JPH0478076A - Magnetic head slider and manufacture thereof - Google Patents

Abstract

PURPOSE:To reduce the probability of the occurrence of a crash due to being caught during low floating operation by providing a fine void groove on the surface of a floating rail for generating floating force by using a phenomenon that a crystal grain boundary or a polishing streak is etched selectively by hot phosphoric acid treatment. CONSTITUTION:A pair of the floating rails 12 provided with the floating force generating rail surface 13 consisting of an inclined surface 13a and a flat surface 13b are formed at an air inlet end. Then, by using the phenomenon that the grain boundary of the crystal grain exposed on the surface of the polycrystalline ceramic of a constituent component and the polishing stream made by polishing the same surface are etched selectively by the hot phosphoric acid treatment, the rail surface of the floating rail 12 constituted of Ni-Zn magnetic ferrite, for instance, is immersion-treated by a hot phophoric acid processing solution. As the result, the grain boundary exposed on the rail surface is etched selectively, and the void-shaped groove can be easily formed at the grain boundary. Thus, the trouble of the attracting and the catching of the head to a recording medium can be prevented, and favorable floating stability can be obtained even at the time of the low floating operation.

Description

[Detailed Description of the Invention] [Summary] The present invention relates to a magnetic head slider used in a magnetic disk device and a method for manufacturing the same, particularly a structure of a magnetic head slider that does not cause head attraction to a magnetic recording medium and has good durability, and a method for manufacturing the same. The purpose of the present invention is to provide a structure and manufacturing method for a magnetic-nod slider that prevents the head from adhering to the medium facing surface and has good flying stability even when the flying height is reduced.The slider body is made of polycrystalline ceramic material. A magnetic hent slider is provided with a floating rail on a surface facing a magnetic recording medium, and has a structure in which void-like grooves are provided at the grain boundaries of crystal grains exposed on the rail surface of the floating rail. .

In addition, the grain boundaries of the crystal grains exposed on the rail surface of the floating rail facing the magnetic recording medium of the slider body formed of polycrystalline ceramic material are treated with a chemical etching method using hot phosphoric acid to form voids. The structure is such that a groove is formed.

Furthermore, after polishing the rail surface of the floating rail facing the magnetic recording medium of the slider body made of polycrystalline ceramic material in a certain direction, the rail surface having the polishing scratches is chemically etched using hot phosphoric acid. The structure shall be such that it will be processed in accordance with the law.

(Industrial Field of Application) The present invention relates to a magnetic hent slider used in a magnetic disk device and a method for manufacturing the same, and in particular, the present invention relates to a magnetic hent slider used in a magnetic disk device and a method for manufacturing the same.
The present invention relates to a structure of a magnetic rad slider that improves durability with respect to a magnetic recording medium, and a method of manufacturing the same.

2. Description of the Related Art In recent years, magnetic disk devices used as large-capacity file devices in computer systems are required to have larger capacities and higher recording densities due to an increase in the amount of information. Accordingly, thin-film magnetic disks formed by continuous sputtering method, etc., which are advantageous in meeting the above-mentioned requirements, have been adopted to replace conventional coated-film magnetic disks.

In addition, with the increase in recording density on such thin-film magnetic disks, it is essential to lower the flying height of the recording/reproducing magnetic head slider. For this reason, when the magnetic disk is stopped, the magnetic disk slider is kept in contact with the magnetic disk surface, and as the rotational speed of the magnetic disk increases, the magnetic disk slider is levitated.
5top) operation method is widely used.

In such a C3S operation system, a lubricant is applied to the magnetic disk surface because the magnetic rad slider comes into contact with and slides on the disk surface when the rotation of the magnetic disk is started and stopped. Therefore, the so-called head attraction, in which the magnetic RAD slider is attracted to the magnetic disk surface through the mediation of the lubricant, tends to occur, and the stable flying operation of the magnetic RAD slider tends to be impaired. Therefore, there is a need for a slider structure that can prevent such failures and a manufacturing method that can easily realize the slider structure.

[Conventional technology]

A conventional magnetic hent slider is made of Ni-Zn ferrite or Aj2z, as shown in FIG.
03. By grinding a slider substrate made of ceramics such as TiC, a levitation force is generated from the air inflow end side to the outflow end side of the medium facing surface, for example, from the inclined surface 3a and flat surface 3b at the air inflow end. A pair of floating rails 2 having a rail surface 3 for use is formed, and a magnetic head element (not shown) for recording and reproducing is provided on the air outflow side end surface of each floating rail 2 in such a slider body l. It is generally widely used as a normal type.

