JPH0475862A - Multiwire type cutting device - Google Patents
Multiwire type cutting deviceInfo
- Publication number
- JPH0475862A JPH0475862A JP18975790A JP18975790A JPH0475862A JP H0475862 A JPH0475862 A JP H0475862A JP 18975790 A JP18975790 A JP 18975790A JP 18975790 A JP18975790 A JP 18975790A JP H0475862 A JPH0475862 A JP H0475862A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- bobbin
- winding
- tension
- pulley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Tension Adjustment In Filamentary Materials (AREA)
Abstract
Description
[産業上の利用分前]
本発明は゛1″、導体材旧その他の硬脆性または維削性
の材料を薄板状に切断するためのマルチワイヤ式切断装
置、詳1.<はワイヤに発生ずる瞬間的な高張力を緩和
し、τ断線を防1トする機能な共λでいる切断装置も一
関するものである。
[従来の技術1
例えば半導体材料から集積回路用のウェハな切出すため
、−・本のワイヤを平行に多重配列して同一方向へ往復
走行させることし−よって多数枚の薄板に同時切断する
装置が用いられている。 この装置は例えば実公昭55
−fi280号、特公昭56−1.99号、特開平2−
48163号公報に見られるJ2うに、ワイヤの繰出ボ
ビンと巻取ボビンとの間に切断部を挾んで定張力機構を
設置1−1切断部におい゛〔二個の多溝滑車の間で等間
隔且つ平行に多重配列させたワイヤを一定張力に保持し
て同一方向へ往復走行させることによって材料を切断す
るものである。
ワイヤは往復走行しながら全体として少しずつ繰出ボビ
ンから巻取ボビンへと移動し、従って二つのボビンはワ
イヤの巻取りと繰出しとを繰返す。この場合、ワイヤは
ボビンに均一に巻取られるのが好ましく、そのために各
ボビンと定張力機構との間にトラバーサを設置している
が、トラバーサの移動速度その他の要因によって均一に
巻取られないことがある。従って、定回転速度で回転し
ているボビンにトラバーサを経てワイヤが巻取られてい
るとき、巻き径の小さい部分から大きい部分へワイヤが
移行すると周速度が大きいために引張り速度が上昇し、
そのために張力が瞬間的に高くなる。繰出ボビンにおい
ては復行時に巻取ったワイヤは次の往行時に完全に繰出
されるので巻取り不均一は加算されないが、巻取ボビン
においては往行時に巻取ったワイヤが復行時に繰出され
るワイヤよりも多いので巻取り不均一が加算され瞬間的
な高張力を発生しやすくなる。
また、ボビン自身も回転中心が偏心していると一回転毎
にワイヤの張力を変動させるので、巻取り不均一と同調
して更に高張力を発生させることがある。
一方、定張力機構はワイヤの張力変動を検知してサーボ
モータにより変動を吸収する方向へ動作させられるもの
であり、瞬間的に発生消滅する高張力に対応することが
できない。
[発明が解決しようとする課題]
本発明が解決しようとする課題は、マルチワイヤ式切断
装置において繰出ボビンや巻取ボビン殊に巻取ボビンに
基因してワイヤに発生する瞬間的な高張力を緩和するこ
とができない、という点である。
即ち、本発明はボビンに巻取り不均一や偏心があっても
ワイヤの瞬間的な高張力を緩和できるマルチワイヤ式切
断装置を提供しようとするものである。[Before industrial use] The present invention is directed to ``1'', a multi-wire cutting device for cutting old conductor materials and other hard, brittle or fibrous materials into thin plates; This also relates to a cutting device that has the function of alleviating instantaneous high tension and preventing τ from breaking. - A device is used in which multiple wires are arranged in parallel and run back and forth in the same direction, thereby simultaneously cutting them into a large number of thin plates.
