JPH0476564B2 - - Google Patents
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- Publication number
- JPH0476564B2 JPH0476564B2 JP7137286A JP7137286A JPH0476564B2 JP H0476564 B2 JPH0476564 B2 JP H0476564B2 JP 7137286 A JP7137286 A JP 7137286A JP 7137286 A JP7137286 A JP 7137286A JP H0476564 B2 JPH0476564 B2 JP H0476564B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- trapezoidal prism
- optical
- fiber
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 70
- 239000000835 fiber Substances 0.000 claims description 55
- 238000005259 measurement Methods 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Description
【発明の詳細な説明】
[産業上の利用分野]
この発明は台形プリズムを光スキヤナとして用
いた光学式多点計測装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical multi-point measuring device using a trapezoidal prism as an optical scanner.
[従来の技術]
第4図に本出願人が特願昭60−116498号におい
て出願したこの種の光学式多点計測装置を示す。
同図に示すように、各測定点には入射された光を
計測対象物理量に応じて変調するセンサ部1が設
けられ、各センサ部1には計測系からの光をセン
サ部1に送光するための送光フアイバ2とセンサ
部1からの変調光を計測系へと送るための受光フ
アイバ3とが結合されている。一方、計測系とし
ては光源4及び受光素子5が備えられており、光
源4にはこれを駆動する駆動回路6と出射光を伝
送する送光フアイバ7とが接続され、受光素子5
にはこれに光を入射するための受光フアイバ8と
信号を処理するための信号処理回路9とが接続さ
れている。またセンサ部1側の各送・受光フアイ
バ2,3と計測系側の各送・受光フアイバ7,8
との間には、これらを光学的に順次接続するため
の光スキヤナが設けられている。光スキヤナは台
形プリズム10とこれをその光軸(光学的中心
軸)11のまわりに回転駆動する駆動装置12と
ロツド状の光学レンズ13,14及び15とから
構成されている。台形プリズム10は光軸11に
対して入射像と出射像との間に鏡映倒立(左右の
位置関係はそのままで上下の位置関係を反転させ
る)の関係を生じさせる。光学レンズ13,14
は台形プリズム10の一方の側面10aに臨むと
共に光軸11を中心とする円周16上であつて光
軸11に関して対称な1対の位置にそれぞれ配置
される。さらに、光学レンズ13,14にはそれ
ぞれ計測系の送・受光フアイバ7,8が結合され
ている。また、光学レンズ15は台形プリズム1
0の側面10aに対向する側面10bに臨むと共
に台形プリズム10に関し側面10a側の円周1
6に対して光学的に対応する側面10b側の円周
17上で且つ光軸11に関して対称な1対の位置
に設置された複数のペアからなる。これらペアは
センサ部1と同数だけ設けられ、各ペアをなす各
光学レンズ15には各センサ部1の2本の送・受
光フアイバ2,3が結合されている。[Prior Art] FIG. 4 shows an optical multi-point measuring device of this type, which was filed by the present applicant in Japanese Patent Application No. 116498/1982.
As shown in the figure, each measurement point is provided with a sensor unit 1 that modulates incident light according to the physical quantity to be measured, and each sensor unit 1 transmits light from the measurement system to the sensor unit 1. A light transmitting fiber 2 for transmitting the modulated light from the sensor section 1 and a light receiving fiber 3 for transmitting the modulated light from the sensor section 1 to the measurement system are coupled. On the other hand, the measurement system includes a light source 4 and a light receiving element 5. The light source 4 is connected to a driving circuit 6 for driving the light source 4 and a light transmitting fiber 7 for transmitting the emitted light.
A light-receiving fiber 8 for inputting light and a signal processing circuit 9 for processing signals are connected to this. In addition, the transmitting and receiving fibers 2 and 3 on the sensor section 1 side and the transmitting and receiving fibers 7 and 8 on the measurement system side
An optical scanner is provided between them for optically sequentially connecting them. The optical scanner is composed of a trapezoidal prism 10, a driving device 12 that rotates the prism around its optical axis (optical central axis) 11, and rod-shaped optical lenses 13, 14, and 15. The trapezoidal prism 10 creates a mirror-inverted relationship (the vertical positional relationship is reversed while the left-right positional relationship remains the same) between the incident image and the outgoing image with respect to the optical axis 11. Optical lenses 13, 14
facing one side surface 10a of the trapezoidal prism 10, are arranged on a circumference 16 centered on the optical axis 11, and at a pair of symmetrical positions with respect to the optical axis 11, respectively. Furthermore, the optical lenses 13 and 14 are connected to measurement system transmitting and receiving fibers 7 and 8, respectively. Further, the optical lens 15 is a trapezoidal prism 1
The circumference 1 on the side surface 10a side of the trapezoidal prism 10 faces the side surface 10b opposite to the side surface 10a of the trapezoidal prism 10.
