JPH0475312A - Manufacture of ceramic capacitor - Google Patents

Abstract

PURPOSE:To simply mass-produce a ceramic capacitor by repeating the following operation several times: a film carrier provided with a green sheet is introduced into a prescribed position; and an electrode pattern on the carrier film and a green sheet piece in a final product size are transcribed onto the side of a transcription head by using a thermal head and the transcription head. CONSTITUTION:A first magnetic head 17 for readout use is brought into contact with a magnetic film on the rear of a carrier film 6 provided with a green sheet; a defect part or the like on the green sheet is read out. A second magnetic head 20 for readout use is brought into contact with a magnetic film on the rear of a carrier film 14 provided with a conductive film; a defect part or the like on the conductive film is read out. After that, when the good green sheet and the good conductive film on the carrier film 6 provided with the green sheet and on the carrier film 14 provided with the conductive film are situated between a support sheet 18 for transcription use and a thermal head 19, the thermal head 19 is pressed toward the support sheet 18. Thereby, an electrode pattern 21 whose area is the same as that of the tip face of the thermal head 19 is transcribed onto a green sheet 5 from the conductive film 13 on the carrier film 14 provided with the conductive film in such a way that its length direction is directed along the length direction of the carrier film 6 provided with the green sheet.

Description

[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a method of manufacturing a ceramic capacitor.

(Prior Art) Conventionally, ceramic capacitors have been manufactured by the method described below.

First, a ceramic slurry with an appropriate viscosity is prepared by mixing raw material ceramic powder with an organic binder, a dispersant, and a solvent, and then this slurry is transferred to a wide carrier whose surface has been treated with a release agent using the doctor blade method. The film is coated to a desired thickness and further dried at 80 to 90°C to form a ceramic green sheet. Next, a conductive paste is screen printed on the green sheet of the carrier film and dried to form a plurality of electrode patterns in the width and length directions of the green sheet. After continuously peeling off the green sheet on the carrier film,
A plurality of green sheet pieces having a desired size and having a plurality of electrode patterns formed on the upper surface are taken out by cutting. Separately, a plurality of green sheet pieces (for example, around 5 pieces) that will become the lower and upper cover sheets are prepared from the green sheet on which the electrode pattern is not formed on the carrier film so that they have the same dimensions as the green sheet pieces taken out above. Take it out in advance. Next, a plurality of green sheet pieces that will become a lower cover sheet are laminated, a plurality of green sheet pieces on which the plurality of electrode patterns are formed are laminated thereon, and a plurality of green sheets that will become an upper cover sheet are then laminated. After the pieces are laminated, pressure is applied and crimped to produce a laminate. Thereafter, the laminate is diced into base grains using a blade or the like along the periphery of each electrode pattern arranged in a plane, degreased, and fired to produce a plurality of ceramic capacitors.

However, in the conventional ceramic capacitor manufacturing method described above, after forming a green sheet on a carrier film and forming a plurality of electrode patterns, the green sheet is peeled off and cut, and a plurality of electrode patterns are formed on the top surface. There is a problem in that the green sheet is damaged in the peeling process in order to take out a green sheet piece of a desired size on which an electrode pattern is formed. In particular, when a thin green sheet on the order of tens of micrometers or less than 10 micrometers is formed on a carrier film in response to the increase in the capacitance of ceramic capacitors, damage in the peeling process becomes noticeable, and in reality, the high capacitance ceramic capacitors It becomes impossible to manufacture.

In addition, the green sheet pieces, each of which has a plurality of electrode patterns formed on its upper surface taken out by peeling, are laminated one by one in a separate process, which makes the process complicated and reduces productivity.

Furthermore, in the step of laminating a plurality of green sheet pieces to become the lower cover sheet, laminating a plurality of green sheet pieces on which a plurality of electrode patterns are formed, and laminating a plurality of green sheet pieces to become the upper cover sheet. However, if the positions of the plurality of green sheet pieces on which the plurality of electrode patterns are formed are misaligned, all of the plurality of capacitors obtained in the dicing process become defective, resulting in a significant decrease in yield.

