JPH0477130U - - Google Patents

Info

Publication number
JPH0477130U
JPH0477130U JP12067790U JP12067790U JPH0477130U JP H0477130 U JPH0477130 U JP H0477130U JP 12067790 U JP12067790 U JP 12067790U JP 12067790 U JP12067790 U JP 12067790U JP H0477130 U JPH0477130 U JP H0477130U
Authority
JP
Japan
Prior art keywords
fixing table
substrate fixing
spray chamber
substrate
spray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12067790U
Other languages
English (en)
Other versions
JP2527674Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990120677U priority Critical patent/JP2527674Y2/ja
Publication of JPH0477130U publication Critical patent/JPH0477130U/ja
Application granted granted Critical
Publication of JP2527674Y2 publication Critical patent/JP2527674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例の側断面図、第２図
は従来のスペーサ散布装置の側断面図、第３図は
従来のスペーサ散布装置に曲面基板を設置した状
態の部分断面図である。 １，２１……噴霧室、２，２２……噴射ノズル
、３，２３……挿入口、４，２４……基板固定台
、２，２５……基板、１０，３０……スペーサ分
散液、３３……シヤフト、３７……中間歯車、３
８……駆動歯車、３９……駆動モータ、４０……
リミツトスイツチ押し棒、４１……モータ反転用
リミツトスイツチ、４２……アーム、４３……扇
形歯車、５０……基板固定台回動装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 側面に基板挿入口を有するドーム状の噴霧室と
    、前記噴霧室の天井に取り付けられた噴射ノズル
    と、前記噴霧室の床面に回動自在に設置された基
    板固定台と、前記基板固定台を回動する基板固定
    台回動装置とからなることを特徴とするスペーサ
    散布装置。
JP1990120677U 1990-11-16 1990-11-16 スペーサ散布装置 Expired - Lifetime JP2527674Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990120677U JP2527674Y2 (ja) 1990-11-16 1990-11-16 スペーサ散布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990120677U JP2527674Y2 (ja) 1990-11-16 1990-11-16 スペーサ散布装置

Publications (2)

Publication Number Publication Date
JPH0477130U true JPH0477130U (ja) 1992-07-06
JP2527674Y2 JP2527674Y2 (ja) 1997-03-05

Family

ID=31868572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990120677U Expired - Lifetime JP2527674Y2 (ja) 1990-11-16 1990-11-16 スペーサ散布装置

Country Status (1)

Country Link
JP (1) JP2527674Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161626A (ja) * 1986-12-25 1988-07-05 Toshiba Corp 基板処理方法
JPH0194319A (ja) * 1987-10-07 1989-04-13 Matsushita Electric Ind Co Ltd 液晶表示パネルのスペーサ材分散装置
JPH01210868A (ja) * 1988-02-18 1989-08-24 Tdk Corp 電圧センサ及び電圧測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63161626A (ja) * 1986-12-25 1988-07-05 Toshiba Corp 基板処理方法
JPH0194319A (ja) * 1987-10-07 1989-04-13 Matsushita Electric Ind Co Ltd 液晶表示パネルのスペーサ材分散装置
JPH01210868A (ja) * 1988-02-18 1989-08-24 Tdk Corp 電圧センサ及び電圧測定装置

Also Published As

Publication number Publication date
JP2527674Y2 (ja) 1997-03-05

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