[Problem to be solved by the invention]

By the way, in such a magnetic disk slider, the rail surface 3 of each of the floating rails 2 is finished to be a smooth surface in order to avoid damage due to contact and sliding on the magnetic disk surface, and there is no sliding surface on the smooth magnetic disk surface. A lubricant is applied to the surface of the magnetic disk in order to ensure the smoothness of the magnetic disk. There is a problem in that so-called head attraction, in which the head is attracted to the head, is more likely to occur.

Especially CS S (Contact 5tart 5to
p) Due to the operation method, when the magnetic disk is stopped, the magnetic head slider comes into close contact with the disk surface, which has the disadvantage of causing head adsorption.

On the other hand, in order to prevent the occurrence of head adsorption, the rail surface 3 of each floating rail 2 in the magnetic RAD slider is
Texture processing is also performed to mechanically roughen the surface, but when the flying height of the magnetic head slider on the magnetic disk surface is reduced due to high-density recording, the surface of the disk becomes rough. If there is a very small protrusion, it becomes easy to get caught and contact sliding occurs, which impairs stable floating operation and increases the probability of a crash occurring.

In order to solve the above-mentioned conventional problems, the present invention provides a new magnetic head slider structure that prevents the head from adhering to the recording medium surface and prevents the head from getting caught, and provides good flying stability even when the flying height is lowered. The purpose is to provide information on manufacturing methods.

[Means for Solving the Problems] In order to achieve the above-mentioned objects, the present invention provides a magnetic hent slider that includes a floating rail on the surface of a slider body formed of a polycrystalline ceramic material that faces a magnetic recording medium. In this structure, void-like grooves are provided at the grain boundaries of crystal grains exposed on the rail surface of the floating rail.

In addition, the grain boundaries of crystal grains exposed on the rail surface of the floating rail that faces the magnetic recording medium of the slider body made of polycrystalline ceramic material are treated with a chemical etching method using hot phosphoric acid to form voids. The structure is such that a groove is formed.

Furthermore, after polishing the rail surface of the floating trail facing the magnetic recording medium of the slider body made of polycrystalline ceramic material in a certain direction, the rail surface having the polishing marks is chemically etched using hot phosphoric acid. The structure shall be such that it will be processed in accordance with the law.

[For production]

The present invention utilizes the fact that the grain boundaries of crystal grains exposed on the surface of the polycrystalline ceramic, which is the constituent material of the magnetic head slider, and the polishing marks created by polishing the surface are selectively etched by hot phosphoric acid treatment. For example, by immersing the rail surface of a floating rail in a magnetic head slider made of Ni--Zn magnetic ferrite in a hot phosphoric acid treatment solution, grain boundaries of crystal grains exposed on the rail surface can be selectively etched. As a result, void-like grooves can be easily formed at the grain boundaries.

Furthermore, before the rail surface of the floating rail is treated with hot phosphoric acid, the rail surface is polished in a certain direction, for example, along the length direction of the rail surface, and then the rail surface having the polished scratches is polished. By immersing the rail in a hot phosphoric acid treatment solution, the polishing marks on the rail surface are selectively etched, and the grain boundaries of exposed crystal grains are also etched at the same time, creating voids in the polishing marks and grain boundaries. grooves can be easily formed. As a result, it becomes difficult for the head to stick to the magnetic disk surface, and even if there is an extremely small protrusion on the disk surface, the probability of the magnetic hent slider getting caught during low-flying operation is significantly reduced.
The flying stability of the magnetic head slider and the safety against helad flanosh are improved.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of a magnetic head slider and a method of manufacturing the same according to the present invention, with the medium facing surface facing upward.

In the figure, 11 is a slider substrate made of magnetic ferrite such as NiZn, Mn-Zn, or ceramics such as 80203/TiC, which is finished by grinding.
A pair of floating rails 12 having a rail surface 13 for generating floating force consisting of an inclined surface 13a and a flat surface 13b at the air inflow end from the air inflow end side to the outflow end side of the medium facing surface.
The structure is similar to that of the conventional slider body 11 in which a magnetic head element (not shown) for recording and reproducing is provided on the end surface of the air outflow side of each of the floating rails 12 in the slider body 11.

Then, a portion of the floating rail 12 of the slider other than the rail surface 13 is coated with a heat-resistant resin film such as polyimide resin, and hot sulfuric acid (heated to 50 to 80°C) (
85%) for a predetermined period of time, numerous crystal grains 14 are exposed on the rail surface 13, as shown in the partially enlarged plan view of FIG. 2 and the partially enlarged side sectional view of FIG. The grain boundaries 15 of the crystal grains 14 are selectively etched, and void-like grooves 16 can be formed at the grain boundaries 15 of the crystal grains 14.