(Problems to be Solved by the Invention) The present invention has been made to solve the above-mentioned conventional problems, and uses a carrier film with a green sheet, in which a thin ceramic green sheet is formed on a carrier film, as a starting material. The present invention also aims to provide a method that can avoid damage to green sheets during the manufacturing process and can easily and mass-produce high-capacity ceramic capacitors.

[Structure of the Invention] (Means for Solving the Problems) The present invention provides a first method in which a plurality of electrode patterns are formed on a carrier film with a green sheet, which is obtained by coating a long carrier film with ceramic slurry and drying it. a second step of causing the transfer head of a transfer head and a thermal head arranged to face each other to hold a green sheet piece of a desired shape; and a second step of placing the carrier film between the transfer head and the thermal head thereon. After introducing the electrode pattern so that it is located on the transfer head side, the thermal head is pressed toward the transfer head side to transfer the electrode pattern and green sheet on the carrier film to the transfer head side and form the electrode. a third step of forming a laminate in which the pattern is sandwiched between pieces of green sheets; and a third step of relatively moving the carrier film, the transfer head, and the thermal head to connect the transfer head to another electrode pattern on the carrier film. This method of manufacturing a ceramic capacitor is characterized by comprising a fourth step of transferring an electrode pattern and a green sheet to the transfer head I side, which are opposite to each other and similar to the third step.

The carrier film is made of, for example, polyethylene, polypropylene, polyethylene terephthalate, polyester, or the like.

The ceramic slurry is prepared, for example, by mixing ceramic powder as a raw material with an organic binder, a dispersant, and a solvent. Examples of the ceramic powder used here include Pb s B a s S, ZnSNb
, Ti, Mg, and other oxides or carbonates. Examples of the organic binder include polyvinyl alcohol, polyvinyl butyral, and acrylic resin. Examples of the dispersant include phosphoric acid esters. Examples of the solvent include alcohol, toluene, acetone, and the like. Note that, if necessary, a thermoplastic agent such as dioctyl phthalate may be blended with each of the above components to prepare a ceramic slurry.

As a means for applying the ceramic slurry, for example, a doctor blade method may be employed.

The green sheet-attached carrier film is stored, for example, in a cassette. A magnetic film for magnetically recording various information such as defect status of the green sheet can be formed on one or both sides of the carrier film with the green sheet, excluding the area covered with the green sheet. .

The first step of forming an electrode pattern on the carrier film with a green sheet includes, for example, printing a conductive paste on the green sheet of the carrier film with a green sheet, or printing the carrier film with a green sheet and the carrier film with a conductive film in a green manner. A method may be adopted in which a sheet and a conductive film are stacked so as to be in contact with each other, and a desired region of the conductive film of the carrier film with a conductive film is thermally transferred onto the green sheet of the carrier film with a green sheet. In particular, the carrier film with a conductive film used in the latter method can be stored in a cassette and used for dW. Furthermore, it is possible to form a magnetic film on one or both sides of the carrier film with a conductive film, excluding the conductive film-covered area, for magnetically recording various information such as defect status of the conductive film. .

In the second step of causing the transfer head to hold a green sheet piece of a desired shape, for example, a carrier film with a green sheet is introduced so that the green sheet is positioned on the side of the transfer head, and in the subsequent third step, the green sheet piece is held on the transfer head side. A method may be adopted in which a green sheet piece of a desired shape is transferred to the transfer head side by pressing thermal heads arranged facing each other against the carrier film side.

Note that a multilayer ceramic capacitor having a desired capacitance can be obtained by repeating the fourth step a plurality of times.