It consists of a plurality of pairs installed on the circumference 17 on the side surface 10b side that optically corresponds to the optical axis 6 and at a pair of positions symmetrical with respect to the optical axis 11. The same number of pairs as the sensor sections 1 are provided, and the two light transmitting/receiving fibers 2 and 3 of each sensor section 1 are coupled to each optical lens 15 of each pair.
このような構成において、光源4から光が出射
されると、出射光は送光フアイバ7を通り光学レ
ンズ13により平行光線とされて台形プリズム1
0の側面10aに入射し、側面10aの入射点に
対して鏡映倒立の関係にある側面10bの点から
出射する。一方、台形プリズム10は駆動装置1
2により光軸11のまわりに回転駆動される。こ
の回転により、光学レンズ13の台形プリズム1
0の鏡映倒立の位置に光学レンズ15……のいず
れかが位置したとき、台形プリズム10の出射光
は、当該光学レンズ15よりその送光フアイバ2
に入射する。送光フアイバ2に入射した光はこれ
を通つて測定点のセンサ部1へと送られ、センサ
部1で計測対象物理量により変調される。変調光
はセンサ部1に結合された受光フアイバ3に入射
しこれに導かれて光学レンズ15により平行光と
されて台形プリズム10に入射する。台形プリズ
ム10より出射した光は光学レンズ14により集
光されて受光フアイバ8に入射し、受光素子5へ
と導かれてここで光電変換される。受光素子5に
より光電変換された信号は信号処理回路9に入力
され、信号処理回路9によりセンサ部1の物理量
が算出される。 In such a configuration, when light is emitted from the light source 4, the emitted light passes through the light transmitting fiber 7, is made into parallel light beams by the optical lens 13, and then passes through the trapezoidal prism 1.
0, and exits from a point on the side surface 10b that is mirrored and inverted with respect to the incident point on the side surface 10a. On the other hand, the trapezoidal prism 10 is
2 to rotate around the optical axis 11. This rotation causes the trapezoidal prism 1 of the optical lens 13 to
When any one of the optical lenses 15 is positioned in the inverted mirrored position of
incident on . The light incident on the light transmitting fiber 2 is transmitted through it to the sensor section 1 at the measurement point, where it is modulated by the physical quantity to be measured. The modulated light enters the light-receiving fiber 3 coupled to the sensor section 1, is guided by the light receiving fiber 3, is converted into parallel light by the optical lens 15, and enters the trapezoidal prism 10. The light emitted from the trapezoidal prism 10 is condensed by the optical lens 14, enters the light-receiving fiber 8, is guided to the light-receiving element 5, and is photoelectrically converted there. The signal photoelectrically converted by the light receiving element 5 is input to the signal processing circuit 9, and the signal processing circuit 9 calculates the physical quantity of the sensor section 1.
同様にして、台形プリズム10の回転に伴つて
光源4および受光素子5は順次他の光学レンズ1
5のペアに接続され、これにより多チヤンネルの
逐次切換がなされる。 Similarly, as the trapezoidal prism 10 rotates, the light source 4 and the light receiving element 5 are sequentially connected to other optical lenses 1.
5 pairs, thereby performing sequential switching of multiple channels.
[発明が解決しようとする問題点]
このように、台形プリズム10を光スキヤナと
して用いることにより高精度で且つ高速の計測を
行なうことが可能となつた。[Problems to be Solved by the Invention] As described above, by using the trapezoidal prism 10 as an optical scanner, it has become possible to perform highly accurate and high-speed measurement.
しかしながら、一般に光信号が変調を受けると
信号のエネルギー密度が大幅に低下してしまう。
そこで、センサ部1へ光を送るための送光フアイ
バ2及び7としては光信号のエネルギー密度を高
めるために細径のものが望ましいが、センサ部1
からの変調光を受光素子5に導く受光フアイバ3
及び8は太径とした方が効率よく変調光を伝送す
ることができる。ところが、太径の光フアイバを
用いるとこの光フアイバに結合される光学レンズ
も太径とする必要があり、その結果特に多数の光
学レンズが結集されているセンサ部1側の円周1
7が大きくなり、台形プリズム10が大型化せざ
るを得ない。さらに、台形プリズム10が大型と
なることによつて、台形プリズム10の回転精度
の維持が困難となると共に回転の設定速度を低下
しなければならない。 However, in general, when an optical signal is modulated, the energy density of the signal is significantly reduced.
