JPH047656U - - Google Patents
Info
- Publication number
- JPH047656U JPH047656U JP4530290U JP4530290U JPH047656U JP H047656 U JPH047656 U JP H047656U JP 4530290 U JP4530290 U JP 4530290U JP 4530290 U JP4530290 U JP 4530290U JP H047656 U JPH047656 U JP H047656U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- intake pump
- shape
- reaction vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 4
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図、第２図及び第３図はいずれも本考案に
係るポンプの平面図であり、第４図及び第５図は
それぞれ本考案ＣＶＤ装置の正面図及び断面図で
あり、第６図及び第７図はそれぞれ本考案ＣＶＤ
装置の正面図及び断面図である。第８図及び第９
図はそれぞれ従来のＣＶＤ装置の正面図及び断面
図である。
１３，１９，２１，２３……ブースターポンプ
、１７，２０，２４……ガス吸気口、１１，２６
……排出口、１４，２７……配管。
1, 2 and 3 are all plan views of the pump according to the present invention, FIGS. 4 and 5 are respectively a front view and a sectional view of the CVD apparatus of the present invention, and FIG. 6 is a plan view of the pump according to the present invention. and Fig. 7 are respectively the CVD of the present invention.
FIG. 2 is a front view and a cross-sectional view of the device. Figures 8 and 9
The figures are a front view and a sectional view of a conventional CVD apparatus, respectively. 13, 19, 21, 23... Booster pump, 17, 20, 24... Gas intake port, 11, 26
...Discharge port, 14, 27...Piping.
Claims (1)
のガス排出口に配管を介して接続した吸気ポンプ
とから成る薄膜形成装置において、 前記吸気ポンプ内に一対のまゆ形ロータを配置
し、且つ前記ガス排出口の形状と、前記配管の断
面形状及び前記吸気ポンプの吸気口の形状が前記
ロータの軸に沿つた長尺状もしくは矩形状である
か、又はロータの軸に沿つた複数個並設して成る
ことを特徴とする薄膜形成装置。[Claims for Utility Model Registration] A thin film forming apparatus comprising a reaction vessel equipped with a thin film forming means and an intake pump connected to a gas outlet of the reaction vessel via piping, wherein a pair of cocoons is provided in the intake pump. a shaped rotor, and the shape of the gas outlet, the cross-sectional shape of the piping, and the shape of the intake port of the intake pump are elongated or rectangular along the axis of the rotor, or A thin film forming apparatus characterized in that a plurality of thin film forming apparatuses are arranged in parallel along an axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530290U JPH047656U (en) | 1990-04-28 | 1990-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530290U JPH047656U (en) | 1990-04-28 | 1990-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH047656U true JPH047656U (en) | 1992-01-23 |
Family
ID=31559358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4530290U Pending JPH047656U (en) | 1990-04-28 | 1990-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047656U (en) |
-
1990
- 1990-04-28 JP JP4530290U patent/JPH047656U/ja active Pending