(Function) According to the method of the present invention, a carrier film with a green sheet on which a plurality of electrode patterns are formed is introduced between a transfer head and a thermal head so that the electrode pattern thereon is located on the transfer head side, Using the thermal head and the transfer head, the electrode pattern on the carrier film and the green sheet piece having the size of the final product are transferred to the transfer head side a plurality of times to form a stack. Therefore, it is possible to avoid damage to the green sheet, which is a problem when a green sheet with a large area on which a plurality of electrodes are formed is peeled off from the carrier fill, taken out, and transferred to another process as in the conventional method. In particular, even if a thin green sheet on the order of tens of micrometers or 10 micrometers or less is formed on a carrier film, damage to the green sheet can be avoided by employing the transfer process. As a result, by taking out the laminate from the transfer head and firing it, a multilayer ceramic capacitor with a high capacity in the final product size can be produced extremely easily and with a high yield.

Further, if a positional shift occurs in the laminate formed on the transfer head, it is possible to relatively easily determine the occurrence of the shift by visual inspection, so that the frequency of defective products can be reduced.

Furthermore, by forming a magnetic film on one or both surfaces of the carrier film with green sheets, excluding the green sheet-covered area, the following various advantages can be exhibited.

(2) If there is a defect in the green sheet, after mechanically reading out the location, defect data can be written in the magnetic film portion corresponding to the defect using a magnetic head. Therefore, when using a carrier film with a green sheet, by reading the location with a reproducing head, only the green sheet portion without defects can be provided to the transfer head.

Further, since the length information of the carrier film can be written on the magnetic film by a magnetic head, the remaining amount of the sheet, etc. can be easily grasped. Furthermore, when forming an electrode pattern, the position information where the electrode pattern is formed can be written by a magnetic head, so if the information written on the magnetic film when cutting the green sheets when stacking them can be read out, It becomes possible to accurately position the cutting position. As a result, it is possible to improve the yield rate, improve workability, and automate the manufacturing of multilayer ceramic capacitors.

■Because the sheet contents (e.g. manufacturing date, code number, material and thickness of the green sheet, etc.) can be displayed by magnetic recording on the magnetic film formed on the carrier film with green sheet, the carrier film may be mishandled. etc. can be prevented.

The various advantages described above are the same even when a magnetic film is formed on one or both surfaces of the carrier film with a conductive film used for forming the electrode pattern, excluding the conductive film covered area.

Furthermore, by storing the carrier film with a green sheet and the carrier film with a conductive film in a cassette, the following various advantages can be exhibited. That is, ■
Since the cassettes are made of plastic cases, they can be stacked and stored, requiring less storage space than before.■
Even if the cases are stacked, the contents can be displayed on the back of the case, making it easy to manage (and easy to sort) ■ Rectangular parallelepiped shape makes it easy to carry ■ Since the sheets are stored in the case, it is easy to keep away from dirt and dust. It is possible to prevent the adhesion of such substances.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings. In this example, the following steps will be explained: a manufacturing process of a carrier film with a ceramic green sheet, a manufacturing process of a carrier film with a conductive film, a transfer process of an electrode pattern, a process of laminating green sheet pieces having an electrode pattern, and a firing process.

[Manufacturing process of carrier film with green sheet] First, a magnetic powder slurry having a predetermined viscosity is prepared by dissolving and dispersing γ-iron oxide powder, polybutyral, and phosphate ester in acetone, and then this slurry is passed through a doctor blade. By coating the back side of a polyethylene terephthalate film with a width of 2 cm and a thickness of 30 μm as a carrier film along the length direction, and drying it, a carrier film is formed as shown in Fig. 1 (A) and (B).
A magnetic film 2 having a width of 5 cm is formed from the back end of the magnetic film 1.