Therefore, it is desirable that the light transmitting fibers 2 and 7 for transmitting light to the sensor section 1 be of small diameter in order to increase the energy density of the optical signal.
A light receiving fiber 3 that guides the modulated light from the light receiving element 5 to a light receiving element 5.
And 8 can transmit modulated light more efficiently if the diameter is large. However, if a large diameter optical fiber is used, the optical lens coupled to this optical fiber must also have a large diameter, and as a result, the circumference 1 on the sensor section 1 side where a large number of optical lenses are concentrated must be
7 becomes large, and the trapezoidal prism 10 has no choice but to become large. Furthermore, as the trapezoidal prism 10 becomes larger, it becomes difficult to maintain rotation accuracy of the trapezoidal prism 10, and the set rotation speed must be lowered.
かくして本発明の目的は、上記従来技術の問題
点を解消し、光スキヤナを大型化することなく太
径の光フアイバを用いて変調光を高効率で伝送す
ることができる光学式多点計測装置を提供するこ
とにある。 Thus, an object of the present invention is to provide an optical multi-point measurement device that solves the problems of the prior art described above and can transmit modulated light with high efficiency using a large-diameter optical fiber without increasing the size of the optical scanner. Our goal is to provide the following.
[問題点を解決するための手段]
本発明の光学式多点計測装置は上記目的を達成
するために、各測定点にそれぞれ設けられると共
に該測定点の物理量に応じて入射光を変調しこれ
を出射する複数のセンサ部と、その光軸を中心と
して回転駆動される台形プリズムと、該台形プリ
ズムの一側面側に上記光軸を中心とする2つの同
心円の内側円周上及び外側円周上で且つ上記一側
面に光学的に臨ませてそれぞれ設けられた光源及
び受光素子と、上記台形プリズムの上記一側面に
対向する他側面側に上記内側円周及び上記外側円
周に対応する各円周上で且つその一端が上記他側
面に臨んでそれぞれ設けられると共に他端が上記
の各センサ部に結合された1対の組からなる複数
の送光用フアイバ及び受光用フアイバと、上記受
光素子に接続され受光素子からの信号に基づき各
測定点の物理量を求める信号処理回路とを備えた
ものである。[Means for Solving the Problems] In order to achieve the above object, the optical multi-point measurement device of the present invention is provided at each measurement point and modulates incident light according to the physical quantity of the measurement point. a trapezoidal prism that is rotationally driven around its optical axis; and two concentric circles on one side of the trapezoidal prism, one on the inner circumference and one on the outer circumference, centered on the optical axis. A light source and a light receiving element are provided on the trapezoidal prism so as to optically face the one side surface, and a light source and a light receiving element are respectively provided on the trapezoidal prism so as to optically face the one side surface, and a light source and a light receiving element are provided on the other side surface of the trapezoidal prism corresponding to the inner circumference and the outer circumference. a plurality of light-transmitting fibers and light-receiving fibers, each consisting of a pair of light-transmitting fibers and light-receiving fibers, each of which is disposed on a circumference with one end facing the other side surface and whose other end is coupled to each of the sensor sections; It is equipped with a signal processing circuit that is connected to the light-receiving element and calculates the physical quantity at each measurement point based on the signal from the light-receiving element.
[作用]
以上のように、台形プリズムの光軸を中心とす
る2つの同心円上に送光用フアイバ及び受光用フ
アイバを設けることにより、台形プリズムを大型
化することなく受光用フアイバに太径のフアイバ
を用いることができるようになる。すなわち、よ
り高精度の多点計測が可能となる。[Function] As described above, by providing the light transmitting fiber and the light receiving fiber on two concentric circles centered on the optical axis of the trapezoidal prism, the light receiving fiber can have a large diameter without increasing the size of the trapezoidal prism. Fibers can now be used. In other words, more accurate multi-point measurement is possible.
[実施例]
以下、本発明の実施例を添付図面に従つて説明
する。[Examples] Examples of the present invention will be described below with reference to the accompanying drawings.
