JPH0476032U - - Google Patents

Info

Publication number
JPH0476032U
JPH0476032U JP11993690U JP11993690U JPH0476032U JP H0476032 U JPH0476032 U JP H0476032U JP 11993690 U JP11993690 U JP 11993690U JP 11993690 U JP11993690 U JP 11993690U JP H0476032 U JPH0476032 U JP H0476032U
Authority
JP
Japan
Prior art keywords
heat
storage space
wafer support
cylinder
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11993690U
Other languages
English (en)
Other versions
JP2502929Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11993690U priority Critical patent/JP2502929Y2/ja
Publication of JPH0476032U publication Critical patent/JPH0476032U/ja
Application granted granted Critical
Publication of JP2502929Y2 publication Critical patent/JP2502929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図及び第４図は本考案の実施例に係る縦型
構造の熱処理装置の要部構成を示す要部正面断面
図、第２図及び第３図は従来公知の熱処理装置を
示す正面断面図である。 ３……ウエーハ支持ボート、３１……石英ガラ
ス塑成体、５０……保温筒、４０……保温台、Ｂ
……保温筒収納空間、Ａ……ウエーハ支持ボート
収納空間、７０……基台、２……炉芯管。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ 上面にウエーハ支持ボートを配置し、下側空
    間に内部に多数の微小空間を有する石英ガラス塑
    成体からなる保温筒を収納した保温台を有し、該
    保温台を介して前期保温筒収納空間とウエーハ支
    持ボート収納空間を気密的に区分けするとともに
    、下側より前記保温台を支持する基台若しくは該
    基台との間の接触部を介して前記保温筒収納空間
    を通気又は減圧可能に構成した事を特徴とする縦
    型熱処理装置。 ２ 前記一の保温筒と保温台を夫々炉芯管に対し
    同心状に配置するとともに、前記保温筒上面側で
    前記保温台のウエーハ支持部背面側を支持可能に
    構成した請求項１）記載の縦型熱処理装置。
JP11993690U 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置 Expired - Lifetime JP2502929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11993690U JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11993690U JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Publications (2)

Publication Number Publication Date
JPH0476032U true JPH0476032U (ja) 1992-07-02
JP2502929Y2 JP2502929Y2 (ja) 1996-06-26

Family

ID=31867866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11993690U Expired - Lifetime JP2502929Y2 (ja) 1990-11-16 1990-11-16 保温筒を有する縦型熱処理装置

Country Status (1)

Country Link
JP (1) JP2502929Y2 (ja)

Also Published As

Publication number Publication date
JP2502929Y2 (ja) 1996-06-26

Similar Documents

Publication Publication Date Title
JPH0476032U (ja)
JPS63195723U (ja)
JPS63134719U (ja)
JPS63200331U (ja)
JPS63195722U (ja)
JPH0326341U (ja)
JPH0425234U (ja)
JPS62147332U (ja)
JPS63149236U (ja)
JPS6389239U (ja)
JPS61191457U (ja)
JPH01113310U (ja)
JPH02106200U (ja)
JPS643790U (ja)
JPH03115394U (ja)
JPS63127121U (ja)
JPS63189135U (ja)
JPS63104508U (ja)
JPH0453545U (ja)
JPH0455317U (ja)
JPH01175268U (ja)
JPH0441969U (ja)
JPS6428798U (ja)
JPH01130674U (ja)
JPH0246704U (ja)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R323117

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term