Then 0.85 mol of Pb, 15 mol of B a O;
ZnO; 10 mol, MgO; IL3mo) I,,N
After preparing a ceramic slurry having a predetermined viscosity by dissolving and dispersing each oxide powder, polybutyral, and phosphoric acid ester in acetone, 23.4 moles of b205 and 30 moles of TiO2, this slurry was heated with a doctor blade. It is applied onto the surface of the carrier film 1 along its length by a method. Subsequently, this carrier film l is transferred to a roller 70-70 where rollers 3 are arranged as shown in FIG.
It is dried by passing through a drying oven 4 at 90°C, and as shown in FIGS.
v. A green sheet-attached carrier film 6 on which a ceramic green sheet 5 having a thickness of 20 μm is formed is produced. Subsequently, the green sheet-attached carrier film 6 is moved to an inspection step 7 by the roller 3, and the ceramic green sheet 5 is inspected for defects, etc. In this inspection step 7, a writing magnetic head 8 is placed in contact with the magnetic film on the back side of the carrier film 6 with a green sheet.
is arranged, magnetically records the starting edge of the carrier film, the defective part of the green sheet, and the ending edge of the carrier film on the magnetic film, as well as records the length from the starting edge of the carrier film, and has winding rolls 9a and 9b. 1 cassette I
Wrap it around O and store it. At the end of the carrier film,
The contents, such as the manufacturing date, code number, material and thickness of the green sheet, etc., are recorded.

[Preparation process of carrier film with conductive film] Magnetic powder slurry having the same composition as described above is applied along the length direction on the back side of a polyethylene terephthalate film having a width of 2ei+ and a thickness of 10 μm as a carrier film using a doctor blade method. Then, by drying, a magnetic film having a width of 51 mm is formed from the back end of the carrier film 1. Subsequently, 70vt%A g -30vt%Pd alloy powder,
Dissolve polybutyral and phosphate ester in acetone,
After preparing a dispersed conductive slurry having a predetermined viscosity, this slurry is applied onto the surface of the carrier film along its length using a doctor blade method. Subsequently, in the same manner as the carrier film with the green sheet described above, by drying it, the shapes shown in FIGS. 4(a) and 4(b) are obtained.
), a magnetic film 12 is formed on the back surface of the carrier film 11.
, width 1c near the center of the surface! 11 3 μm thick conductive film 13
A carrier film 14 with a conductive film formed in the length direction is produced.

After this, the material, thickness, defect information of the conductive film in the inspection process,
In addition to magnetically recording the starting edge of the carrier film, the defective part of the conductive film, and the ending edge of the carrier film on the magnetic film using a magnetic writing head, the length from the starting edge of the carrier film and the date of manufacture are recorded, and the carrier film with the conductive film is recorded. The film is wound and stored in a second cassette having a take-up roll.

[Electrode pattern transfer process] As shown in FIG.
A carrier film 1 with a conductive film is placed above the cassette 10 of
A second cassette 1 has take-up rolls 15a and 15b in which 4 is wound around one take-up roll 15a and housed.
6 are placed facing each other. Pull out the carrier film 6 with green sheet from the first cassette 10 in advance,
While being guided by roller 3, move Rad 1 to the first magnetic field for reading.
7, between the transfer support plate 18 and the thermal head 19, and further passes through the recording head 33 to be set. The carrier film 14 with a conductive film is also pulled out from the second cassette IB in advance, and without being guided by the roller 3, it is passed through the magnetic head 20 for reading J@2 and passed between the carrier film 6 with a green sheet and the thermal head 19. The carrier film 14 with a conductive film is set so that the conductive film 13 faces the carrier film 6 with a green sheet. Next, the first reading magnetic head 17 is brought into contact with the magnetic film directly on the carrier film 6 with the green sheet, and the defective parts of the green sheet are read.
Further, the second reading magnetic head 20 is brought into contact with the magnetic film directly on the carrier film with a conductive film 14, and after reading defective parts of the conductive film, etc., the carrier film with a green sheet 6 and the carrier film with a conductive film 14 are When a good green sheet and conductive film are located between the transfer support plate 18 and the thermal head 19, the thermal head 19 is pressed toward the support plate 18, and the sixth
As shown in Fig. 7, the carrier film 1 with a conductive film is
An electrode pattern 21 having the same area as the tip surface of the thermal head 19 (length 7.3 mm, width 4.9 mm) is formed from the conductive film 13 of No. 4.
The length direction is the carrier film with green sheet 6
Transfer it onto the green sheet 5 along the length direction. At the same time as the electrode pattern 21 is transferred, the recording magnetic head 33 is used to record the position at which the green sheet 5 is to be cut in the lamination process described later on the magnetic film of the carrier film 6 with the green sheet onto which the electrode 21 has been transferred. The green sheet-attached carrier film 6 with the electrode pattern 21 transferred onto the green sheet 5 in this manner is wound up onto the other winding roll 9b and stored in the first cassette 10. Note that the conductive film-attached carrier film 14 after a portion of the conductive film has been transferred as an electrode pattern is wound up by the other winding roll 15b and stored in the second cassette 16.