第1図は本発明の一実施例に係る光学式多点計
測装置の構成図である。本実施例は上述した第4
図の装置において、センサ部側及び計測系側の各
送光フアイバ2及び7を細径フアイバから、各受
光フアイバ3及び8を太径フアイバから構成した
ものであり、これに伴つて各光学レンズは次のよ
うに配置される。 FIG. 1 is a configuration diagram of an optical multi-point measuring device according to an embodiment of the present invention. This example is based on the fourth
In the device shown in the figure, the light transmitting fibers 2 and 7 on the sensor section side and the measurement system side are constructed from small diameter fibers, and the light receiving fibers 3 and 8 are constructed from large diameter fibers. is arranged as follows.
台形プリズム10の側面10a側には送光用の
細径光学レンズ18及び受光用の太径光学レンズ
19がそれぞれ側面10aを臨むように設けられ
ている。第2図に示す如く、光学レンズ18は台
形プリズム10の光軸11を中心とする2つの同
心円のうち内側円周20上に位置すると共に送光
フアイバ7に結合し、光学レンズ19は外側円周
21上に位置すると共に受光フアイバ8に結合し
ている。 On the side surface 10a side of the trapezoidal prism 10, a small-diameter optical lens 18 for light transmission and a large-diameter optical lens 19 for light reception are provided so as to face the side surface 10a, respectively. As shown in FIG. 2, the optical lens 18 is located on the inner circumference 20 of two concentric circles centered on the optical axis 11 of the trapezoidal prism 10 and is coupled to the light transmission fiber 7, and the optical lens 19 is located on the outer circumference 20 of the trapezoidal prism 10. It is located on the circumference 21 and is coupled to the receiving fiber 8.
一方、台形プリズム10の側面10b側にはセ
ンサ部1の個数と同数の送光用細径光学レンズ2
2及び受光用太径光学レンズ23がそれぞれ側面
10bを臨むように設けられている。第3図に示
す如く、各光学レンズ22は台形プリズム10に
関し側面10a側の内側円周20に対して光学的
に対応する側面10b側の内側円周24上に位置
すると共にセンサ部1に接続されている各送光フ
アイバ2に結合し、各光学レンズ23は側面10
a側の外側円周21に対応する側面10b側の外
側円周25上に位置すると共に各受光フアイバ3
に結合している。さらに、各センサ部1に対応す
る送光用光学レンズ22及び受光用光学レンズ2
3の各ペアは互いに台形プリズム10の光軸11
を中心とする回転対象の位置で且つ台形プリズム
10の回転に伴つて順次計測系側の一対の光学レ
ンズ18及び19に光学的に対応するように配置
されている。 On the other hand, on the side surface 10b side of the trapezoidal prism 10, the same number of small diameter optical lenses 2 for light transmission as the number of sensor units 1 are provided.
2 and a large-diameter light-receiving optical lens 23 are provided so as to face the side surface 10b, respectively. As shown in FIG. 3, each optical lens 22 is located on the inner circumference 24 on the side surface 10b side that optically corresponds to the inner circumference 20 on the side surface 10a side of the trapezoidal prism 10, and is connected to the sensor section 1. each optical lens 23 is coupled to each transmitting fiber 2 that is connected to the side surface 10.
Each light-receiving fiber 3 is located on the outer circumference 25 on the side 10b side corresponding to the outer circumference 21 on the side a.
is combined with Further, a light transmitting optical lens 22 and a light receiving optical lens 2 corresponding to each sensor section 1 are provided.
Each pair of 3 is aligned with the optical axis 11 of the trapezoidal prism 10.
The trapezoidal prism 10 is located at a rotationally symmetric position with the trapezoidal prism 10 rotating so as to optically correspond to a pair of optical lenses 18 and 19 on the measurement system side.
また、台形プリズム10には台形プリズム10
の回転角度を検出する回転角検出器26が接続さ
れており、この回転角検出器26で検出された回
転角度により信号処理回路9において受光素子5
がどのセンサ部1からの変調光を入射したかが判
断されるように構成されている。 Further, the trapezoidal prism 10 includes a trapezoidal prism 10.
A rotation angle detector 26 is connected to detect the rotation angle of the light receiving element 5 in the signal processing circuit 9 based on the rotation angle detected by the rotation angle detector 26.
It is configured such that it is determined from which sensor unit 1 the modulated light is incident.
次に、本実施例の動作を述べる。 Next, the operation of this embodiment will be described.