-fi No. 280, Japanese Patent Publication No. 1.99/1982, Japanese Patent Publication No. 1999/1983-
J2 seen in Publication No. 48163, a constant tension mechanism is installed between the wire payout bobbin and the take-up bobbin by sandwiching the cut section 1-1 At the cut section, In addition, the material is cut by holding multiple wires arranged in parallel at a constant tension and moving them back and forth in the same direction. The wire as a whole moves little by little from the payout bobbin to the take-up bobbin while reciprocating, and therefore the two bobbins repeatedly wind up and pay out the wire. In this case, it is preferable that the wire be wound uniformly onto the bobbin, and for this purpose a traverser is installed between each bobbin and the constant tension mechanism, but the wire may not be wound uniformly due to the moving speed of the traverser and other factors. Sometimes. Therefore, when a wire is wound through a traverser onto a bobbin that is rotating at a constant rotational speed, when the wire moves from a part with a small winding diameter to a part with a large winding diameter, the peripheral speed is high, so the tensioning speed increases.
As a result, the tension increases instantaneously. With a pay-out bobbin, the wire wound during the go-around is completely paid out during the next go-around, so uneven winding is not added to the winding bobbin, but with a take-up bobbin, the wire wound during the go-around is unwound during the go-around. Since the number of wires is larger than that of the wire, winding unevenness is added and instantaneous high tension is likely to be generated. Furthermore, if the bobbin itself has an eccentric center of rotation, the tension of the wire will vary with each rotation, which may cause an even higher tension to occur in synchronization with uneven winding. On the other hand, the constant tension mechanism detects tension fluctuations in the wire and operates a servo motor to absorb the fluctuations, and cannot cope with high tensions that occur and disappear instantaneously. [Problem to be Solved by the Invention] The problem to be solved by the present invention is to reduce the instantaneous high tension generated in the wire due to the feeding bobbin and the winding bobbin, especially the winding bobbin, in a multi-wire type cutting device. The point is that it cannot be alleviated. That is, an object of the present invention is to provide a multi-wire cutting device that can relieve instantaneous high tension in the wire even if the bobbin is wound unevenly or eccentrically.
二個の多溝滑車に一本のワイヤを平行に多重配列した切
断部と、その前後に配置した定張力機構と、更にそれら
の前後に設置したワイヤの繰出ボビンおよび巻取ボビン
とを具えているマルチワイヤ式切断装置がもっている前
記課題を解決するための手段として、繰出ボビンと前方
の定張力機構との間および後方の定張力機構と巻取ボビ
ンとの間の少なくとも後者の間の部分に弾性材料によっ
て直径方向へ移動自由とされた張力吸収用の滑車を設置
した。
[作 用 1
定張力機構から巻取ボビンまたは繰出ボビンへ向かって
ワイヤが走行してこれらに巻取られているとき、ワイヤ
は定張力機構によって一定張力となっているが、ボビン
の巻き径の大きい部分或いは偏心による大径部分に導入
されるとき周速度が大きいため高速度で引張られ、その
ために張力が瞬間的に高くなる。このとき、ワイヤは弾
性材料の弾性力にうち勝って滑車を弓張り移動させ、滑
車とボビンとの間のワイヤ長さを短かくして高速度の引
張りによる巻取り量の増加に対応させることによって高
張力を緩和する。
[実施例]
図面を参照して本発明の詳細な説明する。