[Step of laminating green sheet pieces having electrode patterns] As shown in FIG. 8, a punch 24 as a transfer head is inserted into the central opening 23 of the table 22 so as to be movable up and down.
A vertically movable thermal head 25 is placed near the top of the table 22, facing the punch 24, and a green sheet-attached carrier film 6 with the electrode pattern 21 transferred above the table is wound around the other take-up roll 9b. The rotated and housed first cassettes 10 are placed facing each other with a predetermined distance apart. The green sheet-attached carrier film 6 on which the electrode pattern 21 has been transferred is pulled out in advance from the first cassette 1O, and while being guided by the roller 3, the third reading magnetic head 26, the film presser 27 and the cutter 28 are moved.
The table 22 and the thermal head 2
Set after 5 minutes. Subsequently, the third reading magnetic head 26 is brought into contact with the magnetic film on the back side of the carrier film 6 with green sheets, and after reading the cut position,
By moving the cutter 28 to the side of the film presser 27, only the 6 portions of the green sheet 5 of the carrier film with the green sheet to which the electrode pattern has not been transferred are separated by 7.5 as
Cut into mm dimensions. The cut carrier film 6 with green sheet is placed on the table 22 and the thermal head 2.
After moving the punch 24 in the table 22 up to bring the upper surface of the bunch 24 into contact with the cut green sheet part, the thermal head 25 is lowered to punch the cut green sheet piece 29. 24 Transfer to the top surface. By repeating this process of cutting only the green sheet of the portion of the carrier film 6 with the green sheet to which the electrode pattern has not been transferred and transferring it to the punch 24 five times, five lower cover sheets are formed on the upper surface of the bunch 24 as shown in FIG. The green sheet pieces 30 are stacked.

Next, after reading the region of the green sheet-attached carrier film 6 onto which the electrode pattern 21 has been transferred using the third reading magnetic head 2G, the cutter 28 is moved to the film presser 2.
The carrier film with the green sheet to which the electrode pattern 21 was transferred was moved to the 7 side, and only the 6 portion of the green sheet was cut into a size of 7.5 s x 5.3 mm.

In this cutting process, the frame 3 indicated by the dashed line in FIG.
As shown in FIG. 1, the electrode pattern 21 is cut so as to match one end (for example, the right end) of the electrode pattern 21 in the length direction, and to be separated from the other side of the electrode pattern 21 by 200 μm. The cut carrier film 6 with green sheets is moved between the table 22 and the thermal head 25 as shown in FIG. 10. Next, the punch 24 in the table 22 is raised and the green sheet pieces 30 are stacked on the upper surface of the punch 24.
is brought into contact with the green sheet portion having the cut electrode pattern 21, and then the thermal head 25 is lowered to transfer the cut electrode pattern 21 and the green sheet piece 30 to the green sheet piece 30 on the upper surface of the bunch 24.

