522383Y2 (en) | 1990-11-08 | 1990-11-08 | Vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522383Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141010A (en) * | 2018-07-10 | 2019-01-04 | 益发施迈茨工业炉（上海）有限公司 | The cold well device of variable-vane and its vacuum pumping method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6137468A (en) * | 1984-07-31 | 1986-02-22 | Nippon Kayaku Co Ltd | Thermal recording sheet |
-
1990
- 1990-11-08 JP JP1990118183U patent/JP2522383Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6137468A (en) * | 1984-07-31 | 1986-02-22 | Nippon Kayaku Co Ltd | Thermal recording sheet |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141010A (en) * | 2018-07-10 | 2019-01-04 | 益发施迈茨工业炉（上海）有限公司 | The cold well device of variable-vane and its vacuum pumping method |
| CN109141010B (en) * | 2018-07-10 | 2023-10-20 | 益发施迈茨工业炉（上海）有限公司 | Variable blade cooling well device and vacuumizing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2522383Y2 (en) | 1997-01-16 |
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