互いに平行な二個の多溝滑車2.3を水平面It is equipped with a cutting section in which a single wire is arranged multiple times in parallel on two multi-groove pulleys, a constant tension mechanism arranged before and after the cutting section, and a wire feeding bobbin and a winding bobbin arranged before and after the cutting section. As a means for solving the above-mentioned problem of the multi-wire cutting device, there is a method for solving the above-mentioned problems of the multi-wire type cutting device. A tension-absorbing pulley, which can be moved freely in the diametrical direction using an elastic material, was installed in the center. [Function 1] When the wire travels from the constant tension mechanism to the take-up bobbin or the pay-out bobbin and is wound on these, the wire is kept at a constant tension by the constant tension mechanism, but the winding diameter of the bobbin When introduced into a large part or a large diameter part due to eccentricity, the circumferential speed is high, so it is pulled at a high speed, and therefore the tension becomes instantaneously high. At this time, the wire overcomes the elastic force of the elastic material and moves the pulley in a bowed manner, and the length of the wire between the pulley and the bobbin is shortened to accommodate the increased winding amount due to high-speed tension. Relieve tension. [Example] The present invention will be described in detail with reference to the drawings. Two multi-groove pulleys 2.3 parallel to each other on a horizontal plane
【・に置い
てそれらの間の部分を切断部5とするとともに、その上
方部分゛に別の多溝滑車4を置いて原動機6により往復
回転駆動するよう各−し、月つこれらの多溝滑車2.3
.4を巻掛伝動機構7により同一方向へ同一速度で回転
させるようになっている。
切断部すの前後には繰出ボビン8と巻取ボビン10とが
設置され、それぞれ原動4j!9.11によって往復回
転駆動されるとともに、繰出ボビン8と第一・の多溝滑
車2との間にトラバーづ12、定置ローラ13とダンサ
口・−ラ14とを有する定張力機構15、力向象゛換用
の滑車17が順に配置されていて、繰出ボビン8から繰
出されたワイヤ1が前記の順に巻掛けられた後にと観の
多溝滑車2.3.4に多重に巻掛けられ、殊に切断部5
を形成する多溝滑車2.3の間で等間際且つ平行に配列
されている。また、第二の多溝滑車3と巻取ボビン10
との間には方向変換用の滑車18、定置ローラX9とダ
ンザローラ20とを有する定張力機構21、トラバーサ
23が順に配置J3れていて、ワイヤ】は更に前記の順
に巻掛りられj二接に巻取ボビン10に巻取られる。
各原動R6,9,11は同調して正逆転し、ワイヤ1を
往復走行させながら全体として少しずつ繰出ボビン8か
ら巻取ボビン】0へ移動さぜ、切断部すで同一方向へ同
一速度で往復する多重配列のワイヤ1により材料を多数
枚の薄片に同時切断する。
このどき、繰出ボビン8と巻取ボビン10とにはワイヤ
1が復行時および往行時にそれぞれ巻取られるが、これ
らの中心軸線と平行な方向へ往復移動するトラバー(j
”]2.23によって均一に巻取られるように1.でい
る。しかしながら、実際にli l−ラパーザ12.2
3の移動速度、繰出ボビン8ベフ巻取ボビン10の加減
速度の大きさなとの要因によって均一に巻取られないこ
とがあり、ボビン中央部に多く巻かれたりボビン両端部
に多く巻かれたりする。繰出ボビン8においては復行時
に巻取ったワイヤ1の全部を次の往行時に繰出すので巻
取り不均一・は加算されず熟視できるが、巻取ボビン】
0においては往行時に巻取っjニワイヤの一部が次の復
行時に残って次第に蓄積されるので巻取り不均一が加算
される。また、繰出ボビン8および巻取ボビン10の回
転中心が偏心l−でいるとワイヤ1の導入接触点の周速
度が−・回転鋸に変動する。
そして、巻取り不均一によって生じた巻き径の大きい部
分、或いは回転中心の偏心によって生じた大径部分にワ
イヤ1が導入されるとき、周速度が大きいj:めに高速
度で引張られ張力が瞬間的に高くなる。
一方、定張力機構15.21のダンザローラ14.20
はそれぞれ原動機16a、 22aによって往復回転す
るドラムIBb、22bに巻かれたワイヤ1.6e、2
2eに吊下げられており、ワイヤ】が走行方向を反転す
る度に入れ替わる弛緩側と緊張側との張力変動を吸収1
〜、切断部5の前後で一定張力を紛持するように−1−
下動させられる。従って、機能的に瞬間的な高張力を吸
収し緩和させることができない。
本実施例によると、切断部5の前方のトラバーサ12と
定張力機構15との間の部分、および後方の定張力機構
21とトラバーサ23との間の部分にそれぞれ張力吸収
用の滑車24.29が配置されており、トラバーサ12
を出たワイヤ1は固定滑車25、滑車24、固定滑車2
6に順に巻掛けられて定張力機構15に達し、定張力機
構21を出たワイヤは固定滑車30、滑車29、固定滑
車31の順に巻掛けられてトラバーサ23に達している
。滑車24.29はそれぞれを回転自由に支持した支持
枠27.32を引張コイルばねからなる弾性部拐28.