Next, after reading the cut position of the green sheet-attached carrier film 6 onto which the electrode pattern 21 was transferred using the third reading magnetic head 26, the cutter 28 was moved to the film presser 27 side, and the electrode pattern 21 was transferred. Carrier film with green sheets Only the green sheets of 6 portions are aligned with the other end (for example, the left end) in the length direction of the electrode pattern 21 as shown in the frame 32 of dashed-dotted lines in FIG. Cut it into a size of 7°5111 x 5.3+am so that it is 200 μm away from the side. Subsequently, the electrode pattern 21 and the green sheet piece 30 are transferred to the green sheet piece 30 (having the electrode pattern 21 at the bottom) on the upper surface of the punch 24 by the same operation as described above.

By repeating the above lamination operation a total of 50 times,
A laminate consisting of 50 green sheets with electrode patterns in which the exposed side surfaces of the electrode patterns 21 are alternately located at the left and right ends is produced.

Next, five green sheet pieces (not shown) serving as an upper cover sheet are laminated on the laminate by the same operation as for producing the lower cover sheet described above.

[Baking process] After the above-mentioned lamination process is completed, the upper and lower cover sheets are
After taking out the laminate of 50 sheets sandwiched between 5 green sheet pieces from the upper surface of the punch, it was degreased at 500''C for 5 hours to decompose organic matter, and then baked at 1050°C for 2 hours.

After firing, a silver paste is baked at 800° C. as an external electrode to produce a multilayer ceramic capacitor with a length of 4.5 μl and a width of 3.2 μl.

According to the method of the present invention, as shown in FIG. 8, a carrier film 6 with a green sheet on which a plurality of electrode patterns 21 are formed between a punch 24 serving as a transfer head and a thermal head 25 is connected to a carrier film 6 with an electrode pattern 2I thereon. The bunch 24
Using the thermal head 25 and bunch 24, the electrode pattern 21 on the carrier film 6 and the green sheet piece 30 of the final product size are introduced so as to be located on the side.
By performing the operation of transferring the image to the punch 24 side multiple times and stacking them, the green sheet with a large area on which multiple electrodes are formed is peeled off from the carrier fill and taken out and moved to another process, unlike the conventional method. It is possible to avoid damage to the green sheet, which is a problem when In particular, thickness 10-2
Even if a thin green sheet 5 on the order of tens of μm such as 0 μm or 10 μm or less is formed on the carrier film 1, damage to the green sheet 5 during the lamination process can be avoided by employing the transfer method described above. As a result, by taking out the laminate from the transfer head and baking it,
Multilayer ceramic capacitors with high capacity and final product dimensions can be manufactured extremely easily and with high yield.

Further, if a positional shift occurs in the laminate transferred onto the bunch 24, the occurrence of the shift can be relatively easily determined by visual inspection, so that the frequency of defective products can be reduced.

Furthermore, as shown in FIG. 5, in order to form an electrode pattern on the carrier film 6 with a green sheet as in the present embodiment, a first cassette 10 storing the carrier film 6 with a green sheet and a carrier film 14 with a conductive film is stored. The second cassettes 1B are placed facing each other, and these cassettes 1
By introducing the carrier film 6 with a conductive film 14 pulled out from the carrier film 6 and the carrier film 14 with a conductive film between the transfer support plate 18 and the thermal head 19, and performing thermal transfer of the conductive film 13 of the carrier film 14 with a conductive film 14. , the electrode pattern 21 can be formed extremely easily and efficiently on the carrier film B with a green sheet.

Furthermore, by forming the magnetic film 2.12 on the carrier film B with a green sheet and the carrier film 14 with a conductive film, if there is a defect in the green sheet or the conductive film,
After mechanically reading out the location, defect data can be written in the magnetic film portion corresponding to the defect using a magnetic head. Therefore, when using the green sheet-attached carrier film B1 conductive film-attached carrier film 14, by reading the location with a reproducing head, it is possible to transfer only the defect-free green sheet or conductive film portion. Further, since the length information of the carrier films can be written on the magnetic film by a magnetic head, the remaining amount of the carrier film, etc. can be easily grasped. As a result, the rate of non-defective products can be improved, and
It is possible to improve workability and automate the production of multilayer ceramic capacitors.