光源4から光が出射されると、出射光は送光フ
アイバ7を通り光学レンズ18により平行光線と
されて台形プリズム10の側面10aに入射し側
面10bから出射する。一方、台形プリズム10
は駆動装置12により光軸11のまわりに回転駆
動され、この回転により側面10bからの出射点
に送光用光学レンズ22……のいずれかが位置し
たとき、出射光はその光学レンズ22から送光フ
アイバ2に入射しセンサ部1へ送られる。このと
き、送光フアイバ7及び2は細径のフアイバから
なつているのでエネルギー密度の高い光伝送が行
なわれる。 When light is emitted from the light source 4, the emitted light passes through the light transmitting fiber 7, is converted into a parallel beam by the optical lens 18, enters the side surface 10a of the trapezoidal prism 10, and exits from the side surface 10b. On the other hand, the trapezoidal prism 10
is rotationally driven around the optical axis 11 by the driving device 12, and when one of the light transmitting optical lenses 22 is positioned at the emission point from the side surface 10b due to this rotation, the emitted light is transmitted from that optical lens 22. The light enters the optical fiber 2 and is sent to the sensor section 1. At this time, since the light transmitting fibers 7 and 2 are made of small diameter fibers, light transmission with high energy density is performed.
センサ部1で計測対象物理量に基づいて変調さ
れた変調光は受光フアイバ3に導かれ、からに受
光用光学レンズ23により平行光とされて台形プ
リズム10に入射する。台形プリズム10より出
射した変調光は受光用光学レンズ19により集光
されて受光フアイバ8に入射し、受光素子5へと
導かれてここで光電変換される。このとき、受光
フアイバ3及び8は太径のフアイバからなつてい
るのでエネルギー密度の低下した変調光が効率よ
く伝送される。 The modulated light modulated by the sensor unit 1 based on the physical quantity to be measured is guided to the light-receiving fiber 3, then converted into parallel light by the light-receiving optical lens 23, and enters the trapezoidal prism 10. The modulated light emitted from the trapezoidal prism 10 is condensed by a light-receiving optical lens 19, enters the light-receiving fiber 8, is guided to the light-receiving element 5, and is photoelectrically converted there. At this time, since the light receiving fibers 3 and 8 are made of large diameter fibers, the modulated light with reduced energy density is efficiently transmitted.
受光素子5で光電変換された信号と共に回転角
検出器26で検出された台形プリズム10の回転
角度が信号処理回路9に入力され、ここでセンサ
部1の物理量が算出される。 The rotation angle of the trapezoidal prism 10 detected by the rotation angle detector 26 together with the signal photoelectrically converted by the light receiving element 5 is input to the signal processing circuit 9, where the physical quantity of the sensor section 1 is calculated.
台形プリズム10の回転に伴つて計測系側の一
対の光学レンズ18及び19は順次センサ部側の
他の光学レンズ22及び23のペアに接続され、
これにより多チヤンネルの逐次切換が可能とな
る。 As the trapezoidal prism 10 rotates, a pair of optical lenses 18 and 19 on the measurement system side are sequentially connected to another pair of optical lenses 22 and 23 on the sensor section side,
This enables sequential switching of multiple channels.
なお、上記実施例においては台形プリズムの両
側面に臨む各光学レンズが2つの同心円周上に配
置されているが、センサ部1の個数が多くなる場
合には3重以上の同心円周上に配することもでき
る。 In the above embodiment, the optical lenses facing both sides of the trapezoidal prism are arranged on two concentric circles, but if the number of sensor units 1 increases, they may be arranged on three or more concentric circles. You can also.
[発明の効果]
以上説明したように本発明によれば、次の如き
優れた効果を発揮する。[Effects of the Invention] As explained above, according to the present invention, the following excellent effects are exhibited.
(1) 台形プリズム側面に臨む送光用フアイバ及び
受光用フアイバを台形プリズムの光軸を中心と
する同心円上に配することにより、光スキヤナ
を大型化することなく太径の受光用フアイバの
使用が可能となる。(1) By arranging the light transmitting fiber and light receiving fiber facing the side of the trapezoidal prism on a concentric circle centered on the optical axis of the trapezoidal prism, a large diameter light receiving fiber can be used without increasing the size of the optical scanner. becomes possible.
(2) 従つて、送光用フアイバとして細径のフアイ
バを、受光用フアイバとして太径のフアイバを
それぞれ用いることにより、エネルギー密度の
高い光信号をセンサ部に伝送すると共に変調光
を効率よく計測系に伝送することができるよう
になる。すなわち、雑音が少ない高精度の計測
が可能となる。(2) Therefore, by using a small diameter fiber as the light transmitting fiber and a large diameter fiber as the light receiving fiber, it is possible to transmit a high energy density optical signal to the sensor section and efficiently measure the modulated light. It becomes possible to transmit the information to the system. In other words, highly accurate measurement with less noise is possible.