33で吊下げることによって直径方向即ち上下方向へ移
動自由とされている。
これらの滑車24.29は自重および下方へ延びるワイ
ヤ1の張力と弾性部材28.33の弾性力とが平衡した
位置に置かれて定張力機構15.21で一定張力に調整
したワイヤ1を繰出ボビン8、巻取ボビン10に巻取ら
せている。このとき、前記の原因によって繰出ボビン8
側または巻取ボビン10側で瞬間的な高張力を発生する
と、ワイヤ1は弾性部材28.33の弾性力にうち勝っ
て滑車24.29を引張り下方へ移動させ、それらと繰
出ボビン8または巻取ボビン10との間のワイヤ長さを
短かくして高速度の引張りによる巻取り景の増加に対応
させる。周速度が低下すると張力も低下するので滑車2
4.29は最初の位置に戻る。
尚、装置全体の配置によっては滑車24.29を傾斜ま
たは水平に配置して適宜の案内に沿って支持枠27.3
2を移動させるようにしてもよく、また弾性部材28.
33はばねの代りに空気圧シリンダなどで構成すること
ができる。更に、繰出ボビン8側の滑車24を省略して
も実用上の支障はないが、設置する方が断線防止に対す
る信頼性が高い。[. Pulley 2.3
.. 4 are rotated in the same direction and at the same speed by a winding transmission mechanism 7. A feed-out bobbin 8 and a take-up bobbin 10 are installed before and after the cutting section, and each has a driving force 4j! 9. A constant tension mechanism 15 which is driven to reciprocate and rotate by 11 and has a traverse 12, a stationary roller 13 and a dancer opening roller 14 between the payout bobbin 8 and the first multi-groove pulley 2; Pulleys 17 for changing direction are arranged in order, and the wire 1 fed out from the feeding bobbin 8 is wound in the above order and then wound in multiple ways around the multi-groove pulley 2.3.4. , especially the cutting section 5
The multi-groove pulleys 2.3 forming the multi-groove pulleys 2.3 are arranged equidistantly and parallel to each other. Also, a second multi-groove pulley 3 and a winding bobbin 10
A pulley 18 for direction change, a constant tension mechanism 21 having a stationary roller It is wound onto a winding bobbin 10. Each driving force R6, 9, 11 rotates forward and backward in synchronization, and while the wire 1 is traveling back and forth, the whole moves little by little from the unwinding bobbin 8 to the winding bobbin 0, and the cutting part is already moving in the same direction at the same speed. The material is simultaneously cut into a large number of thin pieces by reciprocating multiple arrays of wires 1. Nowadays, the wire 1 is wound on the payout bobbin 8 and the take-up bobbin 10 during the inbound and outbound movements, respectively, but the travers (j
”] 2.23 to ensure uniform winding. However, in reality, the li l-lapazar 12.2
The winding may not be uniform due to factors such as the moving speed in step 3 and the acceleration/deceleration speed of the take-up bobbin 10, resulting in more winding at the center of the bobbin or at both ends of the bobbin. do. In the unwinding bobbin 8, all of the wire 1 wound during the go-around is unwound during the next go-around, so uneven winding is not added and can be seen carefully, but the winding bobbin]
0, a part of the winding j wire during the forward movement remains during the next return movement and is gradually accumulated, so that winding non-uniformity is added. Furthermore, if the centers of rotation of the payout bobbin 8 and the take-up bobbin 10 are eccentric l-, the circumferential speed of the introduction contact point of the wire 1 fluctuates to -. When the wire 1 is introduced into a part with a large winding diameter caused by uneven winding or a large diameter part caused by eccentricity of the center of rotation, the wire 1 is pulled at a high speed and the tension is rises momentarily. On the other hand, the dancer roller 14.20 of the constant tension mechanism 15.21
are wires 1.6e, 2 wound around drums IBb, 22b, which are reciprocally rotated by prime movers 16a, 22a, respectively.