Note that the carrier film with a green sheet on which a magnetic film is formed and the carrier film with a conductive film used in the above embodiments can be applied not only to the production of multilayer ceramic capacitors but also to the production of other ceramic electronic components.

[Effects of the Invention] As detailed above, according to the present invention, even if a carrier film with a green sheet in which a thin ceramic green sheet is formed on a carrier film is used as a starting material, damage to the green sheet during the manufacturing process can be prevented. It is possible to provide a method for manufacturing high-capacity ceramic capacitors easily and in mass production.

[Brief explanation of drawings]

FIG. 1(A) is a plan view showing a state in which a magnetic film is formed on the back surface of the carrier film in this example, FIG. 1(B) is a cross-sectional view taken along line BB in FIG. The figure is a schematic diagram showing the process of forming a ceramic green sheet on the surface of a carrier film with a magnetic film formed on the back side and storing it in a cassette. Figure 3 (A) is a carrier film with a green sheet produced in the above process. A plan view showing the same figure (B)
4(A) is a plan view showing the prepared carrier film with a conductive film, and FIG. 4(B) is a sectional view taken along the line B-B in FIG. A cross-sectional view taken along line B, FIG. 5 is a schematic diagram showing the process of thermally transferring the conductive film of the carrier film with a conductive film onto the green sheet of the carrier film with a green sheet to form an electrode pattern, and FIG.
Fig. 7 is a plan view showing a carrier film with a green sheet on which an electrode pattern has been formed, and Fig. 8 is a laminate using a carrier film with a green sheet on which an electrode pattern has been transferred. FIG. 9 is a plan view showing a frame cut with a cutter from the carrier film with a green sheet to which the electrode pattern has not been transferred in the lamination step of FIG. 8, and FIG.
Figure 11 and 12 are cross-sectional views showing the stacking of five green sheets for the lower cover sheet in the punch (transfer head) and thermal head, respectively. FIG. 3 is a plan view showing a frame obtained by cutting the transferred carrier film with a green sheet with a cutter. ■, 11...Carrier film, 2.12...Magnetic film, 5...Ceramic green sheet, 6...Carrier film with green sheet, Death...To record, 10116...Cassette, ■3... Conductive film, 14
...Carrier film with conductive film, 17.20.2B・
... To the magnetic field for reading, 18... Support plate for transcription,
]9.25... Thermal head, 21... Electrode pattern, 24... Punch (transfer head), 28... Cutter, 30... Green sheet piece. Applicant's representative Patent attorney Takehiko Suzue ~ 1-U) Figure 5 Figure 6 Figure 8 Figure 10

Claims (3)

[Claims] (1) A first step of coating a long carrier film with ceramic slurry and drying it to form a plurality of electrode patterns on the carrier film with a green sheet; a second step of holding a green sheet piece of a desired shape in the transfer head; and after introducing the carrier film between the transfer head and the thermal head so that the electrode pattern thereon is located on the transfer head side. , a third step of transferring the electrode pattern and green sheet on the carrier film to the transfer head side by pressing the thermal head toward the transfer head side to form a laminate in which the electrode pattern is sandwiched between green sheet pieces; and moving the carrier film, the transfer head, and the thermal head relatively to make the transfer head face another electrode pattern on the carrier film, and forming an electrode pattern on the transfer head side similar to the third step. and a fourth step of transferring a green sheet. (2) The first step of forming an electrode pattern on the carrier film with a green sheet is to stack the carrier film with a green sheet and the carrier film with a conductive film so that the green sheet and the conductive film are in contact with each other, and 2. The method for manufacturing a ceramic capacitor according to claim 1, wherein the desired region of the conductive film is thermally transferred onto the green sheet of the carrier film with green sheet. (3) Claim 1 or 2, characterized in that the carrier film with green sheets is a carrier film with a magnetic film formed on one or both surfaces excluding the green sheet covered area.
Method of manufacturing the ceramic capacitor described.