(3) 光スキヤナの大型化が回避されるので、走査
速度の低下や台形プリズムにおける光信号の減
衰が抑制され、さらに計測の精度が向上する。(3) Since increasing the size of the optical scanner is avoided, a decrease in scanning speed and attenuation of optical signals in the trapezoidal prism are suppressed, and measurement accuracy is further improved.
第1図は本発明の一実施例に係る光学式多点計
測装置の構成図、第2図及び第3図はそれぞれ実
施例における台形プリズムの右側面及び左側面に
臨む光学レンズの配置を示す説明図、第4図は従
来例を示す構成図である。
図中、1はセンサ部、2は送光フアイバ、3は
受光フアイバ、4は光源、5は受光素子、9は信
号処理回路、10は台形プリズム、11は光軸、
12は駆動装置、20及び24は内側円周、21
及び25は外側円周である。
FIG. 1 is a configuration diagram of an optical multi-point measuring device according to an embodiment of the present invention, and FIGS. 2 and 3 show the arrangement of optical lenses facing the right and left sides of a trapezoidal prism in the embodiment, respectively. The explanatory diagram, FIG. 4, is a configuration diagram showing a conventional example. In the figure, 1 is a sensor section, 2 is a light transmitting fiber, 3 is a light receiving fiber, 4 is a light source, 5 is a light receiving element, 9 is a signal processing circuit, 10 is a trapezoidal prism, 11 is an optical axis,
12 is a drive device, 20 and 24 are inner circumferences, 21
and 25 is the outer circumference.
Claims (1)
点の物理量に応じて入射光を変調しこれを出射す
る複数のセンサ部と、その光軸を中心として回転
駆動される台形プリズムと、該台形プリズムの一
側面側に上記光軸を中心とする2つの同心円の内
側円周上及び外側円周上で且つ上記一側面に光学
的に臨ませてそれぞれ設けられた光源及び受光素
子と、上記台形プリズムの上記一側面に対向する
他側面側に上記内側円周及び上記外側円周に対応
する各円周上で且つその一端が上記他側面に臨ん
でそれぞれ設けられると共に他端が上記の各セン
サ部に結合された1対の組からなる複数の送光用
フアイバ及び受光用フアイバと、上記受光素子に
接続され受光素子からの信号に基づき各測定点の
物理量を求める信号処理回路とを備えたことを特
徴とする光学式多点計測装置。 2 上記送光用フアイバが細径フアイバからなり
且つ上記受光用フアイバが太径フアイバからなる
ことを特徴とする特許請求の範囲第1項記載の光
学式多点計測装置。[Claims] 1. A plurality of sensor sections that are provided at each measurement point and that modulate incident light according to the physical quantity of the measurement point and emit it, and a trapezoidal prism that is driven to rotate about its optical axis. and a light source and a light receiving element provided on one side of the trapezoidal prism on the inner and outer circumferences of two concentric circles centered on the optical axis and optically facing the one side. and, on the other side of the trapezoidal prism opposite to the one side, the prism is provided on each circumference corresponding to the inner circumference and the outer circumference, with one end facing the other side, and the other end facing the other side. A plurality of light transmitting fibers and light receiving fibers, which are a pair of light transmitting fibers and light receiving fibers, connected to each of the above sensor sections, and a signal processing circuit that is connected to the light receiving element and calculates the physical quantity at each measurement point based on the signal from the light receiving element. An optical multi-point measuring device characterized by comprising: 2. The optical multi-point measuring device according to claim 1, wherein the light transmitting fiber is made of a small diameter fiber, and the light receiving fiber is made of a large diameter fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7137286A JPS62228912A (en) | 1986-03-31 | 1986-03-31 | Optical multi-point measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7137286A JPS62228912A (en) | 1986-03-31 | 1986-03-31 | Optical multi-point measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62228912A JPS62228912A (en) | 1987-10-07 |
| JPH0476564B2 true JPH0476564B2 (en) | 1992-12-04 |
Family
ID=13458603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7137286A Granted JPS62228912A (en) | 1986-03-31 | 1986-03-31 | Optical multi-point measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62228912A (en) |
-
1986
- 1986-03-31 JP JP7137286A patent/JPS62228912A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62228912A (en) | 1987-10-07 |
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