It is suspended from 2e and absorbs tension fluctuations between the relaxed side and the tensioned side, which change every time the wire] reverses its running direction.
~, so as to maintain a constant tension before and after the cutting part 5 -1-
be moved down. Therefore, it is not functionally possible to absorb and relieve instantaneous high tension. According to this embodiment, pulleys 24 and 29 for tension absorption are provided in the portion between the traverser 12 and the constant tension mechanism 15 at the front of the cutting section 5, and the portion between the constant tension mechanism 21 and the traverser 23 at the rear, respectively. is placed, and the traverser 12
The wire 1 that exits the fixed pulley 25, pulley 24, fixed pulley 2
6 and reaches the constant tension mechanism 15, and the wire exiting the constant tension mechanism 21 is wound around the fixed pulley 30, the pulley 29, and the fixed pulley 31 in this order, and reaches the traverser 23. The pulleys 24, 29 support the support frames 27, 32 which freely rotatably support the pulleys 24, 29, and the elastic members 28, 28, which are made of tension coil springs.
By suspending it at 33, it can move freely in the diametrical direction, that is, in the vertical direction. These pulleys 24, 29 are placed at a position where their own weight, the tension of the wire 1 extending downward, and the elastic force of the elastic member 28, 33 are balanced, and the wire 1, which is adjusted to a constant tension by the constant tension mechanism 15, 21, is fed out. It is wound on a bobbin 8 and a winding bobbin 10. At this time, due to the above-mentioned cause, the feeding bobbin 8
When a momentary high tension is generated on the winding bobbin 10 side or the winding bobbin 10 side, the wire 1 overcomes the elastic force of the elastic member 28.33 and pulls the pulleys 24.29 and moves them downwards, and the wire 1 overcomes the elastic force of the elastic member 28.33, pulling the pulley 24.29 and moving it downward. The length of the wire between the wire and the take-up bobbin 10 is shortened to cope with an increase in the winding pattern due to high-speed tension. As the circumferential speed decreases, the tension also decreases, so pulley 2
4.29 returns to initial position. Depending on the overall arrangement of the device, the pulleys 24.29 may be arranged inclined or horizontally, and the support frames 27.3 may be moved along appropriate guides.
2 may be moved, and the elastic member 28.
33 can be constructed with a pneumatic cylinder or the like instead of a spring. Further, although there is no practical problem even if the pulley 24 on the payout bobbin 8 side is omitted, it is more reliable in preventing wire breakage if it is provided.
本発明によると、弾性部材で移動自由とした滑車を増設
するという簡単な手段で巻取ボビン更には繰出ボビンに
基因するワイヤの瞬間的な高張力を適切に緩和して断線
を防止できるものである。According to the present invention, it is possible to prevent wire breakage by appropriately relieving instantaneous high tension in the wire caused by the winding bobbin and also the feeding bobbin by simply adding a pulley that is freely movable using an elastic member. be.