Therefore, due to the magnetism obtained in this way, the toslider prevents the head from adhering to the magnetic disk surface by the gap-like grooves 16 along the grain boundaries 15 of the crystal grains 14 formed on the rail surface 13 of the floating rail 12. In addition, countless crystal grains 14 are exposed on the rail surface 13 of the floating rail 12.
is a smooth flat surface, and the smooth flat surface of each crystal grain 14 accounts for a large force on the rail surface 13, and the edge portion of the void-like groove 16 is rounded by etching. Even if there is a very small protrusion on the surface, the probability that the RAD slider will be caught and come into contact with the magnetic field during low-flying operation is significantly reduced.

As yet another embodiment, for example, the ground-finished rail surface 1 of the floating rail 12 in the slider described above may be used.
After covering the parts other than 3 with a heat-resistant resin film such as polyimide resin, the rail surface 13 is polished in a certain direction, for example, in the length direction of the floating rail 12.

Then, the rail surface 13 is immersed in hot sulfuric acid (85%) heated to 50 to 80° C. for a predetermined period of time to perform an etching treatment, thereby removing the polishing marks 1 on the rail surface 13.
7 is selectively etched, and the grain boundaries 15 of countless crystal grains 14 exposed on the surface are also selectively etched at the same time, resulting in the polishing scratches 17 as shown in the partially enlarged plan view of FIG. and void-like grooves 1 at grain boundaries 15 of crystal grains 14.
8.16 can be formed.

The magnetic herad slider obtained in this manner also provides the same effects as the embodiments shown in FIGS. 2 and 3.

In the above embodiments, the floating rail surface facing the medium of the slider body made of magnetic ferrite such as Ni-Zn, Mn-Zn, or ceramics such as Aj2203/TiC is etched with hot phosphoric acid. Although described, the present invention is not limited to these examples, and in addition to these, for example, Zr0z, Ba
When the floating rail surface facing the medium of the slider body made of wear-resistant polycrystalline ceramic such as TiO3 or CaTi0t is etched with hot phosphoric acid, or the floating rail surface is polished, for example, in the length direction of the floating rail. A similar effect can be obtained when etching is then carried out using hot phosphoric acid.

〔Effect of the invention〕

As is clear from the above description, according to the magnetic head slider and the method of manufacturing the same according to the present invention, the grain boundaries exposed on the rail surface or the grain boundaries exposed on the rail surface are polished in a certain direction on the surface of the levitation rail for generating levitation force. By utilizing the selective etching of the polished scratches provided by hot phosphoric acid treatment, it is possible to create a structure in which fine air gap grooves are provided, making it difficult for the head to stick to the magnetic disk surface. In addition, even if there is a very small protrusion on the disk surface, the probability of it getting caught during low-flying operation and causing a crash is significantly reduced.
It has the excellent advantage of improving durability against magnetic disks.

Therefore, especially CS S (Contact 5 tart
By being used as a magnetic rad slider using the 5top) operating method, it produces excellent practical effects.

[Brief explanation of the drawing]

FIG. 1 is a perspective view for explaining an embodiment of a magnetic head slider according to the present invention and a method for manufacturing the same; FIG. 2 is a partially enlarged plan view showing a floating rail surface of a magnetic head slider according to the present invention; 3 is an enlarged side sectional view showing the floating rail portion of the magnetic head slider according to the present invention; FIG. 4 is a partially enlarged plan view showing another rail surface of the floating rail of the magnetic head slider according to the present invention; The figure is a perspective view illustrating a conventional magnetic rad slider. In Figures 1 to 4, 11 is the slider body, 12 is the floating rail, 13 is the rail surface, 14 is the crystal grain, 15 is the grain boundary, 16° 18 is the void-like groove, and 17 is the polishing scratch. zo rare crystal t1 7 lead 4, 4 bribe i,,to 2717 shoe 4h L-1kefe
q l -) L Lfn 't7) J 9th grade,
4ikJ W fig. fig. 1. 5. To fb mind. ) Slider □ is 9! Throat November Game 4 Figure 5

Claims (4)

[Claims] (1) A floating rail (
12), wherein the magnetic head slider includes crystal grains (12) exposed on the rail surface (13) of the floating rail (12).
14) A magnetic head slider characterized in that void-like grooves (16, 18) are provided at the grain boundaries (15). (2) A floating rail (12) facing the magnetic recording medium of the slider body (11) made of polycrystalline ceramic material
The grain boundaries of crystal grains (14) exposed on the rail surface (13) of
15) A method for manufacturing a magnetic head slider, comprising forming void-like grooves (16, 18) in the magnetic head slider. (3) The method for manufacturing a magnetic head slider according to claim 2, characterized in that the rail surface (13) of the floating rail (12) is treated by a chemical etching method using hot phosphoric acid. (4) A floating rail (12) facing the magnetic recording medium of the slider body (11) made of polycrystalline ceramic material
A magnetic head slider characterized in that the rail surface (13) of is polished in a certain direction, and then the rail surface (13) having polishing marks (17) is treated by a chemical etching method using hot phosphoric acid. manufacturing method.