第1図は本発明の実施例を示す配置図である。
部、8・・・繰出ボビン、10・・・巻取ボビン、15
.21・・・定張力機構、24.29・・・滑車、28
.33・・・弾性部材、FIG. 1 is a layout diagram showing an embodiment of the present invention. Part, 8... Feeding bobbin, 10... Winding bobbin, 15
.. 21... constant tension mechanism, 24.29... pulley, 28
.. 33...Elastic member,
Claims (1)
断部と、その前後に配置した定張力機構と、更にそれら
の前後に設置したワイヤの繰出ボビンおよび巻取ボビン
とを具えているマルチワイヤ式切断装置において; 前記繰出ボビンと前方の定張力機構との間および後方の
定張力機構と巻取ボビンとの間の少なくとも後者の間の
部分に弾性部材によって直径方向へ移動自由とされた張
力吸収用の滑車を設置した; ことを特徴とするマルチワイヤ式切断装置。[Claims] A cutting section in which a single wire is arranged multiple times in parallel on two multi-groove pulleys, a constant tension mechanism placed before and after the cutting section, and a wire feeding bobbin and winding device placed before and after the cutting section. In a multi-wire cutting device comprising a take-up bobbin; an elastic member is provided between the pay-out bobbin and the front constant tension mechanism and between the rear constant tension mechanism and the take-up bobbin, at least in a portion between the latter; A multi-wire cutting device characterized by having a pulley for absorbing tension that is freely movable in the diametrical direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18975790A JPH0475862A (en) | 1990-07-18 | 1990-07-18 | Multiwire type cutting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18975790A JPH0475862A (en) | 1990-07-18 | 1990-07-18 | Multiwire type cutting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0475862A true JPH0475862A (en) | 1992-03-10 |
Family
ID=16246672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18975790A Pending JPH0475862A (en) | 1990-07-18 | 1990-07-18 | Multiwire type cutting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0475862A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011096018A1 (en) * | 2010-02-08 | 2011-08-11 | トーヨーエイテック株式会社 | Method of cutting workpiece with wire saw, and wire saw |
| WO2011096019A1 (en) * | 2010-02-08 | 2011-08-11 | トーヨーエイテック株式会社 | Wire saw |
| JP2013220490A (en) * | 2012-04-13 | 2013-10-28 | Komatsu Ntc Ltd | Wire saw |
| TWI488725B (en) * | 2010-02-11 | 2015-06-21 | Toyo Advanced Tech Co | Cutting method and wire sawing by wire saw |
| TWI488710B (en) * | 2010-02-11 | 2015-06-21 | Toyo Advanced Tech Co | Wire saws |
| JP2019073384A (en) * | 2017-10-19 | 2019-05-16 | 住友電気工業株式会社 | Optical fiber winding device |
-
1990
- 1990-07-18 JP JP18975790A patent/JPH0475862A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011096018A1 (en) * | 2010-02-08 | 2011-08-11 | トーヨーエイテック株式会社 | Method of cutting workpiece with wire saw, and wire saw |
| WO2011096019A1 (en) * | 2010-02-08 | 2011-08-11 | トーヨーエイテック株式会社 | Wire saw |
| US20120298091A1 (en) * | 2010-02-08 | 2012-11-29 | Toyo Advanced Technologies Co., Ltd. | Wire saw |
| US8881716B2 (en) | 2010-02-08 | 2014-11-11 | Toyo Advanced Technologies Co., Ltd. | Wire saw with tension detecting means and guide roller speed control |
| US8991381B2 (en) | 2010-02-08 | 2015-03-31 | Toyo Advanced Technologies Co., Ltd. | Method of cutting workpiece with wire saw, and wire saw |
| TWI488725B (en) * | 2010-02-11 | 2015-06-21 | Toyo Advanced Tech Co | Cutting method and wire sawing by wire saw |
| TWI488710B (en) * | 2010-02-11 | 2015-06-21 | Toyo Advanced Tech Co | Wire saws |
| JP2013220490A (en) * | 2012-04-13 | 2013-10-28 | Komatsu Ntc Ltd | Wire saw |
| JP2019073384A (en) * | 2017-10-19 | 2019-05-16 | 住友電気工業株式会社 | Optical fiber winding device |
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